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5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
ZEISS
5.6.7 Setting up the aBSD1-LH Detector
The aBSD1-LH detector is a pneumatically retractable backscattered electron detector which is in-
serted below the objective lens and is used for high efficiency and angle selective material charac-
terization.
Fig. 69: BSE images of NdFeB magnet surface showing different contrast on different segments of
the
1-LH detector. The inner segment S1 shows combined material contrast and topography
(left). The outer segment S2-S5 shows mainly topography (right).
The following settings are recommended for the aBSD1-LH detector:
Detector Settings
0.5–30 kV
5–12 mm
Compositional mode for obtaining an image
that is high in atomic number contrast
Use topographic mode for showing surface
details
Use individual settings for channeling con-
trast
Make use of different concentric rings of the
detector to get angular resolved BSE images
Use high or very high detector gain for low
accelerating voltage and/or low beam current
The EHT should be bigger than 2 kV to
achieve a significant detection efficiency.
Procedure
1. From the
Panel Configuration Bar
, select
BSD Control
.
The
BSD Control
panel enables you to change the polarity of the segments, select BSD
modes, and set the BSD gain.
à
The
BSD Control
panel is displayed.
2. In the
BSD Control
panel, click
BSD in
to insert the detector.
à
The stage is lowered by 20 mm to give space for the detector to be inserted.
à
The detector is inserted.
3. In the SEM Controls panel, select the Detectors tab.
4. From the
Signal A
drop-down list, select
BSD1
or
BSD4 A
depending on your detector
type and configuration.
INFO:
A
refers to the video channel. B, C, and D are also available if you have the four-
channel version.
5. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
6. In the
BSD Control
panel, click a quadrant symbol to toggle its status between on (white),
inverted (black), and off (gray).
104
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006