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2. Safety summary
2.1. Intended use
The Plasma Cleaner Add On is used to generate reactive gas-phase radicals in a plasma. This
plasma is fully contained in the Plasma Cleaner unit. The radicals migrate into the specimen
chamber and chemically react with unwanted hydrocarbons.
This is useful for:
•
Fast specimen decontamination
Decontamination time can be adjusted to fit the customer needs. Typically, 2-5 minutes to
clean the sample, or 10-30 minutes runs for in-depth decontamination of stage and chamber.
•
Safe decontamination
It is completely safe for the equipment.
•
Improved image quality
Contamination compromises achievable image resolution.
•
Improved measurement accuracy
Sample features can be measured accurately.
