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Turbo-V 1800A

Model 969-9064
Model 969-9065
Model 969-9066

MANUALE DI ISTRUZIONI

BEDIENUNGSHANDBUCH

NOTICE DE MODE D’EMPLOI

MANUAL DE INSTRUCCIONES

MANUAL DE INSTRUÇÕES

BEDRIJFSHANDLEIDING

INSTRUKSTIONSBOG

BRUKSANVISNING

INSTRUKSJON MANUAL

OHJEKÄSIKIRJA

ODHGIES CRHSEWS

INSTRUCTION MANUAL

87-900-867-01(A)
APRIL 2002

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Содержание Turbo-V 1800A

Страница 1: ... DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87 900 867 01 A APRIL 2002 View our inventory ...

Страница 2: ...Turbo V 1800A ...

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Страница 5: ...NFORMATION 25 DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 28 GAS PURGE VALVE INSTALLATION 29 VENT VALVE INSTALLATION 29 VENT DEVICE INSTALLATION 29 TYPICAL LAYOUT DIAGRAM 30 Connection A HIGH VACUUM FLANGE 30 Connection B FORE VACUUM PUMP 31 Connection C ELECTRICAL 31 WATER COOLING CONNECTION 31 PUMP USED WITH CORROSIVE GASES 31 ...

Страница 6: ...rmazioni importanti estrapolate dal testo IMMAGAZZINAMENTO Durante il trasporto e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidità relativa 0 95 non condensante Se il tempo di immagazzinamento è molto lungo avviare la pompa nel modo SOFT START vedere il manuale del controller PREPARAZIONE PER L INSTALLAZIONE La pompa vie...

Страница 7: ... l appendice Technical information per dettagli circa il collegamento del raffreddamento ad acqua alla pompa PERICOLO Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura può causare lesioni alle persone ATTENZIONE Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso a...

Страница 8: ...Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen müssen folgende klimatische Verhältnisse vorliegen Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 Nach extrem langer Lagerung muß die Pumpe bei Inbetriebsetzung im SOFT START Modus gestartet werden siehe Handbuch der Steuereinheit VOR DER INSTA...

Страница 9: ...chreitet sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserkühlung arbeiten genauere Angaben zum Anschluß des Kühlwasserkreises an die Pumpe siehe Anhang Technical Information GEFAHR Während des Ausheizens dürfen weder die Pumpe noch eventuelle heiße Anschlußteile berührt werden denn es besteht Verbrennungsgefahr ACHTUNG Für die Belüftung der Pumpe trockene staub und partikelfreie Luft...

Страница 10: ...contiennent des renseignements importants isolés du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il faudra veiller à respecter les conditions environnementales suivantes température de 20 C à 70 C humidité relative 0 95 non condensante Si le temps d emmagasinage est très long mettre la pompe en marche en mode SOFT START voir la notice du contrôleur PREPARATION POUR L INSTAL...

Страница 11: ...r le branchement du refroidissement à l eau de la pompe consulter l appendice Technical Information DANGER Eviter de toucher la turbopompe ainsi que ses accessoires éventuels pendant les opérations de chauffage La température élevée peut causer des lésions aux personnes ATTENTION Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussière ou de particules La pre...

Страница 12: ...tante extraída del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deberá cumplir con las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no condensadora Si el periodo de almacenamiento es muy largo poner en marcha la bomba en modalidad SOFT START véase el manual de la unidad de control PREPARACION PARA LA INSTALACION La bomba se ...

Страница 13: ... véase el anexo Technical Information para detalles sobre la conexión de la refrigeración por agua a la bomba PELIGRO No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCION Para el envío de aire de la bomba utilizar aire o gas inerte sin polvo o partículas La presión de entrada a través de la pue...

Страница 14: ...tes destacadas do texto ARMAZENAGEM Durante o transporte e a armazenagem das bombas não devem ser superadas as seguintes condições ambientais temperatura de 20ºC a 70ºC humidade relativa 0 95 não condensante Se o tempo de armazenagem for muito longo accionar a bomba em SOFT START ver manual da unidade de controlo PREPARAÇÃO PARA A INSTALAÇÃO A bomba é fornecida numa embalagem protectora especial s...

Страница 15: ...nte as operações de aquecimento ver o apêndice Technical Information para os detalhes relativos à ligação à bomba do resfriamento de água PERIGO Não tocar a turbobomba e os seus eventuais acessórios durante as operações de aquecimento A elevada temperatura pode causar lesões às pessoas ATENÇÃO Para a saída de ar da bomba utilizar ar ou gás inerte sem poeiras ou partículas A pressão de entrada atra...

Страница 16: ...ten belangrijke informatie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet condenserend Als de opslagperiode van lange duur is de pomp met de SOFT START wijze opstarten zie handleiding regeleenheid UITPAKKEN De pomp wordt in een speciale beschermende...

Страница 17: ...erkoeling toe zie bijlage Technical Information voor aanwijzingen over de aansluiting van de waterkoeling aan de pomp GEVAAR Raak de pomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet m...

Страница 18: ...siko for skade på udstyret BEMÆRK Bemærkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumpene skal følgende omgivelsesbetingelser være overholdt temperatur fra 20 C til 70 C relativ fugtighed 0 95 ikke kondenserende Hvis pumperne oplagres gennem lang tid skal de sættes i gang på den såkaldte SOFT START måde se håndbogen til kontrolenheden FORBEREDELSE...

Страница 19: ...t tilbehør under opvarmningsmanøvrerne Den høje temperatur kan forårsage kvæstelser på personer PAS PÅ Til pumpens luftafløb anvendes luft eller en inaktiv luftart der er fri for støv og partikler Indgangstrykket gennem den særlige åbning skal være under 2 bar PAS PÅ Undgå stød eller pludselig flytning af turbopumpen mens den er i drift Lejerne kan beskadiges PAS PÅ Til pumpning af ætsende luftart...

Страница 20: ... att inte risk för maskinskada skall uppstå OBSERVERA Detta visar på viktig information i texten FÖRVARING Följande krav på omgivningsförhållanden gäller vid transport och förvaring av pumpen temperatur från 20 C till 70 C relativ luftfuktighet 0 95 utan kondens Efter lång förvaring skall pumpen startas med MJUKSTART metoden se bruksanvisningen för styrenheten FÖRBEREDELSER FÖR INSTALLATIONEN Pump...

Страница 21: ... än 120 C Under uppvärmningen måste vattenkylningen användas se bilaga Technical Information för detaljer om pumpens anslutning till vattenkylning VARNING Vidrör inte turbopumpen eller några tillbehör under uppvärmningen för att undvika brännskador VIKTIGT Använd luft eller ädelgas fri från damm och partiklar för luftning av pumpen Trycket vid inloppet får vara högst 2 bar över atmosfäriskt tryck ...

Страница 22: ...es MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING Når pumpene transporteres eller lagres må følgende miljømessige krav oppfylles temperatur fra 20 C til 70 C relativ fuktighet 0 95 uten kondens Skal utstyret lagres lengre må pumpen MYKSTARTES se kontrollenhetens manual KLARGJØRE TIL INSTALLASJON Pumpen leveres i en spesiell beskyttelsesemballasje Viser denne tegn p...

Страница 23: ...pens kjølevannsledninger ADVARSEL Ikke berør turbopumpen eller noe av tilleggsutstyret under oppvarmingen De høye temperaturene kan føre til brannskader FORSIKTIG Bruk støv og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket ved inngangen må ikke være mindre enn 2 bar over atmosfærisk trykk FORSIKTIG Unngå støt eller brå bevegelser av pumpen når den er i bruk Dette kan føre til a...

Страница 24: ...tuksissa käyvät ilmi tekstissä käsitellyt tärkeät tiedot VARASTOINTI Pumppujen kuljetuksen ja varastoinnin aikana täytyy seuraavien ympäristöa koskevien ehtojen olla täytettyinä lämpötila 20 C 70 C suhteellinen kosteus 0 95 ei tiivistävä Jos varastointiaika on hyvin pitkä tulee pumppu käynnistää SOFT START tavalla katso valvojan käyttökirja VALMISTELUT ASENNUSTA VARTEN Pumpun toimitus tapahtuu eri...

Страница 25: ...chnical information osaa pumpun vesijäähdytyskytkentöjä varten VAARA Älkää koskeko turbopumppuun tai sen lisäosiin kuumentamisen aikana Korkea lämpötila voi saada aikaan henkilöiden loukkaantumisia HUOMIO Päästettäessä pumppuun ilmaa tulee käyttää ilmaa tai jalokaasua joissa ei ole pölyä tai hiukkasia Sisäänjohtavan paineen siihen sopivan aukon läpi täytyy olla alle 2 bar ia paitsi atmosfäärinen p...

Страница 26: ...spaste apÒ to ke meno APOQHKEUSH Kat th di rkeia thj metafor j kai thj apoqˇkeushj twn antlièn pr pei na throÚntai oi akÒlouqej periballontik j sunqˇkej qermokras a apo 20 C m cri 70 C scetikˇ ugras a 0 95 asumpÚknwth E n o crÒnoj apoqˇkeushj xepern ei touj 9 mˇnej h antl a qa pr pei na teqe se k nhsh me trÒpo SOFT START bl to egceir dio thj mon daj el gcou PROETOIMASIA GIA THN EGKATASTASH H antl ...

Страница 27: ...eiej scetik me th sÚndesh thj ugrˇj yÚxhj sthn antl a KINDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exartˇmat thj kat tij ergas ej q rmanshj H uyhlˇ qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na dioceteÚsete me a ra thn antl a crhsimopoie ste a ra ˇ adran j a rio kaqarÒ apÒ skÒnh ˇ lla stoice a H p esh eisÒdou diam sou thj eidikˇj pÒrtaj pr pei na e nai mikrÒterh apÒ 2 ...

Страница 28: ...RAGE When transporting and storing the pumps the following envi ronmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see control unit manual PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing If this shows signs of damage which may have occu...

Страница 29: ...ling connection WARNING Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns CAUTION Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure CAUTION Avoid impacts or harsh movements of the pump when in operation The bearings may become dama...

Страница 30: ...of the stator are made of stainless steel These are supported and accu rately positioned by spacer rings During normal operation the motor is fed with a voltage of 90 Vac three phase at 450 Hz To re duce losses during start up to a minimum the fre quency increases according to a ramp with a higher initial voltage frequency ratio Model 969 9064 Model 969 9065 Model 969 9066 A water jacket surrounds...

Страница 31: ...e 10 Operating ambi ent temperature 5 C to 35 C Coolant water flow 70 l h 0 3 GPM temperature 10 C to 30 C pressure 2 to 4 bar 30 to 60 Psi Bakeout temperature 120 C at inlet flange maximum Vibration level displacement 0 02 µm at inlet flange Noise level 52 dB A at 1 meter Input 90 Vac three phase 450 Hz Lubricant permanent lubrication Storage temperature 20 C to 70 C Weight kg lbs 62 137 Accordin...

Страница 32: ...ATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 27 87 900 867 01 A ...

Страница 33: ...n screen fitted on pump with ISO flange and pump with CFF flange HEATER BAND INSTALLATION The heater band model 969 9811 and 969 9812 can be used to heat the pump casing when a bakeout is needed The heater band is applied to the upper part of the pump casing as shown in the figure and heats it to a temperature of about 80 C The heater band must be mounted such that there is perfect thermal contact...

Страница 34: ...rge valve in position using the KF klamp as shown in the following figure VENT VALVE INSTALLATION The vent valve mod 969 9833 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic vent operation Screw the vent valve into the vent port of the pump and tighten it using a 10 mm hexagonal spanner with a torque of 2 5 Nm CAUTION Do not ov...

Страница 35: ...Fore vacuum pump with internal one way valve For ConFlat flange connections we recommend using Varian hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Re peat the sequential tightening until the flange faces meet 10 Fore vacuum ...

Страница 36: ... 30 KΩ resistance at 20 C and pins C and D are available for further connections PUMP USED WITH CORROSIVE GASES To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen ar gon to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump see ...

Страница 37: ...oints However if the effect is grater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and ap plied to the rotor 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive g...

Страница 38: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 39: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 40: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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