Aerotech ECO165SL Series, Hardware Manual

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Table 1-4: ECO165SL Series Specifications (-300 to -600)
-300 -400 -500 -600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy
(1)
Standard ±38 μm ±43 μm ±45 μm ±48 μm
Calibrated ±5.5 μm ±6 μm ±6 μm ±7 μm
Resolution
(Minimum Incremental Motion)
0.2 µm
(2)
, 0.75 µm
(3)
Bidirectional Repeatability
(1)
±4.5 μm ±5 μm ±5 μm ±5 μm
Straightness
(1)
±7 μm ±9 μm ±11 μm ±13 μm
Flatness
(1)
±7 μm ±9 μm ±11 μm ±13 μm
Pitch
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Roll
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Yaw
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Maximum Speed
(4)
300 m/s
Maximum Acceleration
(4)
Function of motor, amplifier, payload, and maximum axial load
Load Capacity
(5)
Horizontal 45 kg
Vertical
(Axial)
25 kg
Side 45 kg
Moving Mass with tabletop 2.8 kg
Stage Mass with no motor 7.8 kg 8.7 kg 9.7 kg 10.6 kg
Material Anodized Aluminum
Mean Time Before Failure 20,000 Hours
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
ECO165SL Hardware Manual 1.3. Basic Specifications
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