Aalborg DFC, Operating Manual

Page: 13 / 48

FLOW RANGES
TABLE I DFC 26 LOW FLOW MASS FLOW CONTROLLERS*
TABLE II DFC 36 MEDIUM FLOW MASS FLOW CONTROLLERS*
TABLE III DFC 46 HIGH FLOW MASS FLOW CONTROLLERS*
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
9
CODE scc/min [N
2
]
CODE
std liters/min [N
2
]
01 0 to 10 07 0 to 1
02 0 to 20 08 0 to 2
03
0 to 50
09
0 to 5
04 0 to 100 10
0 to 10
05
0 to 200
06 0 to 500
CODE standard liters/min [N
2
]
11
0 to 15
30 20
31 30
32 40
33 50
CODE standard liters/min [N
2
]
40 60
41 80
42 100