Facilities Requirements
Acoustic/Vibration Isolation Systems
46
Dimension 3100 Manual
Rev. D
Figure 3.3h
VT-103-3K - Top View with Acoustic Hood Closed
3.3.3 VT-102 Dimensions and Utilities
The vibration isolation table may be supplied in lieu of the VT-103-3K or IS3K-2 for selected
applications that do not require acoustic isolation for the desired performance level.The table must
be moved to its final location before Veeco personnel can install and train on the SPM.
Figure 3.3i
VT-102 Vibration Isolation Table
35.5"
902 mm
33.0"
838 mm
36"
914 mm
Air
4008
24.0"
610 mm
24.0"
610 mm
23.0"
584 mm
4.5" sq.
114 mm sq.
31.0"
787 mm
AIR
4014
Top View
Side and Front View
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