Zeiss AURIGA Compact Crossbeam, Инструкция по эксплуатации

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3.4.4.1. Imaging modes
The following imaging modes are available:
Fig. 3.5: Imaging modes
Imaging mode FIB Mode.. Characteristics Typical application
SEM imaging SEM Electron beam is active,
ion beam is blanked.
The SE signal is synchronised
to the SEM scan.
High resolution FESEM
FIB imaging FIB Electron beam is blanked,
ion beam is active. The SE sig-
nal is synchronised to the FIB
scan. Channelling contrast imaging,
voltage contrast imaging
Defining milling patterns on the
specimen surface
Grain analysis
CrossBeam
®
operation
SEM + FIB Image is composed of SEM
and FIB components. Setting the coincidence point
Mill No image
Mills with the milling parame-
ters set (milling current). Only deposition by ion beam
No deposition by electron beam
Ion milling or deposition
Mill + SEM Mills and generates a SEM
image. SEM real-time imaging of the
ion milling or deposition
SEM imaging
FIB imaging CrossBeam operation