MPS50SL Hardware Manual
Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The MPS50SL must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the MPS50SL stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E :
To maintain accuracy, the mounting surface must be flat to within 5 µm.
N O T E :
The MPS50SL is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the MPS50SL. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
Mount the stage to the mounting surface using M3 socket head cap screws (SHCS) in the [QTY 4] outer
mounting holes. Additional mounting holes are hidden under the stage table and should only be used for
mounting XY assemblies or, in special cases, when advised to by Aerotech. To mount the stage using the
inner mounting holes, obey the special instructions in
The dimension drawings in
include the mounting hole locations and screw lengths.
D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical
power prior to performing any maintenance or making adjustments to the equipment.
W A R N I N G : An unsecured MPS50SL could be dragged off of a mounting surface by its
unsupported cable.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in
are typical values and may not be accurate for your
mounting surface. Refer to
for specific model mounting locations and dimensions.
Table 2-1:
Stage to Mounting Surface Hardware
Mounting Hardware
Typical Screw
Torque
Outer Mounting Holes (typical
assembly)
M3 Socket Head Cap Screws, 12 mm long, stainless
steel
0.9 N·m
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Chapter 2
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