Varian NHS-35 Скачать руководство пользователя страница 5

WARRANTY

Products manufactured by Seller are warranted against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war-
ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable portion
of the purchase price of the Product. Items expendable in normal use are not covered by this war-
ranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in
the sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All
obligations of Seller under this warranty shall cease in the event of abuse, accident, alteration, mis-
use, or neglect of the equipment. In-warranty repaired or replacement parts are warranted only for
the remaining unexpired portion of the original warranty period applicable to the repaired or replaced
parts. After expiration of the applicable warranty period, Customer shall be charged at the then cur-
rent prices for parts, labor, and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation
of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise
thereto, and must be received within the applicable warranty period by Seller or its authorized repre-
sentative. Such claims should include the Product serial number, the date of shipment, and a full
description of the circumstances giving rise to the claim. Before any Products are returned for repair
and/or adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means
of transportation. When any Product is returned for examination and inspection, or for any other rea-
son, Customer shall be responsible for all damage resulting from improper packing or handling, and
for loss in transit, notwithstanding any defect or non-conformity in the Product, in all cases, Seller has
the sole responsibility for determining the cause and nature of failure, and Seller’s determination with
regard thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer
will be notified and the Product returned at its expense; in addition, a charge for testing and examina-
tion may be made on Products so returned.

3/5/97

Содержание NHS-35

Страница 1: ...NHS 35 Diffusion Pump Instruction Manual Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 3133 781 861 7200 800 8 VARIAN Manual No 6999 01 135 Revision G April 2000...

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Страница 3: ...Hong Kong Varian Technologies Asia Ltd Rm 2611 Concordia Plaza New Mandarin Plaza 1 Science Museum Rd Tsimshatsui East Kowloon Hong Kong Tel 852 26206173 Fax 852 26206338 India Varian India PVT LTD 1...

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Страница 5: ...of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and...

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Страница 7: ...proved by an industrial hygienist or chemical safety engineer Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe...

Страница 8: ...SAFELY AND EFFICIENTLY READ THEM SPECIAL OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION INSTRUCTIONS UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN POOR PERFORMAN...

Страница 9: ...r flow through the Use water flow sensor and feedback to interlock on the heater main cooling coils power supply Water trapped between inlet and Provide vent or pressure relief valves for both quick c...

Страница 10: ...sion pump fluids except mercury are fuels Hydrocarbon oils are more prone to oxidize and explode than synthetic silicone based oil Oxidizers can be air a strong oxidizer from a leak or can be delibera...

Страница 11: ...e causes Be certain that exhaust duct materials are capable of withstanding the corrosivity temperature and pressure of exhausted products c Pressure Pumps and their components are designed for vacuum...

Страница 12: ...es tion may produce serious effects Even absorption through the skin can result in moderate toxicity Always ensure that cleaning operations are performed in large well ventilated rooms Use of self con...

Страница 13: ...large amount of liquid nitrogen is spilled in a small poorly ventilated room or equipment death from suffocation can result All diffusion pumps are typically cleaned with acetone or alcohol Acetone al...

Страница 14: ...w areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irrit...

Страница 15: ...onnel to avoid dropping slip ping and or overturning the pump and severely injuring personnel Check weight of equipment before lifting and do not stand under equip ment being moved WARNING ___________...

Страница 16: ...x...

Страница 17: ...ding Pump Fluid 1 14 Section II Operation 2 1 2 1 Start up Procedure 2 1 2 2 Shutdown Procedure 2 2 Section III Maintenance 3 1 3 1 General 3 1 3 2 Periodic Inspection 3 1 3 3 Cleaning 3 2 3 4 Disasse...

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Страница 19: ...Diffusion Pump 1 6 1 4 Water Cooling Connections 1 9 1 5 240 400 440V Wiring Diagram NHS 35 Diffusion Pump 1 10 1 6 380 415V Wiring Diagram NHS 35 Diffusion Pump 1 11 1 7 480V Wiring Diagram NHS 35 Di...

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Страница 21: ...440 V with ASA flanges standard cold cap F1730308 F1730309 F1730326 F1730362 F1730364 with ASA flanges and halo baffle F1730318 F1730319 F1730336 F1730363 F1730365 with ISO flanges standard cold cap L...

Страница 22: ...Installation 1 2 Figure 1 1 Speed and Throughput Curves NHS 35 Diffusion Pump...

Страница 23: ...9 0 25 Height 72 13 inches allow additional 8 inches min for heater removal Jet Assembly 5 stage Self aligning fractionating design with four diffusion stages and one ejector stage Foreline Baffle Sta...

Страница 24: ...Installation 1 4 Figure 1 2 Physical Specifications NHS 35 Diffusion Pump with ASA Flanges optional...

Страница 25: ...on the bottom of the pump Using a flashlight check to make sure that the ejector nozzle is opposite the foreline the pump outlet connection The jet assembly should not rotate because of an indexing p...

Страница 26: ...Installation 1 6 Figure 1 3 Section Drawing NHS 35 Diffusion Pump...

Страница 27: ...a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation...

Страница 28: ...b Prepare inlet O ring seals by wiping them with a clean cloth Do not use solvents Use a small amount of diffusion pump oil to wet the cleaning cloth Install the O ring in the groove being careful no...

Страница 29: ...ected to an open drain and the feed line con trolled by a separate water 3 way valve open closed and vent to atmosphere The drain must be below the boiler level so that it is drained completely when t...

Страница 30: ...Installation 1 10 Figure 1 5 240 400 440V Wiring Diagram NHS 35 Diffusion Pump...

Страница 31: ...Installation 1 11 Figure 1 6 380 415V Wiring Diagram NHS 35 Diffusion Pump...

Страница 32: ...Installation 1 12 Figure 1 7 480V Wiring Diagram NHS 35 Diffusion Pump...

Страница 33: ...h should be adjusted with the pump in operation as follows a Disconnect the lead wires and place an ohmmeter across the terminals of the switch b Turn the switch adjusting screw until 1 16 of a turn e...

Страница 34: ...s 1 7 ADDING PUMP FLUID a The recommended fluid charge for the pump is three gallons The fluid charge will gradually be depleted through use but the pump will continue to operate normally When the cha...

Страница 35: ...d can also be poured in from the pump inlet or foreline d Replace the fill plug with a new Viton gasket Tighten the fill plug using moderate torque 75 inch pounds maximum Lubricate the O ring with pum...

Страница 36: ...Installation 1 16...

Страница 37: ...release or admitting air to a pump with a hot boiler permit a strong oxidizer to contact the hot pump oil high above 1 micron 133 Pa inlet pressure insufficient or low level of pump fluid running pum...

Страница 38: ...which have tight inlet and foreline connections it is possible to close valves to isolate the diffusion pump at inlet and discharge to air release the remainder of the system shut off the heat to the...

Страница 39: ...n plugs Slight discoloration of the fluid does not affect performance b Loss of the fluid can be caused by the following 1 incorrect air admittance procedures and or admittance of excessive air or oth...

Страница 40: ...ion pumps are typically cleaned with acetone alcohol or other solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury...

Страница 41: ...COLD CAP 1 To disassemble the cold cap a Remove the female coupling nut follower and the gasket located at the end of the cold cap water line on the outside of the pump b Remove the nut which secures...

Страница 42: ...the jet base is engaged in the locating pin in the boiler Unless this is done the pump will not function properly 3 6 HEATER REPLACEMENT a Determine which heater element has failed at the junction bo...

Страница 43: ...leads according to the schematic diagram then run the wires around the periphery of the pump under the wire retaining clips into the conduit and up into the junction box Connect the leads to the term...

Страница 44: ...05 Upper thermal switch 200 F K9050006 Lower thermal switch 600 F 647335010 Heater element with leads 4000 W 240V 380V 480V L6383010 Heater element with leads 4000 W 400V L6383011 Heater element with...

Страница 45: ...n the system is a result of gas load divided by pumping speed p Q S If the gas load Q exceeds the maximum throughput capability of the diffu sion pump the diffusion pump will not function and the pump...

Страница 46: ...and remove cause Low heat input Check heaters Low fluid level Add fluid Malfunctioning pump assembly Check and repair or replace Improperly located jets Damaged jet system Inlet pressure surges Incorr...

Страница 47: ...cleaned of all hazardous residue and that the residue remaining is of a non hazardous nature __________ Hereby certify that the product s listed below have been contaminated by the fol lowing toxic o...

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Страница 49: ...____ Machine ___________________________ Original Purchase Order No _________________________ Purchase Order Date _______________________ Company Name ___________________________________________ Conta...

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