ANT20G Hardware Manual
Overview
Chapter 1: Overview
N O T E :
Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1:
ANT20G Model Numbering System
ANT Series Vertical Travel Stage
Radius of Rotation (Required)
-050
50 mm radius of rotation
-090
90 mm radius of rotation
-110
110 mm radius of rotation
-160
160 mm radius of rotation
Metrology (Required)
-PL1
Base performance
-PL2
High-accuracy performance, PLUS
Accessories (To be Ordered as a Separate Line)
ALIGN-PA10
XY assembly; 10 arc sec orthogonality
ALIGN-PA5
XY assembly; 5 arc sec orthogonality
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Chapter 1
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