Series 590
DESCRIPTION OF PRODUCT
298292EB
Edition 2013-05-13
7/56
1.6.2
Valve unit
Description
Leak rate to outside
≤
1 × 10E-10 mbar l/s
-1
Leak rate valve seat at (close position)
≤
1 × 10E-10 mbar l/s
-1
Cycles until first service
20’000
Bake-out temperature
-
Open / closed
-
actuator
≤ 300°C
≤ 50°C
Heating and cooling rate
≤ 60°Ch-1
Mounting position
Any
Process side materials
body
1.4943, AISI 660 / 1.4404, AISI 316 L
diaphragm
1.4310, AISI 301, gold plated
Test pressure
1 bar
Pressure range at 20 C
UHV to 10 bar (abs)
Differential pressure
≤ 10 bar
Max. differential pressure on plate during opening
≤ 10 bar
Adjustable gas flow [air, 1 bar, RT]
1 × 10
-10
mbar ls
-1
– 100 mbar ls
-1
Dead volume
-
seat port
-
side port
2.7 cm
3
1.1 cm
3
Dimensions
Refer to dimensional drawing of specific valve ordering
number
(available on request)
Table 1-2
