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ZEISS
7 Troubleshooting | 7.5 Detectors
Procedure
1. Check if one of the circuit breakers on the rear
side of the plinth is tripped.
2. If one of the circuit breakers is tripped, push it upwards.
7.5 Detectors
7.5.1 Lubricating the Rod
The rod from the aSTEM and BSD detector mechanics and from the charge compensator mechan-
ics need to be lubricated once a year with TEM oil 300.
Parts and Tools
Designation
Part no.
000000-0484-955
Isopropanol
–
Lint-free cloth
–
Lint-free gloves
–
CAUTION
Contact with
oil 300
TEM Oil 300 may be irritating to the skin and mucous membranes. The separate safety data
sheet contains additional information.
4
Avoid contact with skin.
4
Wear suitable gloves.
4
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
4
After contact with the skin, wash immediately with plenty of water and soap.
CAUTION
Isopropanol
Isopropanol is highly flammable and irritating to the eyes.
Vapors may cause drowsiness and dizziness.
4
Wear suitable gloves.
4
Keep away from sources of ignition.
4
Do not smoke.
4
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
4
Avoid contact with skin.
4
Do not breathe vapor.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
125