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13

TriScroll 300 Dry Scroll Vacuum Pump 

DRAFT 2

/

10

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0

5

10. Install the rubber spider into the motor shaft 

coupling.

11. Align the motor coupling to properly mate 

with the fan hub coupling. 

12. Install the inboard housing onto the frame.

TriScroll 300 Reassembly (continued)

Rubber 
spider 
installed

Содержание TriScroll 300 Series

Страница 1: ...D R A F T 1 2 2 1 0 4 vacuum technologies TriScrollTM 300 Series Dry Scroll Vacuum Pump Manual No 699904280 Revision H December 2004 TIP SEAL REPLACEMENT MANUAL 505 872 0037 idealvac com idealvac com...

Страница 2: ...ogies TriScroll 300 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies Loctite and PST are registered trademarks of Loctite Corporation Krytox Teflon and Viton are registere...

Страница 3: ...cting Vacuum Technologies ix Tip Seal Replacement 1 General Information 1 Required Equipment 1 Tip Seal Replacement Kit 2 Tip Seal Tool Kit 3 TriScroll 300 Disassembly 4 Remove the Outboard Housing 4...

Страница 4: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 1 2 2 0 0 4...

Страница 5: ...refiere esta declaraci n es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiar...

Страница 6: ...of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of work performed by unskilled...

Страница 7: ...tenance procedure Approximate cool down time is one to two hours CAUTION Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the sea...

Страница 8: ...lacement All TriScroll 300 Series Models 699904285 Installation and Operation Manual All TriScroll 300 Series Models 699904265 Description Contents Applicable TriScroll Model Part Number Major Mainten...

Страница 9: ...l to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc com vacuum Order on line at www evarian com Factory Service Options Part Number Advanc...

Страница 10: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 1 2 2 0 0 4...

Страница 11: ...rotary seals and O rings if the pump bearings exhibit humming or grinding noises Main bearing life may be shortened if your application requires the pumping of high quantities of water vapor Use bear...

Страница 12: ...2 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 Tip Seal Replacement Kit 2 269 Tip Seal Krytox GPL 224 Grease...

Страница 13: ...3 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 Tip Seal Tool Kit Chisel Metric Hex Key Set...

Страница 14: ...TriScroll 300 Disassembly Remove the Outboard Housing 1 Remove the three M5x16 screws that attach the cowling to the module 2 Remove the cowling 3 Remove the six M6x45 screws that attach the outboard...

Страница 15: ...5 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 5 Remove and discard the O ring 6 Remove and discard the tip seals from the outboard housing TriScroll 300 Disassembly continued...

Страница 16: ...emove the four M5x15 screws that attach the inboard housing to the frame 2 Remove the inboard housing from the frame Use care to locate the rubber spider that mounts between the motor shaft coupling a...

Страница 17: ...ly 1 Remove the M8x12 screw and washer that attaches the counterweight to the inboard housing 2 Lift the counterweight off of the inboard housing The counterweight is keyed to the crankshaft Locate th...

Страница 18: ...300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 3 Remove the inboard housing from the crankshaft and orbiting plate 4 Remove and discard the tip seals from the inboard housing TriScroll 300 Disassembl...

Страница 19: ...9 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 5 Remove and discard the tip seals from both sides of the orbiting plate TriScroll 300 Disassembly continued...

Страница 20: ...e sides of the scroll walls use a razor blade or Exacto knife to scrape this debris off 2 Use dry compressed air to remove the tip seal debris from the scroll parts 3 Wipe the scroll parts with isopro...

Страница 21: ...orbiting plate 2 Cut the seal to the correct length at the end of each groove Leave a gap of 1 4 6 mm from the outer end to allow for thermal growth 3 Insert the new tip seal into the scroll tip groov...

Страница 22: ...seals from falling out of the grooves during reassembly 6 Ensure that the scroll walls are properly aligned to allow full engagement of the two parts 7 Reinstall the counterweight onto the crankshaft...

Страница 23: ...T 2 1 0 0 5 10 Install the rubber spider into the motor shaft coupling 11 Align the motor coupling to properly mate with the fan hub coupling 12 Install the inboard housing onto the frame TriScroll 3...

Страница 24: ...croll tip grooves on the orbiting plate 15 Cut the seal to the correct length at the end of each groove Leave a gap of 1 8 3mm from the outer end to allow for thermal growth 16 Squeeze a dot of Krytox...

Страница 25: ...g and install it around the lip on the inboard housing 20 Insert the tip seals in to the grooves on the outboard housing 21 Cut the seal to the correct length at the end of each groove Leave a gap of...

Страница 26: ...orbiting plate and against the inboard housing engaging the dowel pins 23 Secure the outboard housing to the inboard housing with the six M6x45 screws TriScroll 300 Reassembly continued NOTE Align the...

Страница 27: ...roll Vacuum Pump D R A F T 2 1 0 0 5 24 Install the cowling over the pump module 25 Secure with the three M5x16 screws This figure illustrates a fully reassembled TriScroll 300 Series Pump TriScroll 3...

Страница 28: ...ed into service immediately after maintenance is complete However 24 hours of run time is required before a base pressure of 10 mTorr can be achieved NOTE The 24 hour run time does not have to be cont...

Страница 29: ...lli Varian 54 10040 Leini TO ITALY Fax 39 011 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notif...

Страница 30: ...essage Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure...

Страница 31: ......

Страница 32: ...gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordin...

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