Yamato PDC610, Инструкция по эксплуатации

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18
7. RUNNING PROCEDURE
Operation in Auto Run
The operation and the setting items in the auto run are outlined below.
①
Turn on the breaker to power on the machine.
②
When the operation power is turned on, the
operation panel and the pump are turned on to
set the machine ready to run.
③
After the operation power was turned on, the
initial screen will be shown for several seconds.
During this period, the controller performs initial
setting. When the initial setting is over, the
processing screen will appear.
④
Set gas flow rates, RF power and RF
processing time. If they need not be changed
from the previous setting, they need not be set.
⑤
Set alarm conditions such as the RF power
permissible fluctuation range and gas flow rate
permissible fluctuation ranges. If they need not
be changed from the previous setting, they need
not be set.
⑥
Set the work in the chamber and close the door.
⑦
Press the START key.
⑧
The controller automatically performs the
following processes according to the set
parameters. Evacuating to set pressure
→
gas
supply start
→
diffusion
→
RF on
→
processing time over
→
evacuating to set
pressure
→
vacuum source valve close
→
N
2
purge
→
chamber to atmospheric pressure
⑨
When the processing is over, the end of process
is displayed.
⑩
Take out the work. (To start the next process, set
the work in the chamber and press the START
key.)
⑪
Turn off the operation power.
⑫
Turn off the circuit breaker.
：
indicates the actions by the operator.
①
Breaker
ON
②
Operation
power
ON
③
Initial screen
→
Menu screen
⑤
Process
parameter
setting
④
Alarm
condition
setting
Change any
setting?
⑥
Work set
⑦
START
key
⑧
Auto
processing
⑨
End of
processing
⑩
Work
takeout
Is the
processing
over?
⑪
Operation
power OFF
⑫
Breaker
OFF
Yes
No
Yes
No