Zeiss EVO, Инструкция по эксплуатации, Страница: 144 / 180

7 Troubleshooting | 7.2 Column ZEISS
4. Close the gun.
5. Reinstall the top cover.
à
The microscope is completely reassembled.
6. Energize the microscope, start the microscope and SmartSEM, refer to Switching On the Mi-
croscope System [
}
56] .
7.2.2.5 Startup of a LaB₆ Filament
7.2.2.5.1 Starting up the LaB₆ Filament for the First Time
Before you can use the filament for SEM imaging, you need to evacuate the microscope and start
up the filament.
Prerequisite ü You have energized and started the microscope.
Procedure 1. In the SEM Controls panel, select the Gun Vacuum tab.
2. Evacuate the microscope via Pump .
3. Wait until the messages Vac Status = Ready and EHT Vac ready = Yes are displayed.
INFO: It may take some time until the vacuum is established and the messages are dis-
played.
4. In the Gun tab of the SEM Controls panel, deactivate Long Fil. Life .
5. Switch on the electron beam.
6. Set the following values:
EHT = 10.00 kV
Spot Size = 500
Fil I Target = 1950 mA
144 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006