RELIALINE™ 170 HEATING SYSTEM
Modular Line Heating
System—Tailored to
Quickly Fit Custom
Applications while
Providing Uniform
Temperature
RELIALINE™ 170 heating system from Watlow
®
is the first
modular line heater that can be quickly delivered and easily
installed in high performance applications. The RELIALINE™
170 provides precisely controlled heat distribution and is
automatically self regulating to deliver excellent temperature
uniformity. It offers a custom thermal solution within a stock
product delivery timeframe.
Watlow’s newest heating system technology is constructed
and designed for adaptability, which is perfect for quick
prototyping. This patent-pending technology allows
Watlow to configure a product to specific dimensions
and three-dimensional installation drawings are provided
with quotes.
The heating system improves temperature uniformity by
precisely heating individual elbow, tee and VCR
®
fittings.
The temperature compensation feature allows the system to
increase wattage in cooler regions and decrease the power
in warmer zones thus improving the temperature uniformity
of the entire line. This reduces the need for complicated
control systems resulting in decreased cost of the entire
system.
The RELIALINE™ 170 is pre-formed to fit the outside
diameter of standard tubing for intimate contact with
maximum surface coverage. The internal rails of this heating
system are spring loaded to allow for a “click-on” fit and
maximum contact force for improved thermal transfer.
The new insulation system incorporates Watlow’s “double
pane” design, which uses air as an insulator ensuring
touch-safe outside surface temperatures (meets SEMI S2).
In addition the air insulation reduces potential outgassing
or contamination. Any individual RELIALINE™ 170 heater
segment within the system can be removed at any point
along the line to speed servicing thus decreasing downtime.
Applications
Gas Delivery Lines: heating process gasses for
deposition and etch equipment including:
•
Boron trichloride, BCl
3
•
Chlorine trifluoride, ClF
3
•
Dichlorosilane, (DCS), SiH
2
Cl
2
•
Tetra ethyl orthosilicate, TEOS
•
Tungsten hexafluoride, WF
3
•
Process gas line qualification
Heating columns
High pressure liquid chromatograph (HPLC)
Process systems
Features and Benefits
Patent-pending modular design
•
Reduces lead times by replacing iterative custom
solutions
•
Provides quick prototyping and delivery
•
Allows for easy field installation
•
Incorporates heated elbow, tee and VCR
®
fittings
Temperature compensating construction
•
Adjusts for variations in heat loading
•
Improves temperature uniformity throughout the assembly
by heating components and fitting segments
•
Eliminates the need for complicated control systems
•
Reduces cost of the entire line heating system
Compatible with wide variety of simple control systems
•
Simplifies and improves system performance
•
Allows use of open loop for low performance applications
•
Improves temperature reliability utilizing PID control
systems with temperature uniformity as good as ±5°C (9°F)
“Double pane” (air gap) insulation design
•
Meets SEMI S2 safety requirements for outside
temperature
•
Improves process yield by removing a contamination
(outgassing) source
Tough/durable construction
•
Reduces risk of damage in demanding applications
“Click-on” installation design
•
Provides feedback when product is properly installed
•
Assures intimate contact with maximum surface coverage
Agency recognition and certifications
•
SEMI S2 requirements met
•
UL
®
component recognition and CE pending
•
RoHS compliant
COL-REL-0708
Watlow
®
is a registered trademark of Watlow Electric Manufacturing Company.
RELIALINE
®
is a trademark of Watlow Electric Manufacturing Company.
UL
®
is a registered trademark of Underwriter’s Laboratories, Inc.
VCR
®
is a registered trademark of The Cajon Company.
®
© 2008 Watlow Electric Manufacturing Company all rights reserved.
colrel-0708.qxd:COL-FFLX-0703 7/9/08 8:18 AM Page 1
