Veeco Dimension 3100, Руководство пользователя

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Stage System
Stage Menu Commands
Rev. D Dimension 3100 Manual 77
5. To exit the Move To ( x,y ) dialog box, click the Quit button.
5.2.5 Set Reference
The Set Reference panel is used to set the origin point on the sample surface to be used for all
subsequent Move To and Programmed Move operations. It is important to verify the reference
point (0,0) with programmed move sequences, since all moves are relative to the current origin. For
example, a program designed to move the stage to the four corners of a square sample when the
origin (0, 0) is set to the upper-left corner will
not probe the same positions if the origin is changed
to the lower-right corner. It will avoid confusion to select a standard position as the usual origin
reference (e.g., lower-left corner), then reuse the same reference position with all samples.
On samples having a grid-like aspect (e.g., integrated circuits), the reference may be initially
defined from a line (two points) rather than a single point. The reference line is defined parallel to
some feature on the sample surface (e.g., an electronic trace on an integrated circuit). You may
complete this by defining two points: an origin and a second point. Defining the second point
compensates for sample rotation. To set a reference on the sample, complete the following:
1. Select the Focus Surface function under the Stage menu to focus on the sample and move
the sample to the desired origin.
2. Select the Set Reference option under the Stage menu. The screen offers five options to the
operator (see Figure 5.2g ).
CAUTION: Always verify that the tip is off the surface before attempting stage
movements. If manual stage movements are attempted during
engagement (by turning the leadscrew knobs on the stage’s X-Y
slide assemblies) the tip and/or sample may be damaged.
ATTENTION: Il est impératif de toujours s’assurer que la pointe ne touche pas la
surface avant de bouger la platine porte-échantillon. Si la platine
porte échantillons est déplacée manuellement (en tournant les vis
des moteurs de la platine) la pointe et/ou l’échantillon pourraient
être endommagés.
ATTENTION: Überprüfen Sie immer zunächst, daß die Meßspitze nicht mehr auf
der Oberfläche ist, ehe Sie den XY-Verschiebetisch bewegen. Wenn
der XY-Verschiebetisch von Hand bewegt wird (indem die
Drehknöpfe an den Gewindestangen des XY-Verschiebetisches
gedreht werden), während sich das Mikroskop im Engage-Zustand
befindet, können Meßspitze und/oder Probe beschädigt werden.