11384850.09 EN/DE 02/2019
WIKA Operating instructions / Betriebsanleitung WUC-1x
15
Specifications
Models WUC-10, WUC-15 and WUC-16
WUC-10 / WUC-15
WUC-16
Pressure ranges
psi
30
60
100
160
250
350
500
1000 1500 2000 3000 5000
bar
2
4
7
11
17
25
36
70
100
145
225
360
Over pressure safety
1)
psi
120
120
210
320
500
750
1100 2100 3000 4200 6600 10000
Burst pressure
1)
psi
1800 1800 2200 2600 4800 6200 7400 8000 10500 10500 10500 10500
Other pressure ranges and pressure units (e.g. MPa, kg/cm
2
) on request
Measuring principle
Metal thin-film sensor
Materials
Wetted parts
■
Pressure connection
316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR)
■
Pressure sensor
2.4711 / UNS R30003
Case
304 SS
Inboard helium leak test
< 1 x 10
-9
mbar l/sec (atm STD cc/sec) according to Semi F1
Surface finish
Electropolished, average Ra ≤ 0.13 µm (RA 5); max. Ra ≤ 0.18 µm (RA 7) per Semi F19
Dead volume
cm
3
WUC-10 < 1.5, WUC-15 < 1, WUC-16 < 1
Permissible Medium
Specialty gases, vapors, liquids
Power supply U+
U+ in VDC
10 ... 30 with output signal 4 ... 20 mA / 0 ... 5 V
14 ... 30 with output signal 0 ... 10 V
Signal output and maximum
ohmic load R
A
R
A
in Ohm
4 … 20 mA, 2-wire
R
A
≤ (U+ – 10 V) / 0.02 A
0 ... 5 V, 3-wire
R
A
> 5 k
0 ... 10 V, 3-wire
R
A
> 10 k
1) 1 psi = 0.069 bar
7. Starting, operation
EN
