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DRAFT 9

INSTRUCTION MANUAL

vacuum technologies

Block Valves

All Sizes

Manual No. 699912040
Revision L
September 2004

Содержание L6280

Страница 1: ...D R A F T 9 2 1 0 4 INSTRUCTION MANUAL vacuum technologies Block Valves All Sizes Manual No 699912040 Revision L September 2004 ...

Страница 2: ... is a registered trademark of Varian Inc Klamp Flange and KF Clamp are registered trademarks of Varian Inc Krytox is a registered trademark of DuPont Company Loctite is a registered trademark of Loctite Corporation Scoth Brite is a trademark of 3M Viton is a registered trademark of E I du Pont de Nemours and Company ...

Страница 3: ...on including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty perio...

Страница 4: ...Block Valves Instruction Manual for All Sizes This page intentionally left blank D R A F T 9 2 1 0 4 ...

Страница 5: ... Installation 1 1 Installation 1 3 Electrical Connections to Solenoid 1 4 Operation 1 5 Manually Operated Valves 1 5 Pneumatically Operated Valves 1 5 Maintenance 1 6 Manual Valves 1 6 Pneumatic Valves 1 11 Appendix A Technical Specifications A 1 Appendix B Spare Parts Kits Accessories and Replacement Parts B 1 Request for Return Health and Safety Certification Sales and Service Offices ...

Страница 6: ...Block Valves Instruction Manual for All Sizes This page intentionally left blank D R A F T 9 2 1 0 4 ...

Страница 7: ...ration 1 5 1 4 Small and Large Manual Block Valve Exploded View 1 6 1 5 Small and Large Pneumatic Block Valve Exploded View 1 11 1 6 Positioning the Quad Ring in the Air Cylinder 1 15 1 7 Removing the Stem from the Seal Disc 1 15 1 8 Position of Quad Ring In its Groove 1 17 1 9 Position Indicator Assembly Exploded View 1 19 1 10 Wiring Diagram Position Indicator 1 23 ...

Страница 8: ...Block Valves Instruction Manual for All Sizes This page intentionally left blank D R A F T 9 2 1 0 4 ...

Страница 9: ... 1 3 Small Block Valves Manual Valve Parts List 1 7 1 4 Large Block Valves Manual Valve Parts List 1 7 1 5 Small Valves Pneumatic Valve Parts List 1 12 1 6 Large Block Valves Pneumatic Valve Parts List 1 13 1 7 Position Indicator Parts List 1 20 1 8 Connector Base Wiring 1 21 A 1 Block Valve Specifications A 1 B 1 Spare Part Kits B 1 B 2 KF Clamp and Centering Ring Ordering Information B 2 ...

Страница 10: ...Block Valves Instruction Manual for All Sizes This page intentionally left blank D R A F T 9 2 1 0 4 ...

Страница 11: ...ion maintenance manuals provided by Vacuum Technologies Be aware of the hazards associated with this equipment know how to recognize potentially hazardous conditions and how to avoid them Read carefully and strictly observe all cautions and warnings The consequences of unskilled improper or careless operation of the equipment can be serious In addition consult local state and national agencies reg...

Страница 12: ...ère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione è conforme alla e sequente I norma o documento I normativo i Frederick C Campbell Operations Manager ...

Страница 13: ...alve is also available with a position indicator The position indicator delivers an electrical output signal when the valve cycles and is user set in either the normally open or normally closed position The NW 16 and NW 25 valves are identical except for their port sizes therefore all internal spare parts are interchangeable The NW 40 valve however is a larger bodied valve requiring different inte...

Страница 14: ...Pneumatically operated with or without solenoid without position indicator Aluminum L6281 L9181 Stainless Steel L9481 L9581 Pneumatically operated with or without solenoid with position indicator Aluminum L6282 L9182 Stainless Steel L9482 L9582 Table 1 2 Valve Ordering Information NW50 NW80 Valve Material Right Angle All Models Part No Manually operated Aluminum L72803 Pneumatically operated with ...

Страница 15: ...upling ISO 63 and ISO 80 valves Installed using an ISO coupling consisting of two symmetrical flanges a centering ring and claw clamps To install the valve 1 Wipe the O ring clean and grease it very lightly with Dupont Krytox GPL2O7 vacuum lubricant Part No 695400010 before installation 2 Assemble the KF coupling and tighten the wing nut or ratchet firmly to ensure proper compression of the O ring...

Страница 16: ...provided at the terminal base and prying the housing off Figure 1 2 Figure 1 2 Solenoid Assembly 3 Feed the power line through the housing grommet and connect the three leads to the terminal contacts which are clearly labeled 1 2 and ground 4 Push the terminal block back into the housing and snap it in place NOTE The housing can be rotated 360 in 90 increments so that the power line exits the conn...

Страница 17: ...good vacuum seal turn the knob clockwise until a slight resistance is felt then firmly torque the knob approximately turn To open the valve Turn the knob counterclockwise until the valve is fully open to ensure maximum conductance 1 2 3 Pneumatically Operated Valves Pneumatic valves are spring closed air opened valves When electric power is Supplied to the solenoid valve air is supplied to the cyl...

Страница 18: ...Cleaning on page 1 8 Reassembly on page 1 10 Figure 1 4 shows an exploded view of the small manual block valve and the large block valve The numbers of the small block valve correspond to items in Table 1 3 The numbers of the large block valve correspond to items in 1 4 Figure 1 4 Small and Large Manual Block Valve Exploded View Bellows Stem 1 2 4 5 6 9 8 7 3 5 1 2 4 6 7 10 9 8 3 10 11 12 13 Assem...

Страница 19: ...Viton Parker No 2 031 Parker No 2 039 10 Valve Body Table 1 4 Large Block Valves Manual Valve Parts List Description Vacuum Technologies Part No or Equivalent Item NW50 ISO63 ISO80 1 Knob L8819001 plastic L8818001 plastic L8818001 plastic 2 Set Screw 10 32 x 1 2 lg 10 32 x 1 2 lg 10 32 x 1 2 lg 3 Screw Socket Head Cap 10 32 x 3 4 lg 10 32 x 3 4 lg 10 32 x 3 4 lg 4 Top Plate L6606001 L6606001 L7283...

Страница 20: ...tem assembly 7 8 9 and 10 5 from the valve body as one unit If only the main seal O ring 8 is to be replaced do so at this time and then reassemble the valve Reassembly on page 1 10 3 Holding the valve stem 5 6 of the bellows valve stem assembly 8 9 and 10 5 between the fingers of one hand unscrew the top plate 4 with the other hand and remove the plate from the valve stem 5 6 The bellows valve st...

Страница 21: ...cloth or a light abrasive cloth such as Scotch Brite CAUTION When cleaning the parts of the bellows valve stem assembly 7 8 9 and 10 5 wipe only the surface area of the bellows and seal disk exposed to the vacuum system Soaking the bellows valve stem assembly in an alcohol bath damages the O ring 8 and causes it to outgas under vacuum ...

Страница 22: ...ssemble the manual valve NOTE Use new O rings 8 and 9 9 11 and 12 for this procedure 1 Wipe new O rings clean and very lightly grease them with Dupont Krytox GPL2O7 vacuum lubricant 2 Place O rings 8 and 9 into their respective grooves 3 Take the bellows valve stem assembly 7 8 9 and 10 5 and hold it securely in one hand Using the other hand thread the top plate 4 onto the valve stem 5 6 until the...

Страница 23: ...exploded view of the small pneumatic block valve and the large pneumatic block valve The numbers of the small block valve correspond to the items in Table 1 5 The numbers of the large block valve correspond to the items in Table 1 6 on page 1 13 Figure 1 5 Small and Large Pneumatic Block Valve Exploded View 2 1 3 4 5 6 7 8 9 10 11 12 13 14 15 2 1 3 4 5 6 7 8 9 11 12 13 10 14 15 16 17 18 older mode...

Страница 24: ...60203125 6 Air Cylinder L5480001 L5677001 7 Quad Ring 699000025 699000025 8 Valve Stem L5483001 L5679001 9 Spring 660285312 660265073 10 Special Washer Aluminum not used on new models L5482001 L5678001 11 Bellows Seal Disc L8739301 L8738301 12 O ring Parker No 2 213 Viton Parker No 2 223 Viton 13 O ring Parker No 2 031 Viton Parker No 2 039 Viton 14 Valve Body Voltage Hertz Part No 15 Solenoid kit...

Страница 25: ...nder L6604001 L660400 L6604001 7 Quad Ring 699000026 699000026 699000026 8 Valve Stem L6607001 L6607001 L6607001 9 Spring 660285698 660285698 660285698 10 Special Washer L9973001 L9973001 L9973001 11 Bellows L6603001 L6603001 L6603001 12 O ring Bellows Viton 66892014 66892014 66892014 13 Seal Disc L6602001 L6985001 L9972001 14 O ring Seal Disc Viton 660892227 660892231 660892234 15 O ring Bonnet V...

Страница 26: ...14 16 All components except for the O ring 13 15 remain with the air cylinder This group of components is collectively referred to as the trim assembly If only the main seal is to be replaced do so at this time then reassemble the valve For more information refer to Reassembly on page 1 16 5 To disassemble the trim assembly pull the red visual indicator cap 3 off the valve stem 8 6 Using a 7 16 de...

Страница 27: ... disassembly requires a soft jaw vise two 1 20 nuts and two 7 16 open end wrenches 12 Remove the spring 9 from the valve stem 8 13 Position the bellows valve stem assembly in the vise with the valve stem pointed up and the seal disc between the jaws Tighten the vise jaws on the seal disc periphery firmly but not so tight as to deform the seal disk Figure 1 7 Figure 1 7 Removing the Stem from the S...

Страница 28: ...ipe only the surface area of the bellows and seal disk exposed to the vacuum system Soaking the bellows stem assembly in an alcohol bath damages the O ring 8 and causes it to outgas under vacuum 20 Clean the metal components using an alcohol dampened cloth or a light abrasive cloth such as Scotch Brite 21 Wipe all surfaces with an alcohol dampened cloth and allow components to dry thoroughly 1 3 5...

Страница 29: ...emblies without a boss machined into the seal disc 5 Take the valve stem 8 in hand apply Loctite 242 adhesive to the first three female threads 6 Thread the valve stem 8 onto the threaded rod of the seal disc 11 by turning the stem clockwise until finger tight 7 Place the spring 9 over the stem so it is seated on the special washer 10 This washer is required only in older model valves 8 Proceed to...

Страница 30: ...e body 18 Put the air cylinder cover 1 into position and secure the assembly with cap screws 2 19 Mount the solenoid assembly to the air cylinder and tighten with a 5 8 open end wrench 1 3 5 5 Position Indicator This discussion details how to disassemble the position indicator so that A defective microswitch can be fixed see Replacing the Defective Microswitch on page 1 21 or A new position indica...

Страница 31: ...ed view of the position indicator and Table 1 7 lists the associated callouts Figure 1 9 Position Indicator Assembly Exploded View 5 4 1 2 3 7 6 12 9 17 18 12 11 19 20 15 14 13 13 9 16 15 21 22 11 14 Note Microswitch S2 mounts in the two upper holes Note Microswitch S1 mounts in the two upper holes ...

Страница 32: ... 56 x 3 8 Ig 8 Gasket Included with item 6 9 Nut 2 56 10 Lockwasher 2 11 Microswitch Cherry E61 10H 12 Threaded Holder Q3033001 13 Screw Phillips head 2 56 x 1 2 Ig 14 Lockwasher 2 15 Washer Flat 2 16 Microswitch Mounting Bracket L8673301 17 Screw Philips head 6 32 x 1 4 Ig 18 Lockwasher 6 19 Screw Allen head cap 10 32 x 2 Ig NW16 NW25 NW50 ISO63 1 4 20 x 2 Ig NW40 ISO80 20 Lockwasher No 10 NW16 N...

Страница 33: ...ps in the procedure above 1 3 5 5 2 Replacing the Defective Microswitch To replace the microswitch 1 Disconnect the soldered leads from the Microswitch pins 2 Unscrew the mounting screws 13 and remove the Microswitch 11 3 Reassemble a new switch on the bracket 16 as shown in Figure 1 9 on page 1 19 Note the position of the switches on the bracket and wire the microswitches as shown in Figure 1 10 ...

Страница 34: ...o close it 6 Carefully mount the position indicator assembly on the valve It may be necessary to move the switches back to clear the shaft Use two 6 32 x pan head screws and two 6 lockwashers to fasten the position indicator on the top of the valve 1 3 5 5 3 1 Wiring the Position Indicator Refer to Figure 1 9 on page 1 19 for this procedure To wire the position indicator 1 Remove the holding screw...

Страница 35: ...until the Microswitch closes 3 Tighten the screws holding switch S2 4 Actuate the valve five times and ensure that the switch S2 opens and closes and is in the correct position 5 Close the valve by removing the air pressure from the valve 6 Connect the Ohmmeter to pin 2 blue wire and pin S white wire of the switch S1 connector The meter should still be set to read resistance Ohms 7 With the valve ...

Страница 36: ...Block Valves Instruction Manual for All Sizes This page intentionally left blank D R A F T 9 2 1 0 4 ...

Страница 37: ...lium Materials Valve Body Aluminum 6061 T6 or stainless steel Bellows Stainless Steel T300 Series O rings vacuum Viton V747 75 Air Piston Viton V747 75 Baking Temperature Manual valve 80 C 176 F 150 C 302 F Pneumatic valve 80 C 176 F without solenoid 150 C 302 F without solenoid 60 C 140 F with solenoid 60 C 140 F with solenoid Miscellaneous Service Life Bellows 1 000 000 cycles Manual valve numbe...

Страница 38: ...F T 9 2 1 0 4 Position Indicator Actuator Microswitch Electrical rating 125 250 VAC 5 A maximum Signal hookup NO or NC or both Microswitch life 250 000 cycles with 1 A load Table A 1 Block Valve Specifications Continued NW 16 NW 25 NW 40 NW 50 ISO 63 ISO 80 ...

Страница 39: ...cessories and replacement parts by valve type Table B 1 Spare Part Kits Valve Type Valve Part No Manual NW 16 or NW 25 L6125301 NW 40 L6126301 NW 50 L6625301 ISO 63 L7276301 ISO 80 L7278301 Includes Bellows Stem Stem nut and O rings Includes Bellows assembly and O rings Pneumatic NW l6 or NW 25 L6127301 NW 40 L6128301 NW50 L6615301 ISO 63 L7277301 ISO 80 L7279301 Includes Quad ring Bellows all O r...

Страница 40: ... Ordering Information KF Fitting KF Clamp with Ratchet Closure Part No Centering Ring with Viton O ring Part No NW16 KQ16AR KC16SV NW25 KQ25AR KC25SV NW40 KQ40AR KC40SV NW50 KQ50AR KC50SV ISO63 IC063100A IC063AV ISO80 IC063100A IC80AV Dupont Krytox GPL207 Vacuum Grease 695400010 Sta lube bearing grease 3120 ...

Страница 41: ...OW Varian Inc Vacuum Technologies 121 Hartwell Ave Lexington MA 02421 Fax 781 860 9252 Varian S p A Via F lli Varian 54 10040 Leini TO ITALY Fax 39 011 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notification RA Customer ID Equipment CUSTOMER INFORMATION Company name Contact person Name Tel Fax ...

Страница 42: ...e Clogging Operation Time Describe Failure Turbocontroller Error Message Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure Describe failure Customer application Customer application Cannot calibrate No zero high background Gauge tube not working Display pro...

Страница 43: ......

Страница 44: ...ess Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Building 2F...

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