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5. Operation
5.1 Easily changing the specimen by using airlock macros
The following procedure uses pre-defined airlock macros to simplify the specimen exchange.
It is assumed that a specimen is located in the specimen chamber. It is to be exchanged for an-
other specimen.
Locking out
the specimen
1
Select
Tools/Goto Panel
from the menu.
2
Double-click on
Airlock
.
The
Airlock
panel opens.
3
Click on
Specimen Change
.
Clicking on the
Specimen Change
button starts a
pre-defined macro that includes the following
steps:
- The EHT is switched off.
- The column chamber valve is closed in order to
separate gun head area and specimen chamber.
- The specimen stage is driven to the transfer
position.
- The airlock is evacuated.
- The gate valve opens.
- The illumination is turned on in the airlock cham-
ber.
IMPORTANT
The airlock macros can be modified according to your individual requirements.
Contact your local Carl Zeiss Microscopy service engineer for assistance.
