Yamato PDC610, Инструкция по эксплуатации

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28
7. RUNNING PROCEDURE
Touch Panel Operation
（
12
）
Leak test
Use this screen to check leak of the vacuum system and verify the performance of the vacuum
pump during the periodic maintenance, etc.
①
Shows the time to reach the required
vacuum. If the chamber has been left
in highly humid atmosphere, 2 to 3
minutes may be required to reach 13
Pa. If 1 Pa cannot be reached,
“
0:00
”
will be shown, but it is no problem.
②
Shows the ultimate vacuum after 20
minutes. OK when below 10 Pa.
③
The valve of the evacuating line is
closed and the chamber is closed
completely 20 minutes after the start
of evacuating. Leak is detected by a
change in the degree of vacuum.
When a pressure rise is 60 Pa or
be-low after 20 minutes, there is no
problem in the cleaning performance.
④
Starts the leak test. A series of
exhausting to the vacuum leak is
carried out automatically. The required
time is 40 minutes.
⑤
Stops the test.
⑥
According to the current status,
standby, testing or end is shown.
⑦
Returns to the SELECT screen.
④ ⑤ ⑥ ⑦
①
②
③