21
③
After the corrective actions, press the RESET key. The vacuum pump will run and the process
screen will appear.
④
Follow the normal procedure.
6
)
Emergency stop
Use the emergency stop switch to stop the machine immediately when an emergency situation
occurs. When the “emergency stop switch” installed on the operation panel is pressed, the power
to the touch panel, RF and vacuum pump is turned off. To return the machine to the running status,
use the following procedure:
①
Remove the cause of the emergency stop.
②
Turn the emergency stop switch about 1/4 turn in the arrow direction (clockwise) to reset it.
③
The controller will display the initial screen for several seconds and the machine will enter the
standby status. The following procedure is the same as the normal running procedure.
Содержание PDC610
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