mä~ëã~=`äÉ~åÉê=^ÇÇ=çå=Ñçê=jìäíápbj
OK=p~ÑÉíó=ëìãã~êó
2.1.1 Recommended cleaning processes
Different plasma cleaning processes can be selected. For detailed information regarding the con-
troller of the Plasma Cleaner refer to the XEI Manual.
The corresponding parameters for some selected process can be found in the table below.
IMPORTANT
If Plasma Cleaner Add On is used continuously over several hours the grease of the stage
can get affected by loosing its lubricious properties.
Cleaning type /
Conditions
Turbo
Plasma pressure / power
(„T-pump“ is ~0.02 mbar)
Ignition
pressure
[mbar]
Time
[min]
Specimen cleaning in
object chamber
(MultiSEM)
yes
T-pump/20W
0.270
2
Specimen cleaning in
loadlock
no
(deactivated)
0.270mbar/15W
0.270
2
Loadlock chamber
cleaning (MultiSEM)
no
(deactivated)
0.270mbar/20W
0.270
10
Object chamber clean-
ing (MultiSEM)
yes
T-pump
0.270
30
Table 1.1: Plasma cleaning processes
