Page 1: ...USER MANUAL Fort Collins CO 80525 USA 970 221 4670 technical support aei com 1625 Sharp Point Drive Advanced Energy Industries Inc 4 4GXKUKQP 1EVQDGT...
Page 2: ...ow r Product a Inc RF POWER SUPPLY OPERATOR S MANUAL RF SERIES 10 2S REVISION 6 00 DOCUMENT NUMBER 21 22303 901 CC COPYRIGHT 1996 RFPP INC 1007 LAUREL OAK ROAD VOORHEES NEW JERSEY 08043 ALL RJGHTS RES...
Page 3: ...22303 901 ENGINEERING APPROVAL CUSTOMER SERVICE APPROVAL Mike Kelly Rene Clement Monica DeMarco QA APPROVAL DATE APPROVAL REVISION DESCRIPTION 9 27 97 Mike Kelly Released per EPR 430 7 22 97 Mike Kell...
Page 4: ...VOKE 4 1 6 7 PPO PPl AND PP2 4 1 6 8 EXTINLK 4 1 6 9 GATE 4 1 6 10 RAMP ENABLE 5 1 6 11 RFON 5 1 6 12 RFENABLED 5 1 6 13 GATE ENABLE 5 1 6 14 15V 5 1 6 15 15V 5 1 6 16 SV 5 1 6 17 INCMON MPl 7 1 6 l 8...
Page 5: ...QUAD GENERATOR SYSTEM 37 SECTION III FRON r PANEL PROGRAMMING 41 3 1 STATUS ENVIRONMENT AND ADJUSTMENT BUTTONS 41 3 2 PROGRAMMING ENVIRONMENT AND PROGRAM BUTTON 41 3 3 MOVEMENT WITHIN THE PROGRAMMING...
Page 6: ...4 2 PRESET PARAMETERS 61 4 3 PRESET OPERATION 63 4 3 l INDIVIDUAL PRESETS 63 4 3 2 SEQUENTIAL PRESETS 63 4 3 3 PRESETS AND MULTI GENERATOR SYSTEMS 64 4 4 PROGRAMMING PRESETS 65 4 4 1 PANEL PROGRAMMIN...
Page 7: ...TION CONFIGURATION 24 FULL ANALOG DCV OPERATION WITH MATCHING NETWORK PRESETS 25 ANALOG PULSE MODE 27 DB25 DB9 PINOUTS 30 SERIAL CABLES 232 AND 485 2 WIRE CONTROLLER CONNECTIONS 32 485 4 WIRE OR 422 C...
Page 8: ...PROGRAM RF SERIES 6 00 10 25 DOWN DOWN FAST I ADJUSTMENI I ARROWS I LEFT RIGHT AR RF ON OFF FIGURE 1 FRONT PANEL DIAGRAM...
Page 9: ...5 RFIO HFI0 500 Watts 500 Watts 1000 Watts 1000 Watts 1 4 GENERAL DESCRIPTION RF20 RF20H RF30 2000 Watts 2000 Watts 3000 Watts With RF ON forward and reflected power are shown on the top line of the V...
Page 10: ...ection for the power supply It DOES NOT provide short circuit protection An additional breaker with high current interrupt capacity or a set of fuses should be included in the system for safety This b...
Page 11: ...P2 These pins form a truth table that selects a preset in the following manner PP2 PPI PPO SELECTS L L L Preset 0 L L H Preset I L H L Preset 2 L H H Preset 3 H L L Preset 4 H L H Preset 5 H H L Prese...
Page 12: ...this pin low enables the ANALOG pulse mode The input is 1TL compatible 1 6 14 lSV 15V is a positive 15 volt DC source whose designed purpose is to generate a positive external setpoint using an extern...
Page 13: ...0000 00000 0000 6 8 o0o 00 00 0000 00000 0000 FIGURE 2 LARGE KEYING SOCKET ANALOG INTERFACE CONNECTOR VIEW OF CONNECTOR FROM REAR OF UNIT...
Page 14: ...minal The input is differential with an impedance of47k Ohms Sec Section 2 4 2 and Figures 6 7 1 6 20 DC PROBE The feedback necessary for DC bias voltage control is applied to this terminal The input...
Page 15: ...T IN The REMOTE LIMIT IN signal is designed to fold the generator back under external limit conditions Typically this input is used in dual bias systems Input impedance is IOk Ohms See Section 2 5 1 6...
Page 16: ...XTERNAL INTERLOCK DIGITAL INPUT s GATE GATE SIGNAL INPUT DIGITAL INPUT DD RAMP ENABLE RF ON RAMP ENABLE DIGITAL INPUT F RFON RF ENABLE DIGITAL INPUT M RFENABLED RF STATUS LINE DIGITAL OUTPUT EE GATE E...
Page 17: ...EEDBACK LOW ANALOG INPUT SETPOINT 1 POWERNOLTAGE SETPOINT ANALOG INPUT SETPOINT 2 POWERNOLTAGE SETPOINT ANALOG INPUT GROUND SENSE REFERENCE INPUT FOR ANALOG IN OUT CONTROL GROUND REMOTE LIMIT IN EXTER...
Page 18: ...3000 Watts into SO Ohms SO S Ohms nominal Forward power 5 FS 3 ofreading STANDARD RF OUTPUT CONNECTOR RFS HFS RFlO HFIO RF20 RF20H RF30 N N N N N HN DIN POWER STABILITY TEMPERATIJRE COEFFICIENTS OF P...
Page 19: ...0 Ohms 7 20 volts P P at operating frequency Output impedance 50 Ohms 8 volts P P at operating frequency Forward power limits on PA current or excessive reflected power RF5 37 Watts HF5 75 Watts RFlO...
Page 20: ...262 VAC 50 60 Hz 14 11 Amps HFl0 190 262 VAC 50 60 Hz 34 6 Amps RF20 190 262 VAC 50 60 Hz34 14 Amps 190 262 VAC 50 60 Hz 1 28 Amps RF20H 190 262 VAC 50 60 Hz 34 19 Amps RF30 190 262 VAC 50 60 Hz 3q 1...
Page 21: ...the analog interface connector A full complement of pins arc supplied 1 8 3 OPERATORS MANUAL 1 9 FACTORY REPAIR When factory repair is desired proceed as follows 1 Document problem encountered 2 Cont...
Page 22: ...tify carrier and RFPP Retain all shipping and packing materials Do not return without instructions from RFPP The RF20 RF20H and RF30 generators arc shipped in a wooden crate with foam inserts Unpack a...
Page 23: ...ovided to accept 1 8 inch NPT male pipe fittings An adapter is available that will accommodate 1 4 inch NPT male pipe fittings Toe unit is designed to operate normally at the specified rate of coolant...
Page 24: ...nt temperature specifications Ensure proper ventilation of the cabinet that will enclose the operational power supply RFPP recommends a I 3 4 inch space above the unit for proper air flow Free air flo...
Page 25: ...I I I CHASSIS I I I I I I I I I I I I I I I I I I 7 I I I I I I I I I I I I I I I I I 11 1 __ I I E r HEAT SINK 11 11 I I I t _ _ _ _ _ _ _ _ _ _ _ _ _J FIGURE 3 ILLUSTRATION WATER FITTINGS CONNECTION...
Page 26: ...power ofthe generator See Figure 4 for checkout configuration I Connect AC line cord 2 Connect programming plug as supplied by RFPP 3 Connect unit to dummy load 4 Turn RF on by depressing RF ON Jcey...
Page 27: ...SERlES 6 00 10 25 PINS N SHIELD 0 TT 15 0 pp 15 0 E Am OINTIN 0 D DC PROBE IN 0 C RF PROBE IN 0 LL AUXIN 0 T FBL 0 H INC MON MP1 0 J INC MON MP2 0 V GROUND SENSE 0 M RF ENABLED 0 F RFON 0 w EXT INTERL...
Page 28: ...F output cable to matching network 2 Connect programming plug As shipped the propmmning plug connects the external interlock to ground 3 Remove ground and connect the interlock to the system interlock...
Page 29: ...INCMON MP1 F J REFMON MP2 A V GROUND SENSE C M RF ENABLED E F RFON cc PRESET INVOKE FF PP2 BB PP1 u PPO DD RAMP ENABLE s GATE EE GATE ENABLE p REMOTE LIM IN y REMOTE LIM OUT z EPO CONTACTS AA EPO CONT...
Page 30: ...Optional analog connections 6a Gate enable See pulse mode application 6b Gate signal See pulse mode application 6c Incident reflected power monitors These analog outputs arc proportional to power outp...
Page 31: ...NABLED E F RFON cc PRESET INVOKE FF PP2 BB PP1 u PPO DD RAMP ENABLE s GATE EE GATE ENABLE p REMOTE LIM IN y REMOTE LIM OUT z EPO CONTACTS AA EPO CONTACTS w EXT INTERLOCK _ RR K GR OUNO NOTES 0 INDICAT...
Page 32: ...T H J V M F cc GROUND SENSE 15 Del OW FF 1 J UJ ___ _ __ 4_ _ BB u 1 _ i _____ 1 DD RAMP ENABLE S 1 __ _ _ 1 GATE EE 1 1 P y 0 Z 0 AA 1 1a1 x x w u u 1x Ju c 0 1 1a1 x w w u u 1x Ju c 0 OUT CONTROLLE...
Page 33: ...to ground When RF is turned ON the power supply will expect to see transitions on the gate pin A high to low transition on the gate pin will transfer setpoint control of the generator to setpoint 1 A...
Page 34: ..._ _ _ _ _ _ _ _ _ 1 _ ___ E N A B L E D____J ___ 5V GATE 0 I SELECT SETPOINT 2 11111111111 SELECT SETPOINT 1 V I SELECT SETPOINT 2 1ooow SET OINT 1 ____________ S E L E C T_ S ET _P O _ IN T 1 _ 5 0 0...
Page 35: ...ary inputs and provides descriptive error messages and status information The computer mode is much more cryptic in nature In general the commands arc much shorter Error messages are limited to a simp...
Page 36: ...ddress The address shall be a tbrcc character string as follows where represents a 2 digit number from 01 to 98 address 99 is reserved for global commands Leadin zeroes arc required for device address...
Page 37: ...IO 12 13 7 3 4 5 6 7 8 9 30 SIGNAL 232RCV 232XMIT 422 485 4 RCV 485 2 RCV XMIT 422 485 4 RCV 485 2 RCV XMIT 422 485 4 XMIT 422 485 4 XMIT GROUND SHIELD SIGNAL 232RCV 232 XMIT 422 485 4 RCV 485 2 RCV...
Page 38: ...232 above Again human or computer mode may be selected based on the user s application Multi drop enabled should be selected when the power supply is but one serial device in a serial communications...
Page 39: ...RANSMIT GROUND PIN 3 PIN 2 PIN7 GENERATOR OB9 RECEIVE TRANSMIT GROUND PIN 3 PIN4 PIN 9 485 2 WIRE CONNECTIONS CONTROLLER RECEIVE TRANSMIT RECEIVE TRANSMIT CONTROLLER RF SERIES 6 00 10 25 RECEIVE TRANS...
Page 40: ...ONS TRANSMIT TRANSMIT RECEIVE RECEIVE TRANSMIT TRANSMIT RECEIVE RECEIVE RF SERIES 6 00 10 25 33 GENERATOR 0B25 RECEIVE PIN9 RECEIVE PIN 10 TRANSMIT PIN 12 TRANSMIT PIN 13 GENERATOR 0B9 RECEIVE RECEIVE...
Page 41: ...OR 1 2 WITH BUS TERMINATION JUMPER REMOVED 485 4 WIRE OR 422 X R X R GENERATOR A X R CONTROLLER GENERATOR GENERATOR GENERATOR 1 2 A RF SERIES 6 00 10 25 1 WITH BUS TERMINATION JUMPER REMOVED OPTIONAL...
Page 42: ...5 FIGURE 10E SINGLE DROP BUS LAYOUT 485 2 WIRE I I XIR XIR X R X R CONTROLLER GENERATOR 485 4 WIRE OR 422 _ X R X R CONTROLLER GENERATOR OPTIONAL EXTERNAL BUS TERMINATION IF USED REMOVE BUS TERMINATIO...
Page 43: ...Out on generator B and connect pin P Remote Limit Out of generator A to pin Y Remote Limit In on generator B 2 Set the power setpoint on generator A to 50 watts and the power setpoint on generator B t...
Page 44: ...ove cover from RLI 2 Connect the RF output port of all generators into separate 50 Ohm loads 3 Set the power setpoint on all generators to approximately 5 below their respective reflected power limits...
Page 45: ...UAL GENERATOR CONFIGURATION GENERATOR A MATCHING GENERATOR B RF OUT RF OUT REMOTE NElWORKS REMOTE AND LOAD LIMIT A LIMIT B REMOTE LIMIT OUT REMOTE LIMIT IN RF SERIES 6 00 10 25 REMOTE LIMIT IN REMOTE...
Page 46: ...IN REMOTE LIMIT OUT REMOTE LIMIT OUT REMOTE LIMITIN GENERATORC REMOTE LIMIT C RF SERIES 6 00 10 2S RFOUT MATCHING NETWORKS AND LOAD REMOTE LIMIT INTERFACE 39 RF OUT GENERATORS REMOTE LIMIT B REMOTE LI...
Page 47: ...00 10 25 FIGURE 13 LIMIT POT ADJUSTMENT LOCATION A CURRENT REMOTE LIMIT CONTROL BOARD TOP VIEW RF 5S REFLECTED POWER REMOTE LIMIT PA CURRENT CONTROL BOARD TOP EDGE VIEW ALL OTHER RF GENERATORS 40 REFL...
Page 48: ...he PROGRAMMING ENVIRONMENT 3 2 PROGRAMMING ENVIRONMENT AND PROGRAM BUTTON Entrance to the PROGRAMMING ENVIRONMENT is controlled by the PROGRAM button Once the PROGRAM button has been pressed the displ...
Page 49: ...ries ofthe S columns in the following order Analog Presets Pulsing Operate System Analog 3 4 FRONT PANEL PARAMETER PROGRAMMING process Parameter programming in the PROGRAMMING ENVIRONMENT is accomplis...
Page 50: ...dti Ilia _ _H _ N II _ _ c i IOO I _ ft ow u 13 i L T UJ 2 ft 1 1 _A o l RCIIT _ l lolmW 4 S l t_ _A 2l a _DIIIJC 1111 Jll 1 IDMct W II _ _ I IJ o w i i o l _ IIJ 1 0 AUXiloll 141111 v i ft I DCV llli...
Page 51: ...int RF ON and RF OFF commands is the rear panel analog control interface Front panel controls with the exception of RF OFF are not active SERIAL indicates that the unit is under serial control All fun...
Page 52: ...ON The alanns and limit conditions arc listed as they appear on the bottom line of the display A blank field indicates that the corresponding alann is not present NOTE When in the PROGRAMMING ENVIRONM...
Page 53: ...dicates that the generator has detected reflected power in excess of the programmable reflected power alann threshold See the SYSTEM column description for REF Power Alann in this section 3 6 2 3 PA C...
Page 54: ...tor to regulate on forward or incident power Use the ADJUSTMENT ARROWS to display the desired state of this programmable feature Positive selects positive polarity over the chosen voltage range below...
Page 55: ...t panel control setpoint Use the ADJUSTMENT ARROWS to display the desired state of this programmable feature When RF ON OK is enabled the RFENABLED analog interface pin will be low if and only if RF i...
Page 56: ...ertain to this preset number i e If it is desired to program view a given parameter the Program Preset number for that parameter must be previously selected P Control NOTE P Rampin2 NOTE P Setpoint P...
Page 57: ...l run at P Setpoint for P Interval Use the ADJUSTMENT ARROWS to enable or disable the automatic sequencing function for P If AutoSeq is enabled for P at the conclusion ofthe execution ofpreset P P Int...
Page 58: ...red process pulse high time This time interval in multiples of 2 milliseconds is the time spent at the nigh power level during process pulsing of the generator Refer to Fig 14 When a modification of t...
Page 59: ...tom line ofthe VFD When enabled with RF ON Proc Pulse will cause the generation of a continuous RF power pulse train whose parameters are described above Refer to Fig 14 Process pulsing may be enabled...
Page 60: ...t five programmable start pulse parameters is attempted Start Pulsing is automatically disabled until the new group validity is verified This verification is only performed at the Start Pulse Enabled...
Page 61: ...TIMING HIGH POWER LOW POWER ZERO I I DUTY HITIME PERIOD r HITIME I FIGURE 15 START PULSE TIMING HITIME HIGH POWER ZERO RFON RF SERIES 6 00 10 25 LOW POWER DUTY HITIME PERIOD MODE DURATION 54 I I I I...
Page 62: ...ime to pulse period Sec Fig 15 Use the ADJUSTMENT ARROWS to display the desired start pulse duration This duration in milliseconds is defined as the period of time that the supply will pulse before go...
Page 63: ...OWS to display the desired matching network preset pair A load level with 2500 mv representing the midpoint ofthe capacitor adjustment See Load Tune below Use the ADJUSTMENT ARROWS to display the desi...
Page 64: ...not be invoked when matching network presets are enabled 9 00 00 0 00 0l Enabled Disabled 10000 I 100 l 100 1 100 1 Use the ADJUSTMENT ARROWS to display the desired ramp up time interval When Sctpt Ra...
Page 65: ...the display of the RF ON Clock is disabled Use the ADJUSTMENT ARROWS to display the default AC ON front panel power control setpoint value This wattage setpoint will be the default power control setpo...
Page 66: ...ply Sec Section 2 4 4 or consult RFPP for more information on serial programming Use the ADJUSTMENT ARROWS to select the desired device address for the generator In a multi drop configuration this add...
Page 67: ...for more information on serial programming Use the ADJUSTMENT ARROWS to display the desired serial communication mode HUMAN mode is generally more descriptive while COMPUTER mode is much more cryptic...
Page 68: ...rse 4 2 PRESET PARAMETERS There exist 6 programmable presets 1 6 as well as two non programmable presets 0 and 7 Preset 7 is PRESETS DISABLED Standard generator operation Preset Ois an executable pres...
Page 69: ...RF SERIES 6 00 10 25 i I I i I I I I I I I I p p R R E E s s E E T T 1 2 FIGURE 16 PRESET TIMING I I I I I I I I I I l I I I I I i i I I I I I I i i I I I I TIME p p TIME p p R R R R E E E E s s s s E...
Page 70: ...l its AUTO SEQUENCING function must be ENABLED and the preset to jump to parameter for the executing preset must be programmed Consider the top example ofFigure 16 PRESET TIMING For the purpose of thi...
Page 71: ...accomplished by tying analog pins FF BB and U to GND and then forcing a transition on analog pin CC from 5V to GND For more information on analog preset selection enabling consult the EXECUTING PRESE...
Page 72: ...PRESETS 4 4 1 PANEL PROGRAMMING OF PRESETS Presets are easily programmed from the front panel and may be selected and or enabled from the front panel over the analog interface or serially Preset progr...
Page 73: ...ard power at the setpoint irrespective of reflected power provided no alarm or limit conditions exist Under Load Pwr Leveling the software control loop maintains delivered power Incident Reflected at...
Page 74: ...ING functions see PULSING and OPERATE columns of PROGRAMMING ENVIRONMENT COLUMN sheet must be disabled Enter the PROGRAMMING ENVIRONMENT and use the OPTION button to move to the top of the PRESETS col...
Page 75: ...FIGURE 17 DUAL GENERATOR PRESET CONNECTION RF SERIES 6 00 10 25 RF GENERATOR RF GENERATOR PPO PP1 PP2 ENABLE 68...
Page 76: ...A L 0 G NN E 15 CONTROLLER __ _ J INTERFACE I N T E R F A C E NOTES R 0 A B D C 0 LL 1 1 w c ir D 0 T H J V M F CCI OW CC1 1 1 u i 111LI ti FFi ____ _ _______ 1 _ __ BB _ __ U _ __ i Jr w _ _ _ _ _ __...
Page 77: ...he desired text string see above a space and the command RUN followed by a carriage return ex P3 RUN er to execute preset 3 NOTE To save time space the string DISABLE may be replaced with the ASCII ch...
Page 78: ...nabled in place of the CEX and PULSE RAMP PST mnemonics on the bottom line of the Vacuum Fluorescent Display VFD in the STATUS ENVIRONMENT The timer is reset whenever a new programmable preset is sele...
Page 79: ...S 6 00 10 25 340 360 380 400 420 430 A 2 2 2 1 1 1 A 2 2 2 1 1 1 PHASE JUMPERS B C 7 12 2 8 7 13 7 12 2 9 7 14 7 12 2 10 7 15 6 11 1 8 6 13 6 11 1 9 6 14 6 11 1 10 6 15 190 260VAC PHASE JUMPERS B C 7...
Page 80: ...PERS RF SERIES 6 00 10 25 99 108 115 125 198 208 218 230 240 250 2 3 2 6 3 7 2 4 2 6 4 8 1 3 3 7 1 5 1 4 4 8 1 5 2 7 3 6 2 8 3 6 2 8 4 6 1 7 3 5 1 7 4 5 1 8 4 5 RF 5S 95 130 190 260 VAC NOM VOLTAGE PH...
