Aalborg GFM 17 Operating Manual Download

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Technical Data Sheet No.

TD9411M Rev. L

Date of Issue:

January 2010

OPERATING MANUAL

GFM MASS

FLOW METERS

Quality System Registered

Summary of Contents for GFM 17

Page 1: ...Technical Data Sheet No TD9411M Rev L Date of Issue January 2010 OPERATING MANUAL GFM MASS FLOW METERS Quality System Registered...

Page 2: ...gnal Output Readings 5 3 Swamping Condition 6 MAINTENANCE 6 1 Introduction 6 2 Flow Path Cleaning 6 2 1 Restrictor Flow Element RFE 6 2 2 GFM 17 models 6 2 3 GFM 37 47 models 6 2 4 GFM 57 67 77 models...

Page 3: ...nt 8 TROUBLESHOOTING 8 1 Common Conditions 8 2 Troubleshooting Guide 8 3 Technical Assistance 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES APPENDIX 1 COMPONENT DIAGRAM APPENDIX 2 GAS FACTOR TABLE K...

Page 4: ...Aalborg7 if you purchased your Mass Flow Meter directly and request a Return Authorization Number RAN Equipment returned without an RAN will not be accepted Aalborg7 reserves the right to charge a fee...

Page 5: ...onnecting the gas system to be monitored Insert tubing into the compression fittings except GFM77 until the ends of the properly sized tubings home flush against the shoulders of the fittings Compress...

Page 6: ...connector Make sure power is OFF when connecting or disconnecting any cables in the system When connecting power to the GFM mass flow meter via the DC power jack do not connect any power supply to the...

Page 7: ...ess steel sensor tube The remainder of the gas flows through the primary flow conduit The geometry of the primary con duit and the sensor tube are designed to ensure laminar flow in each branch Accord...

Page 8: ...GAS PRESSURE 1000 psig 69 bars 10 50 and 100 L min 500 psig 34 5 bars 200 500 and 1000 L min optimum pressure is 20 psig 1 4 bars GAS AND AMBIENT TEMPERATURE 32 F F to 122 F F 0 F C to 50 F C 14 F F t...

Page 9: ...ession fittings GFM77 3 4 FNPT fittings LCD DISPLAY 3 digit LCD maximum viewable digits 1999 0 5 inch high characters On GFM171 371 471 571 671 771 aluminum or stainless steel models the LCD display i...

Page 10: ...40 60 41 80 42 100 50 200 60 500 70 1000 MODEL FLOW RATE std liters min MAXIMUM PRESSURE DROP mm H2O psid mbar GFM 17 up to 10 25 0 04 2 5 GFM 37 15 63 0 09 6 4 20 300 0 44 30 30 800 1 18 81 40 1480 2...

Page 11: ...orarily disconnect the gas source to ensure that no see page or leak occurs in to the meter IF AFTER THE 15 MINUTES WARM UP PERIOD THE DISPLAY INDICATES A READING OF MORE THAN 3 0 OF F S THE UNIT HAS...

Page 12: ...wever to keep the meter away from vibration hot or corrosive environments and excessive RF or magnetic interference If periodic calibrations are required they should be performed by qualified per sonn...

Page 13: ...dels Unscrew the four socket head cap screws two 10 24 and two 6 32 at the inlet side of the meter This will release the short square block containing the inlet compression fitting The 60 micron filte...

Page 14: ...s desired based on relative correction K factors shown in the gas factor table see Appendix 2 A reference gas other than nitrogen may be used to better approximate the flow characteristics of certain...

Page 15: ...ement RFE Consult your distributor or Aalborg7 for more information 7 2 1 Connections and Initial Warm Up At the 9 pin D connector of the GFM transducer connect the multimeter to out put pins 2 and 3...

Page 16: ...s complete However it is advisable that several additional points between 0 and 100 such as 25 50 and 75 flow be checked If discrepancies are found proceed to step 7 3 for Linearity Adjustment 7 3 Lin...

Page 17: ...mA If the reading is outside of that range place the jumper at J2 as appropriate to increase or decrease the signal Adjust the setting for potentiometer R39 by using the insulated screwdriver through...

Page 18: ...rol points during and after manufacturing and assembly operations It was calibrated according to your desired flow and pressure conditions for a given gas or a mix ture of gases It was carefully packe...

Page 19: ...t GFM transducer from power supply remove the shorting condition or check polarities fuse resets automatically flush clean or disassemble to remove impediments or replace flush clean or or return to f...

Page 20: ...Vdc 250 mA minimum is recommended Carefully remove the LCD from GFM Remove the alu minum housing on the side of the connection cable Side the LCD assembly out of the aluminum housing Check connection...

Page 21: ...ernal connections to pins 2 and 3 of the D connector Make sure the load resistance is more than 1000 Ohm Return GFM to factory for repair Check external connections to pins 8 and 9 of the D connector...

Page 22: ...2 2 on page 10 NOTE Calibration accuracy can be affected Return GFM to factory for repair Flush clean or disassemble to remove impediments or replace the filter screen see 6 2 on page 9 NOTE Calibrat...

Page 23: ...side of the connection cable Side the LCD assembly out of the aluminum housing Reinstall jumper to the appropriate location on the 8 pin header block see 7 4 3 on page 15 LIKELY REASON Sensor or PC bo...

Page 24: ...S FROM REFERENCE GASES The calibration conversion incorporates the K factor The K factor is derived from gas density and coefficient of specific heat For diatomic gases K Kgas Note in the above relati...

Page 25: ...22 APPENDIX 1 COMPONENTS DIAGRAM GFM METERING PC BOARD PHONE JACK 9 PIN D CONNECTOR DC POWER JACK...

Page 26: ...omethane Freon 13 B1 CBrF3 3697 1113 6 644 1 3 Butadiene C4H6 3224 3514 2 413 Butane C4H10 2631 4007 2 593 1 Butene C4H8 2994 3648 2 503 2 Butene C4H8 CIS 324 336 2 503 2 Butene C4H8 TRANS 291 374 2 5...

Page 27: ...yl Chloride C2H5Cl 3891 244 2 879 Ethylene C2H4 60 365 1 251 Ethylene Oxide C2H4O 5191 268 1 965 Fluorine F2 9784 1873 1 695 Fluoroform Freon 23 CHF3 4967 176 3 127 Freon 11 CCl3F 3287 1357 6 129 Freo...

Page 28: ...oride CH3Cl 6299 1926 2 253 Methyl Fluoride CH3F 68 3221 1 518 Methyl Mercaptan CH3SH 5180 2459 2 146 Methyl Trichlorosilane CH3 SiCl3 2499 164 6 669 Molybdenum Hexafluoride MoF6 2126 1373 9 366 Monoe...

Page 29: ...l Fluoride SO2F2 3883 1543 4 562 Tetrafluoroethane Forane 134A CF3CH2F 5096 127 4 224 Tetrafluorohydrazine N2F4 3237 182 4 64 Trichlorofluoromethane Freon 11 CCl3F 3287 1357 6 129 Trichlorosilane SiHC...

Page 30: ...NECTION Compression Fitting except model GFM 77 DIMENSION INCH LCD VERSION NO LCD A B C C D D E E F G H GFM 17 1 4 Tube O Diameter 5 60 1 00 1 00 3 00 5 02 0 69 2 69 4 50 GFM 37 1 4 Tube O Diameter 5...

Page 31: ...28 PARTS OF THE FLOW METER LEFT AND RIGHT VIEWS FRONT VIEW...

Page 32: ...equipment covered by this warranty Anything to the contrary will automatically void the liability of Aalborg7 and the provisions of this warranty Defective products will be repaired or replaced solely...

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