NNO=çÑ=NPQ
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
UK=qêçìÄäÉëÜççíáåÖ
lîÉêîáÉï
Gun
Gun is switched off automatically.
Gun vacuum worse than 2 x 10
-8
mbar
Gun has been switched off for
safety reasons since gun
vacuum is too bad.
Bakeout the gun head.
Refer to section 8.3.1.
Image quality
Image quality gets worse, but
there is no change in total emis-
sion current.
Field emission gun has been
damaged due to arcing.
Call the local Carl Zeiss service
engineer to have the field emis-
sion gun replaced.
Image quality
Image is noisy.
Noise reduction methods do not
remedy.
Field emission gun is used up.
Call the local Carl Zeiss service
engineer to have the field emis-
sion gun replaced.
Image quality
Image is bad at low EHT
(e.g.1 kV)
Working distance is too long.
Reduce working distance to a
maximum of 7 mm.
In-lens image
In-lens image is noisy.
Working distance is too long.
Reduce working distance.
In-lens image
No In-lens image
EHT exceeds 20 kV.
Reduce EHT to a maximum of
20 kV.
SE2 image
SE2 image is noisy
Scintillator is used up.
Call the local Carl Zeiss service
engineer to have the scintillator
replaced.
Specimen
current meter
Specimen current is low.
Field emission gun is used up.
Call the local Carl Zeiss service
engineer to have the field emis-
sion gun replaced.
After emer-
gency off or
power failure
Stored stage position cannot be
approached correctly.
Stage needs to be initialised.
Initialise the stage.
Refer to section 8.2.1.
Keyword
Symptom
Reason
Recommended action/s
Содержание Crossbeam 340
Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Страница 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Страница 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Страница 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Страница 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Страница 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Страница 133: ......