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Series 642

DISMOUNTING AND STORAGE

603685EA

Edition 2013-08-22

63/73

Dismounting and Storage

WARNING

Unqualified personnel

Inappropriate handling may cause serious injury or property damage.

Only qualified personnel are allowed to carry out the described work.

9.1

Dismounting

NOTICE

Contamination

Gate and other parts of the valve must be protected from contamination.

Always wear clean room gloves when handling the valve.

NOTICE

Valve in open position

Valve body may become damaged if valve gate is in open position.

Move valve gate to the closed position before dismounting the valve.

Close the valve

For dismounting the valve please follow the instructions of chapter: «Installation», however in
reverse order.

Содержание 64246-UEHC-0001

Страница 1: ...structions 603685EA Edition 2013 08 22 Control gate valve with Logic interface Series 642 DN 200 mm I D 8 This manual is valid for the following product ordering numbers 64246 UEHC 0001 Configured wit...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...on 15 4 2 2 Connection overview 16 4 2 3 Installation procedure 17 4 3 Tightening torque 18 4 3 1 Mounting of CF F flanges 18 4 4 Admissible forces 18 4 4 1 Requirements to sensor connection 19 4 5 El...

Страница 4: ...erature 48 6 Trouble shooting 49 7 Maintenance 51 7 1 Maintenance intervals 51 7 2 Maintenance procedures 52 7 2 1 Replacement of gate seals and valve cleaning 52 7 2 2 Replacement of Option board 57...

Страница 5: ...stream pressure control applications Use product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation D...

Страница 6: ...INTERFACE Analog outputs 3 optional 0 10 VDC 1 mA max connector INTERFACE PFO 4 battery pack optional Charging time Durability 2 minutes max up to 10 years 25 C ambient refer to Durability of power fa...

Страница 7: ...at to face chamber is recommended Process side materials body Stainless steel 316L 1 4404 or 1 4435 plate Stainless steel 316L 1 4404 or 1 4435 other parts Aluminum A356 3 2371 Stainless steel 301 1 4...

Страница 8: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Страница 9: ...ons WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part N...

Страница 10: ...10 Bonnet seal 5 Detents 11 Rotary feed through seals 6 Crank bolt 3 2 Function The valve gate 1 acts as a throttling element and varies the conductance of the valve opening Actuation is performed wit...

Страница 11: ...differences M 3 4 5 7 8 2 1 9 Q p V Seff 6 Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit...

Страница 12: ...is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proces...

Страница 13: ...sical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it do...

Страница 14: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Страница 15: ...LLATION 603685EA Edition 2013 08 22 15 73 4 2 1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below sample...

Страница 16: ...on overview System M 3 4 5 6 7 2 1 9 8 10 11 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Cable to Logic remote control unit 7 Cable to power supply 8 Controller 9 Conn...

Страница 17: ...ements to sensor connection 5 Connect pressure sensor cable 5 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connection for correct wiring Input for second sensor is availa...

Страница 18: ...ve body Forces from evacuating the system from the weight of other components and from baking can lead to deformation and malfunctioning of the valve Do not higher force the valve body as specified Th...

Страница 19: ...present Make also sure that there is no obstruction in front of sensor connection port inside the chamber The sensor should also be mounted free of mechanical shock and vibration Dynamic stray magnet...

Страница 20: ...omized Connection plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground s...

Страница 21: ...ernal 15 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connection 15 VDC sensors without optional SPS module for schemat...

Страница 22: ...ation a 5AF b min 3A Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 24V 0V at D...

Страница 23: ...able s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sensor connector exactly as shown...

Страница 24: ...mmendation a 5AF b min 3A Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at...

Страница 25: ...stomer service informations and downloads control performance analyzer Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation The service port is not gal...

Страница 26: ...ows for remote operation by means of digital and analog signals Digital inputs may be operated either by switches or by voltage sources a Configuration with switches for digital inputs Do not connect...

Страница 27: ...603685EA Edition 2013 08 22 27 73 b Configuration with voltage source for digital inputs Do not connect other pins than indicated in the schematics above Use only screws with 4 40UNC thread for fasten...

Страница 28: ...16 HOLD Digital input 1 This function stops the valve at the current position After release of the signal the valve will return to the selected CONTROL MODE Only PRESSURE or POSITION Mode This functi...

Страница 29: ...pletion this will not re initiate the function and does also not block functions with lower priorities 4 2 Without a LEARN data set the PID controller is not able to perform pressure control 18 LOCK D...

Страница 30: ...ted A service request is indicated when the valve requires cleaning due to contamination Configuration of the functionality of this output can be done in local operation via service port By default th...

Страница 31: ...ll scale high range POSITION CONTROL A voltage of 0 10V shall be applied to this input as position setpoint The position setpoint is in linear relation to the applied voltage 0V is closed but not isol...

Страница 32: ...ails 5 ZERO Compensation of the sensor offset voltage Refer to chapter ZERO for details 6 LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEA...

Страница 33: ...or enabled Default is enabled Refer also to chapter ZERO Sensor configuration with 1 sensor version 642 C Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation 1...

Страница 34: ...table is stored in the device memory which is power fail save The data table can be up downloaded via Control Performance Analyzer software or remote interface Due to encoding the data may not be int...

Страница 35: ...ssure of working point mbar qWP CWP 78 7 pWP CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance va...

Страница 36: ...s Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump Sys...

Страница 37: ...th gain factor 1 0 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with lower higher gain factors until optimal pressure response is achieved and stability is ok Normally...

Страница 38: ...ached to the chamber according to Requirements to sensor connection This is the most effective measure against stability issues If your gauge attachment fulfills these criteria do not use this paramet...

Страница 39: ...pressure start PEND pressure end Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a...

Страница 40: ...applications it may be of advantage to have a slower valve response OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ram...

Страница 41: ...ING Valve opening Risk of serious injury Human body parts must be kept out of the valve opening and away from moving parts Do not connect the controller to power before the valve is installed complete...

Страница 42: ...start software and push button LOCAL to enable for operation Then enter menu Sensor Setup and do sensor configuration according to your application to make sure that you get the correct pressure displ...

Страница 43: ...Control Performance Analyzer software or Service Box 2 may be used for monitoring during remote control Control Performance Analyzer software Service Box 2 In case Control Performance Analyzer softwa...

Страница 44: ...ONTROL MODE to POSITION CONTROL 2 Set position SETPOINT In case CLOSE VALVE OPEN VALVE or HOLD is also set these have higher priority 5 5 Pressure control To prepare valve for PRESSURE CONTROL perform...

Страница 45: ...mation for about 2s Controller configuration 2nd information for about 2s SYNC indicates that power up synchronization is running In case D C or D999 is displayed motor interlock is active Refer to Sa...

Страница 46: ...tor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize Display shows D C or D999 In this case synchronization cycle will be done when motor in...

Страница 47: ...lve runs to max throttle position to detect limit stop for synchronization Display shows configuration of product resp SYNC until synchronization is done Valve position after power up is closed Valve...

Страница 48: ...ve Heated valve may result in minor or moderate injury Do not touch valve and heating device during operation Once heating is switched off valve and system await until the valve is cooled down complet...

Страница 49: ...e procedure Valve plate mechanically obstructed Resolve obstruction Reset control unit Cycle power OFF ON or Send reset command local via service port with CV CPA Service Box2 Display shows E 40 fatal...

Страница 50: ...g Wait until sensor does not shift any more before performing ZERO System pumped to base pressure OPEN VALVE and bring chamber to base pressure before performing ZERO Sensor offset voltage exceeds 1 4...

Страница 51: ...e and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glov...

Страница 52: ...te and bonnet seal Every 100 000 cycles For spare parts of gate and bonnet seal refer to chapter Spare parts 7 2 1 Replacement of gate seals and valve cleaning 7 2 1 1 Required tools Allen Wrench 4 mm...

Страница 53: ...and remove the bonnet screws 2 Open end wrench 13 mm 7 Remove valve bonnet and vulcanized bonnet seal 8 Deposit both parts on a clean place 9 Pull out the gate until the crank bolt can be reached 10...

Страница 54: ...e that gate is not scratching at lever while pulling out 13 Place the gate on a clean place 14 Remove the gate o ring O ring removal tool 15 Clean the o ring groove and the gate assembly Clean room wi...

Страница 55: ...ing tool 18 Clean the sealing surface of valve Clean room wiper a little soaked with isopropyl alcohol 19 Push in the gate assembly until see step 20 Caution Take care that gate is not scratching at l...

Страница 56: ...ol 24 Clean the bonnet seal 25 Lubricate the seal side with 0 1 ml vacuum grease If necessary use a new bonnet seal for new bonnet seal refer to chapter Spare parts If new bonnet seal is used no clean...

Страница 57: ...s under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the va...

Страница 58: ...lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap...

Страница 59: ...ating unit with panel removed All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above 7 2 3 1 Needed tools Open e...

Страница 60: ...ons at controller Attention to ESD protection Pozidriv screw driver size1 Open end wrench 7 mm 2 Remove the panel screws Pozidriv screw driver size1 3 Remove this screws and the cover Screw driver siz...

Страница 61: ...ure 7 Reassemble all parts in reverse order see steps 6 3 8 Tighten panel screws with 1 1 Nm see step 3 9 Connect all electrical connections Pozidriv screw driver size1 Open end wrench 7 mm If you nee...

Страница 62: ...pairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service ce...

Страница 63: ...work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position Va...

Страница 64: ...humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use t...

Страница 65: ...ng products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vatv...

Страница 66: ...A 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclaim...

Страница 67: ...SAL 603685EA Edition 2013 08 22 67 73 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the...

Страница 68: ...r for spare parts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer...

Страница 69: ...Series 642 SPARE PARTS 603685EA Edition 2013 08 22 69 73 12 1 Drawing...

Страница 70: ...rank bolt mounting screw with spring washer N 6005 458 N 6162 405 8 Feedthrough connection pin N 6097 480 9 Actuator 478357 11 Actuator seal N 5100 225 19 Locking balls N 6121 051 24 pcs 22 Ball beari...

Страница 71: ...e for Windows free download from http www vatvalve com customer service informations and downloads control performance analyzer Service cable PC to valve Service connector 230327 free wiring informati...

Страница 72: ...APPENDIX Series 642 72 73 Edition 2013 08 22 603685EA 13 Appendix No information entered on time...

Страница 73: ...Series 642 603685EA Edition 2013 08 22 73 73 This page left blank intentionally...

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