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6.6.1.4. Setting the coincidence point
Before you can start imaging or milling, you have to align the specimen to the coincidence point.
The coincidence point is the crossing point of electron beam and ion beam. Only if a specimen
feature is located in the coincidence point, it can be imaged simultaneously as well in
SEM
mode
as in
FIB
mode.
1
Check that SEM Beam Shift is set to
zero
.
2
Position the feature of interest under the SEM.
3
Make sure the eucentricity is setup.
4
Set a WD of
5
mm.
5
Go to SEM view.
6
In SEM view, centre the feature.
7
Open the
Panel Configuation
Bar
.
8
Double-click
FIB Daily Adjust
.
9
Tilt the stage to
54°
.
The
FIB Daily Adjust
panel opens.
10 Click
Coincidence
.
11 Follow the instructions in the wizard.
12 Click
Start
.
13 To centre the feature, only move the stage.
Do not use the centre point function, because it
is based on Beam Shift and can therefore have
a negative effect on the alignment.
14 Move Z.
15 Repeat the procedure until the
Finish
button is
shown.
Now, the workstation is ready to apply the CrossBeam
®
functions.
In general, the magnifications of SEM image and FIB image are not identical.
If you wish both magnifications to be the same, do the following:
a
Select
View/SEM Status
from the menu.
b
In the
Select
tab, select
FIB Lock Mags
.
c
Set
FIB Lock Mags=Yes
by clicking the entry.
Содержание AURIGA Compact Crossbeam
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