Overview
ANT20G Hardware Manual
Table 1-4:
ANT20G Series Specifications (-110 and -160)
Model
-110
-160
Rotation Angle
20°
20°
Accuracy
(1)
±40 µrad (±8 arc sec)
±30 µrad (±6 arc sec)
Resolution (Minimum Incremental Motion)
0.25 µrad (0.05 arc sec)
0.25 µrad (0.05 arc sec)
Bidirectional Repeatability
(1)
±10 µrad (±2 arc sec)
±10 µrad (±2 arc sec)
Unidirectional Repeatability
±5 µrad (±1 arc sec)
±5 µrad (±1 arc sec)
Tilt Error Motion
±40 µrad (±8 arc sec)
±30 µrad (±6 arc sec)
Maximum Speed
150 degrees per second
Maximum Acceleration
375 rad/s
2
250 rad/s
2
Settling Time
Refer to Figure
In-Position Stability
(2)
±0.2 µrad (±0.04 arc sec)
±0.15 µrad (±0.03 arc sec)
Nominal Radius of Rotation
110 mm
160 mm
Height from Tabletop to Rotation Point
76.2 mm
120.4 mm
Maximum Torque (Continuous)
1.00 N·m
2.40 N·m
Load Capacity
Axial
2.0 kg
3.5 kg
Moment
80 kg·mm
140 kg·mm
Stage Mass
1.2 kg (2.6 lb)
1.6 kg (3.5 lb)
Material
Aluminum
MTBF (Mean Time Between Failure)
30,000 Hours
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent.
Consult factory for multi-axis or non-standard applications.
Figure 1-1:
Step and Settle Performance
12
Chapter 1
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