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vacuum technologies

TriScroll

TM

 600 

Series

Dry Scroll 

Vacuum Pump

Manual No. 699904310
Revision G
December 2004

TIP SEAL REPLACEMENT 
MANUAL

Содержание TriScroll 600 series

Страница 1: ...D R A F T 2 1 0 0 5 vacuum technologies TriScrollTM 600 Series Dry Scroll Vacuum Pump Manual No 699904310 Revision G December 2004 TIP SEAL REPLACEMENT MANUAL ...

Страница 2: ...ogies TriScroll 600 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies Loctite and PST are registered trademarks of Loctite Corporation Krytox Teflon and Viton are registered trademarks of E I du Pont de Nemours and Company ...

Страница 3: ...ions ix Contacting Vacuum Technologies ix Tip Seal Replacement 1 General Information 1 Required Equipment 1 TriScroll 600 Disassembly 4 Remove the Intake Fitting 4 Remove the Outboard Housing 5 Remove the Inboard Housing and Orbiting Plate Assembly 7 Disassemble the Inboard Housing and the Orbiting Plate Assembly 8 Scroll Cleaning 10 TriScroll 600 Reassembly 11 Put the Pump Back into Service 19 ...

Страница 4: ...TriScroll 600 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 2 1 0 0 5 ...

Страница 5: ...iere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione è conforme alla e sequente I norma o documento I normativo i Frederick C Campbell Operations Manager Vacuum Technologies We Wir Nous Nosotros Wij Noi Lexington MA 02421 3133 USA 121 Hartwell Avenu...

Страница 6: ... of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of work performed by unskilled or improperly trained maintenance personnel or careless operation of the equipment employed in the specified maintenance procedures can be serious Every maintenance person must read and thoroughly un...

Страница 7: ...ntenance procedure Approximate cool down time is one to two hours CAUTION Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum If applicable apply a small amount of Krytox GPL 224 grease and wip...

Страница 8: ...lacement All TriScroll 600 Series Models 699904305 Installation and Operation Manual All TriScroll 600 Series Models 699904290 Description Contents Applicable TriScroll Model Part Number Major Maintenance Tool Kit All bearings bearing seals bearing lubricant O rings and tip seals required to rebuild TriScroll 600 Series pumps All TriScroll 600 Series models PTSS0600MK Maintenance Tool Kit All fixt...

Страница 9: ...l to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc com vacuum Order on line at www evarian com Factory Service Options Part Number Advance Exchange TriScroll 600 Single Phase EXPPTS06001 Advance Exchange TriScroll 600 Three Phase EXPPTS06003 Advance Exchange TriScroll 610 Single Phase EXPPTS06101 Advance Exchange TriScroll 610 Three Ph...

Страница 10: ...TriScroll 600 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 2 1 0 0 5 ...

Страница 11: ...gs rotary seals and O rings if the pump bearings exhibit humming or grinding noises Main bearing life may be shortened if your application requires the pumping of high quantities of water vapor Use bearing purge to keep this water from impacting bearing life Required Equipment Tip Seal Replacement Kit PTSS0600TS Tip Seal Replacement Kit on page 2 Tip Seal Tool Kit PTSTSTKIT Tip Seal Tool Kit on pa...

Страница 12: ...2 TriScroll 600 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 Tip Seal Replacement Kit 2 273 2 127 Tip Seal Krytox GPL 224 Grease ...

Страница 13: ...3 TriScroll 600 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 Tip Seal Tool Kit Chisel Metric Hex Key Set ...

Страница 14: ... 0 0 5 TriScroll 600 Disassembly Remove the Intake Fitting 1 Remove the two M5x16 screws from the intake assembly 2 Remove the intake assembly from the top of the pump 3 Remove and discard the O ring from the groove on the underside of the intake fitting ...

Страница 15: ...ove the Outboard Housing 1 Remove the three M5x16 screws that attach the cowling to the module 2 Remove the cowling 3 Remove the six M6x55 screws that attach the outboard housing to inboard housing 4 Remove the outboard housing TriScroll 600 Disassembly Continued ...

Страница 16: ...6 TriScroll 600 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 5 Remove and discard the O ring 6 Remove and discard the tip seals from the outboard housing TriScroll 600 Disassembly Continued ...

Страница 17: ...ly 1 Remove the four M5x15 screws that attach the inboard housing to the frame 2 Remove the inboard housing from the frame Locate the rubber spider that mounts between the motor shaft coupling and the inboard housing assembly CAUTION The inboard housing assembly weighs 22 lbs TriScroll 600 Disassembly Continued ...

Страница 18: ...bly 1 Remove the M8x12 screw and washer that attaches the counterweight to the inboard housing 2 Lift the counterweight off of the inboard housing The counterweight is keyed to the crankshaft Locate the key after removal of the counterweight from the inboard housing TriScroll 600 Disassembly Continued Counterweight Key ...

Страница 19: ...l 600 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 3 Remove the inboard housing from the crankshaft and orbiting plate 4 Remove and discard the tip seals from the inboard housing TriScroll 600 Disassembly Continued ...

Страница 20: ...10 TriScroll 600 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 5 Remove and discard the tip seals from both sides of the orbiting plate TriScroll 600 Disassembly Continued ...

Страница 21: ...he sides of the scroll walls use a razor blade or Exacto knife to scrape this debris off 2 Use dry compressed air to remove the tip seal debris from the scroll parts 3 Wipe the scroll parts with isopropyl alcohol and a clean lint free cloth to remove any remaining tip seal debris TriScroll 600 Disassembly Continued CAUTION Do not scratch or gouge any surface CAUTION Do not blow compressed air or d...

Страница 22: ... orbiting plate 2 Cut the seal to the correct length at the end of each groove Leave a gap of 1 4 6 mm from the outer end to allow for thermal growth 3 Insert the new tip seal into the scroll tip grooves on the inboard housing 4 Cut the seal to the correct length at the end of each groove Leave a gap of 1 4 6 mm from the outer end to allow for thermal growth 1 2 3 4 5 6 7 ...

Страница 23: ... seals from falling out of the grooves during reassembly 6 Ensure that the scroll walls are properly aligned to allow full engagement of the two parts 7 Reinstall the counterweight onto the crankshaft 8 Align the keyways in the counterweight and crankshaft and install the key 9 Secure the counterweight to the crankshaft using the M8x12 screw and washer TriScroll 600 Reassembly Continued Screw and ...

Страница 24: ...A F T 2 1 0 0 5 10 Install the rubber spider into motor shaft coupling 11 Align the motor coupling to properly mate with the fan hub coupling 12 Install the inboard housing onto the frame TriScroll 600 Reassembly Continued Rubber spider installed ...

Страница 25: ...assembly to the frame using the four M5x15 screws 14 Insert the tip seal into the scroll tip grooves on the orbiting plate 15 Cut the seal to the correct length at the end of each groove Leave a gap of 1 8 3mm from the outer end to allow for thermal growth TriScroll 600 Reassembly Continued ...

Страница 26: ...Krytox GPL 224 grease into each of the three needle bearings 17 Smear grease over the needles 18 Coat the lips of all three seals with grease 19 Lightly grease the new 2 273 O ring large and install it around the lip on the inboard housing TriScroll 600 Reassembly Continued O ring ...

Страница 27: ... from the outer end to allow for thermal growth 22 Install the outboard housing over the orbiting plate and against the inboard housing engaging the dowel pins and all the sync cranks 23 Secure the outboard housing to the inboard housing with the six M6x55 screws TriScroll 600 Reassembly Continued NOTE Orient the sync cranks and the orbiting plate in the downward position before installing the out...

Страница 28: ...18 TriScroll 600 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 24 Install the cowling over the pump module 25 Secure with the three M5x16 screws TriScroll 600 Reassembly Continued ...

Страница 29: ... T 2 1 0 0 5 26 Lightly grease the new 2 127 O ring and insert it into the groove on the intake fitting 27 Place the intake fitting assembly into the outboard housing 28 Secure the fitting with the two M5x16 screws TriScroll 600 Reassembly Continued ...

Страница 30: ...plete However 24 hours of run time is required before base pressure of 7 mTorr can be achieved This figure illustrates a fully reassembled TriScroll 600 Series Pump NOTE The 24 hour run time does not have to be continuous If your application requires a low base pressure it is wise to run the pump for the 24 hour period for optimum performance TriScroll 600 Reassembly Continued ...

Страница 31: ... p A Via F lli Varian 54 10040 Leini TO ITALY Fax 39 011 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notification RA Customer ID Equipment CUSTOMER INFORMATION Company name Contact person Name Tel Fax E mail Ship method Shipping Collect P O Europe only VAT Reg Number USA only Taxable Non taxable...

Страница 32: ...Message Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure Describe failure Customer application Customer application Cannot calibrate No zero high background Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication ...

Страница 33: ......

Страница 34: ... gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordination through Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 252 Fax 39 011 997 9 316 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei...

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