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Varian Turbo-V250SF, Инструкция по эксплуатации, Страница: 1 / 44

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Turbo-V250SF 

pumps 

 
 
 

969-9009 series 
969-9010 series 

 

 

MANUALE DI ISTRUZIONI 
 
BEDIENUNGSHANDBUCH 
 
NOTICE DE MODE D’EMPLOI 
 
MANUAL DE INSTRUCCIONES 
 
MANUAL DE INSTRUÇÕES 
 
BEDRIJFSHANDLEIDING 
 
INSTRUKSTIONSBOG 
 
BRUKSANVISNING 
 
INSTRUKSJON MANUAL 
 
OHJEKÄSIKIRJA 
 

ODHGIES CRHSEWS

 

 
INSTRUCTION MANUAL 

 

 

87-900-881-01(B) 
APRIL 2002 

 

Содержание Turbo-V250SF

Страница 1: ...NUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87 900 881 01 B APRIL 2002 ...

Страница 2: ...Turbo V 250SF ...

Страница 3: ......

Страница 4: ......

Страница 5: ...INSTRUCTIONS FOR USE 23 TECHNICAL INFORMATION 25 DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 WATER COOLING KIT INSTALLATION 29 TYPICAL CONNECTIONS 34 High Vacuum Flange Connection 34 High Vacuum Flange Connection Configurations 34 Fore vacuum Pump Connection 35 Electrical Connection 35 PUMP USED WITH CORROSIVE GASES 35 PUMP USED IN PRESENCE OF MAGNETIC F...

Страница 6: ...a pompa nel modo SOFT START vedi manuale dell unità di controllo PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad...

Страница 7: ...ll aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando è in funzione I cuscinetti potrebbero danneggiarsi ATTENZIONE Per il pompaggio di gas aggressivi utilizzare solo le versioni speciali della pompa Turbo V2...

Страница 8: ...lage entstehen können ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen müssen folgende klimatische Verhältnisse vorliegen Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 Beträgt die Lagerzeit mehr als 9 Monate muß die Pumpe bei Inbetriebsetzung im SOFT START Modus gestartet werden si...

Страница 9: ...zmanschette Optional ausgeheizt wer den Damit die Flanschgrenztemperatur der Turbopumpe 120 C nicht überschreitet sollte immer bei ausheizbaren Vakuumsys temen die TP mit Wasserkühlung arbeiten GEFAHR Während des Ausheizens dürfen weder die Pumpe noch even tuelle heiße Anschlußteile berührt werden denn es besteht Verbrennungsgefahr ACHTUNG Für die Belüftung der Pumpe trockene staub und partikelfre...

Страница 10: ...des renseignements importants isolés du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il faudra veiller à respecter les conditions environnementales suivantes température de 20 C à 70 C humidité relative 0 95 non condensante Si le temps d emmagasinage est supérieur à 9 mois amorcer la pompe en mode SOFT START voir la notice de l unité de commande PREPARATION POUR L INSTALLAT...

Страница 11: ... C Utiliser toujours le refroidissement par eau pendant les opérations de chauffage Utiliser toujours le refroidissement par eau pendant les opérations de chauffage DANGER Eviter de toucher la turbopompe ainsi que ses accessoires éventuels pendant les opérations de chauffage La température élevée peut causer des lésions aux personnes ATTENTION Pour le refoulement de l air de la pompe utiliser de l...

Страница 12: ...se podrían provocar daños al equipo NOTA Las notas contienen información importante extraída del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deberá cumplir con las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no condensadora Si el periodo de almacenamiento es superior a 9 meses poner en marcha la bomba en modalidad SOFT STA...

Страница 13: ...a brida de entrada no deberá superar 120 C Utilizar siempre la refrigeración por agua durante las operaciones de calentamiento PELIGRO No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCION Para el envío de aire de la bomba utilizar aire o gas inerte sin polvo o partículas La presión de entrada a...

Страница 14: ...antes destacadas do texto ARMAZENAGEM Durante o transporte e a armazenagem das bombas não devem ser superadas as seguintes condições ambientais temperatura de 20ºC a 70ºC humidade relativa 0 95 não condensante Se o tempo de armazenagem for superior a 9 meses accionar accionar a bomba em SOFT START ver manual da unidade de controlo PREPARAÇÃO PARA A INSTALAÇÃO A bomba é fornecida numa embalagem pro...

Страница 15: ... flange de entrada não deve ser superior a 120 ºC Utilizar sempre o resfriamento com água durante as operações de aquecimento Utilizar sempre o resfriamento com água durante as operações de aquecimento PERIGO Não tocar a turbobomba e os seus eventuais acessórios durante as operações de aquecimento A elevada temperatura pode causar lesões às pessoas ATENÇÃO Para a saída de ar da bomba utilizar ar o...

Страница 16: ...ijke informatie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet condenserend Als de opslagperiode meer dan 9 maanden bedraagt de pomp met de SOFT START wijze opstarten zie handleiding regeleenheid UITPAKKEN De pomp wordt in een speciale beschermende ...

Страница 17: ...aatflens niet meer dan 120 C bedragen Pas tijdens het verwarmen altijd waterkoeling toe GEVAAR Raak de pomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmso...

Страница 18: ...siko for skade på udstyret BEMÆRK Bemærkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumpene skal følgende omgivelsesbetingelser være overholdt temperatur fra 20 C til 70 C relativ fugtighed 0 95 ikke kondenserende Hvis pumperne oplagres i mere end 9 måneder skal de sættes i gang på den såkaldte SOFT START måde se håndbogen til kontrolenheden FORBERE...

Страница 19: ... ikke ved turbopumpen eller eventuelt tilbehør under opvarmningsmanøvrerne Den høje temperatur kan forårsage kvæstelser på personer PAS PÅ Til pumpens luftafløb anvendes luft eller en inaktiv luftart der er fri for støv og partikler Indgangstrykket gennem den særlige åbning skal være under 2 bar PAS PÅ Undgå sammenstød vibrationer eller bratte bevægelser i forbindelse med brug af turbopumpen Der e...

Страница 20: ...maskinskada skall uppstå OBSERVERA Detta visar på viktig information i texten FÖRVARING Följande krav på omgivningsförhållanden gäller vid transport och förvaring av pumpen temperatur från 20 C till 70 C relativ luftfuktighet 0 95 utan kondens Efter förvarning under mer än nio månader skall pumpen startas med MJUKSTART metoden se bruksanvisningen för kontrolldelen FÖRBEREDELSER FÖR INSTALLATIONEN ...

Страница 21: ...om tillval Under uppvärmningen av pumploppet får temperaturen vid inloppet aldrig bli högre än 120 C Under uppvärmningen måste vattenkylningen användas VARNING Vidrör inte turbopumpen eller några tillbehör under uppvärmningen för att undvika brännskador VIKTIGT Använd luft eller ädelgas fri från damm och partiklar för luftning av pumpen Trycket vid inloppet får vara högst 2 bar VIKTIGT Undvik samm...

Страница 22: ...et skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING Når pumpene transporteres eller lagres må følgende miljømessige krav oppfylles temperatur fra 20 C til 70 C relativ fuktighet 0 95 uten kondens Skal utstyret lagres lengre enn ni måneder må pumpen MYKSTARTES se kontrollenhetens manual KLARGJØRE TIL INSTALLASJON Pumpen leveres i en spesiell beskyttelsesemballa...

Страница 23: ...Bruk alltid vannavkjøling under oppvarmingen ADVARSEL Ikke berør turbopumpen eller noe av tilleggsutstyret under oppvarmingen De høye temperaturene kan føre til brannskader FORSIKTIG Bruk støv og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket ved inngangen må ikke være mindre enn 2 bar FORSIKTIG Unngå støt svingninger eller plutselige bevegelser av turbinpumpen når den er i fun...

Страница 24: ... ilmi tekstissä käsitellyt tärkeät tiedot VARASTOINTI Pumppujen kuljetuksen ja varastoinnin aikana täytyy seuraavien ympäristöa koskevien ehtojen olla täytettyinä lämpötila 20 C 70 C suhteellinen kosteus 0 95 ei tiivistävä Jos varastointiaika on yli 9 kuukautta tulee pumppu käynnistää SOFT START tavalla katso kontrolliyksikön käyttökirja VALMISTELUT ASENNUSTA VARTEN Pumpun toimitus tapahtuu erityi...

Страница 25: ...änjohtavan laipan lämpötila saa olla yli 120 C Käyttäkää aina kuumentamisen aikana vettä jäähdytykseen VAARA Älkää koskeko turbopumppuun tai sen lisäosiin kuumentamisen aikana Korkea lämpötila voi saada aikaan henkilöiden loukkaantumisia HUOMIO Päästettäessä pumppuun ilmaa tulee käyttää ilmaa tai jalokaasua joissa ei ole pölyä tai hiukkasia Sisäänjohtavan paineen siihen sopivan aukon läpi täytyy o...

Страница 26: ...j pou coun apospaste apÒ to ke meno APOQHKEUSH APOQHKEUSH APOQHKEUSH APOQHKEUSH Kat th di rkeia thj metafor j kai thj apoqÿkeushj twn antlièn pr pei na throÚntai oi akÒlouqej periballontik j sunqÿkej qermokras a apo 20 C m cri 70 C scetikÿ ugras a 0 95 asumpÚknwth E n o crÒnoj apoqÿkeushj xepern ei touj 9 mÿnej h antla qa prpei na teqe se knhsh me trÒpo SOFT START bl to egceirdio thj mon daj elgco...

Страница 27: ...a kai ta di fora exartÿmat thj kat tij ergas ej q rmanshj H uyhlÿ qermokras a mpore na prokal sei proswpik j bl bej PROSOCH PROSOCH PROSOCH PROSOCH Gia na dioceteÚsete me a ra thn antl a crhsimopoie ste a ra ÿ adran j a rio kaqarÒ apÒ skÒnh ÿ lla stoice a H p esh eisÒdou diam sou thj eidikÿj pÒrtaj pr pei na e nai mikrÒterh apÒ 2 bar PROSOCH PROSOCH PROSOCH PROSOCH Apofuvgete sugkrouvseiÇ olisqhvs...

Страница 28: ...he storage time is longer than 9 months start the pump using the SOFT START mode see control unit manual PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do...

Страница 29: ...rt gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged CAUTION For pumping aggressive gases use the specially designed versions of the Turbo V250SF pump These pumps are fitted with a special port through which a flow of inert gas...

Страница 30: ...r are fabricated in stainless steel These are supported and accu rately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding ro tor discs These are made of aluminium alloy During normal operation the motor functions with a power feed at 58 Vac three phase at 933 Hz To reduce losses d...

Страница 31: ...30 Operating position any Cooling requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 30 l h 0 13 GPM temperature 10 C to 30 C pressure 3 to 4 bar electrical conductivity 500 µS cm Bakeout temperature 120 C at inlet flange maximum CF flange 80 C at inlet flange maximum ISO flange Vibration level displacement 0 01 µm at inlet...

Страница 32: ... 87 900 881 01 B Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump ...

Страница 33: ... reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on either pump series and is supplied with a small tab for easy removal see figure Overall dimensions with the protection screen fitted on pump series 969 9009 with ISO 100 flange Overall dimensions with the inlet screen fitted on pump series 969 9010 wit...

Страница 34: ...llic model is assembled as shown in the figure Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or disconnected during operation The plastic model must be screwed into the suit able holes of the pump Cooling may be carried out e...

Страница 35: ... not protrude from the other end Use the Allen key supplied for this purpose Turn the pump upside down CAUTION Before overturning the pump remove the protec tion screen if fitted Insert the three feed as shown in the figure bear ing in mind that the position must be as indicated in the figure For the feet to the pump by tightening the previ ously inserted grub screws with the Allen key Turn the pu...

Страница 36: ...ow 25 l s 51 CFM input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 119x119 mm 4 69x4 69 inches Open the package containing the feet and respec tive screws and install them as indicated in the in stallation of the base fixing kit Position the fan on the pump ensuring that the holes in the plate line up with those in the feet Insert the respective washers and screws and tighten with a scr...

Страница 37: ...venting of the pump during a temporary power fail ure 5 sec maximum to be avoided and enables an automatic vent operation Unscrew the threaded plug Screw the vent valve into the pump Tighten the valve using a 16 mm hexagonal span ner CAUTION Do not overtighten the valve as this may damage the thread on the pump ...

Страница 38: ...pump tak ing care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp VIBRATION ISOLATOR INSTALLATION Two vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The two model part numbers are the following model 969 9342 for ISO 100 flange model 969 9332 for CFF 6 flange They typically reduce the vibration...

Страница 39: ...at flange connections we recommend using Varian hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating...

Страница 40: ...or in order to read a gas flow rate of 0 1 to 0 8 mbar l s A special kit is available to purge this pump Please contact Varian for informations CAUTION To prevent bearing damage Varian suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar l s This value can be exceeded according to the process requirements Please contact Var ian for specific applications The purge gas throughput with the rec...

Страница 41: ...e expected However if the effect is grater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and ap plied to the rotor ACCESSORIES DESCRIPTION PART NUMBER Inlet screen DN100 969 9302 Base fixing kit 969 9326 Water cooling kit 969 9337 Plastic water cooling kit 969 9347 Air cooling kit small...

Страница 42: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 43: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 44: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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