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Страница 2: ...andling of the product Company Name Hereby certify that the product s listed below have been cleaned of all hazardous residue and that the residue remaining is of a non hazardous nature Hereby certify that the product s listed below have been contaminated by the following toxic or hazardous materials RA Number Model Number Serial Number Authorized Signature Title Date Note Varian Service will only...
Страница 3: ...able of contents Warranty Features Safety instructions Operating principle Technical characteristics Accessories Start up Electrical connections Mechanical connections Maintenance 3 5 8 3 15 23 24 27 30 32 ...
Страница 4: ...ted herein Seller shall have no liability under any warranty express or implied either in fact or by operation of law statutory or otherwise Statements made by any person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Ad...
Страница 5: ...n systems etc VARIOUS SEMICONDUCTOR PROCESSES Welcome When you purchase a Varian SD CD CP series rotary vane pump you purchase the extensive knowledge of the people who make up VARIAN These ore the same people who provide you with the technical support on your most complex and demanding applications We suggest that you D read this manual particularly the chapter on installation and start up before...
Страница 6: ...case 8 Inlet end fitting 2 Gas ballast control 9 Exhaust end fitting 3 Base 10 Fold oway handle 4 Oil level sight glass 11 Electric motor 5 12 IEC electric socket 13 ON OFF switch The inlet and exhaust end fittings are PNEUROP IS0 KF standardized They are fitted vertically on the pump at delivery but can be positioned on the horizontal openings ii required by operating conditions They can also be ...
Страница 7: ... reliability of our equipment without particular storage precautions for up to 3 months ambient temperature between 41 F and l 49 F or 5 and 65 C For storage periods of over 3 months we recommend to fill the pump with oil during storage For this fill the pump and run it at ultimate vacuum inlet orifice blocked for approximately l hour in order to lubricate all the parts of the functional block see...
Страница 8: ... containing capacitors loaded with over 60 VDC or 25 VAC take precautions when accessing the connector pins single phase motors equipment with mains filter frequency converter monitor etc Vane roughing pumps use lubricants it is recommended to request information from the manufacturer on the safety data sheets concerning the product used Our pumps are designed to prevent any thermal risk for user ...
Страница 9: ...Aow rate so as to satisfy the dilution conditions Caution do not generate an excess pressure 14 PSIG 1 relativ bar Use of purge with gas ballast A neutral gas supply can also be connected via the gas ballast BSPP 8 Gas connection CP models 10 Purge with gas ballast Due to the danger represented by the accidental opening of the gas ballast on a CP series pump manual operation of the gas ballast has...
Страница 10: ...t be above the lower limit of the sight glass al the end of pumping Run the pump al ultimate vacuum for one hour and set the nitrogen flow rate as follows at atmospheric pressure and at 68 F or 20 C NilToaen flow rate in 1 h Corresponding CP Series Pumps Min Average Maxi absolute pressures bar 60 200 500 1 05 lo 1 10 Note these characteristics apply for pumps operating at a constant inlet pressure...
Страница 11: ...e 21 The use of these oils requires a special pump preparation see page 37 The pump must be completely disassembled and all traces oil mineral oil removed Flushing the oil case is not adequate In addition it is strongly recommended not to use fluids such as ill tri aryl phosphate ester which are know to cause accidents Any accumulation of oxygen in the installation should be avoided and the oxygen...
Страница 12: ...pumped gos is compressed beyond its saturated vapour pressure in the compression phase and con condense impoiring pump performance The gos ballast con be used lo inject o certain quantity of oir neutral or dry COMPRESSION gos into the lost stage of the pump during the compression phase so that the partial pressure of the pumped gos is less than its saturated vapour pressure at the temperature of t...
Страница 13: ...ed against the stator by centrifugal force and springs In Exh As the vane passes in front of the inlet orifice an increasing space is formed into which the gas from the chamber to be evacuated expands When the second vane passes the space is closed The gas trapped in the space between the two vanes is transferred to the exhaust orifice as the rotor rotates The space communicates with the exhaust w...
Страница 14: ...ed to the second high pressure stoge and discharged through the high pressure HP valve In Low pressure stage High pressure stage Application Two stage rotary vane pumps are the best choice for application requiring an ultimate vacuum as low as l 3 Torr l 33 x l 0 3 mbor Note when operating a two stage vane pump continously greater than half an hour above l 0 Torr the unit should be equipped with a...
Страница 15: ...eir type the pump temperature and the quantity of air introduced by the gas ballast Thus for high vapour levels in a system the single stage pump is more suitable However when not pumping vapours its ultimate pressure is higher Care should be taken to limit the inlet pressure of the pump to its maximum admissible pressure with the pumped product This is obtained by reading the pump characteristic ...
Страница 16: ...re from 0 75 to l 5 Torr Condensate trap Vapor pumping procedure Valve off the pump from the system and increase the pump temperature 30 minutes with gas ballast see page 26 Start pumping and check the oil level the level drops oil is being lost the level rises condensates have been added to the oil After pumping regenerate the oil using gos ballast if it is cloudy or discoloured if the level is t...
Страница 17: ...licotions Manufacture of light bulbs production of TV tubes monufocture of electroni tubes metallurgy centrifuges etc CD series Pumps suited lo the pumping of corrosive gases R D laboratories freeze drying pumping of solvents etc CP series Pumps with increased resistance lo meet the requirements of the more aggressive processes of the semiconductor industry Ion implantation sputtering etc HD serie...
Страница 18: ...3 25 55 35 25 SD 201 SD 301 50 1500 9 7 8 5 1 60 50 2 2 1800 1500 11 6 15 6 8 10 2 12 5 6 7 5 1o s I 1 1o 4 1 l Q 2 1 5 1 3 2 10 3 2 1Q 1 1 5 10 2 2 10 2 2 60 1800 18 10 6 15 8 8 0 950 0 950 26 57 27 59 5 20 15 12 10 3__5 L02 25 2 2 15 102 12 102 1 103 120 110 125 100 110 100 DN 25 SD 451 50 I 60 2 1500 1800 20 7 24 8 14 6 16 5 20 11 8 0 98 28 62 7 7 7J_02 Z 02 90 90 Partial ultimate pressure meas...
Страница 19: ...rosive applications Characteristics Frequency Number of stages Rotation speed Nominal flow rote CP Series Two stage pumps DIOI o Flow rote Pneurop method Partial ultimate pressure with fluid Ultimate pressure Oil capacity Weight pu E motor Inlet and exhaust end fittings g h 1S0 KF Unit Hz m m3 h cfm m3 h elm Torr mbor Po Torr mbor Po I g lbs ISO KF 120 110 CP 201 50 I 60 2 1500 1800 9 7 11 6 6 8 8...
Страница 20: ... vacuum 40 C 54 213 c GP Pumping non corrosive products s 3 10 3 100 C 8 1 4 10 5 Low viscosity 244 c VARIAN Mineral oil distilled under vacuum 40 C 58 223 c Pumping corrosive products s 2 10 2 1 10 5 GS Low bockstreoming 100 C 8 5 2s9 c Ultimate pressure measured according to Pneurop 6602 specifications on CD 301 pump These values are given as a rough guide only They may vary according to the typ...
Страница 21: ...Dimensions Filling A 9 3 Drain3 8G Dim inch A 22 I I Inlet BubblerCP Series 14 x 8 mm diam holes Pump type 91 201 301 9 9 8 10 6 7 8 8 9 Exhaust DN25 ISOKF 451 11 5 9 7 ...
Страница 22: ...mp liquid nitrogen trap Pl 118301 Inlet Protects the fr ump against condensable vapours Prevents oil rom backstreaming into pumped LNT 25 S chamber I In general use accessories in which the tightness and materials ore compatible with the pumped gases and illthe required safety conditions al both the inlet and the exhaust At the pump exhaust the discharge circuit must be such that the resulting exc...
Страница 23: ...ry out the special preparation procedure for the pump then remove the filling cap and fill with oil until the oil reaches the highest mark on the sight gloss This operation must be performed with the pump switched off The second filling orifice is used if on external oil filtration device is connected see accessories p 23 Checking the oil level To use the pump in optimum conditions the oil level m...
Страница 24: ...rating At start up before switching on the motor check that the oil bath temperature temperature is greater than 53 F l 2 C Before starting up the pump The ambient operating temperature for the pump must be between 53 F l 2 C and 1 l 3 F 45 C Under these conditions the stabilized pump temperature at the front of the oil case will be between 140 F and 158 F 60 and 70 depending on operating conditio...
Страница 25: ...e noises will no longer be heard when the fill plug has been replaced Under normal temperature conditions the oil circuit should start less than l minute after start up this time may vary with the type of oil and its degree of contamination Use the gas ballast if necessary lo decontaminate the pump s oil to accelerate heating It is normal for the oil level to change as can be seen through the oil ...
Страница 26: ...to 300 V 60Hz High voltage 342 V to 460 V 50Hz 342 V to 520 V 60Hz All three phase motors protection level IP 43 TEFC type must be protected by a customer supplied starter consisting of a suitably rated contactor and thermal overload Furthermore they ore equipped with a dry contact NC thermal protection which is available in the therminol box Wire the motor according to the line voltage The connec...
Страница 27: ...use or motor associated value three phase motor The table on the following page gives for each pump the electrical characterisl permanent operation and the proposed circuit breaker Single phase motors hove a thermal circuit switch with automatic starting device CSA standard when the internal motor temperature reaches a value over the preset limit value the motor stops However when the motor is coo...
Страница 28: ... The characteristics and ratings of fuses ond circuit breaker associated with standard VARIAN pump motors 5 to 21 m3 h single phase or three phase Single phase motor Current at start up Proposed Ultimate Pressure A current A Fuse protection A 50 Hz 60 Hz 50 Hz 60 Hz Standard Type aM 5 0 3 5 30 0 34 0 20 20 8 6 4 0 35 0 20 6 2 5 2 0 14 0 19 0 10 16 4 4 2 0 20 0 16 4 3 5 8 0 10 4 Temperature 12 C 59...
Страница 29: ...ration at an ambient temperature between 53 F and 113 F 12 and 45 Inlet and exhaust fitting I Remove the protective caps on the inlet and exhaust orifices these components illprevent foreign bodies from entering the pump during transport ond storage It is dangerous to leave them on the pump during operation The pump inlet and exhaust orifices are equipped with ON 25 1S0 KF end fittings which can b...
Страница 30: ...d Ifitting to be removed Unfasten the end fitting and remove it from its housing along with the 0 ring In the c gse of the inlet end fitting also remove the inlet filter Horizontal reassembly Remove the attachment screw from I the lateral cop and using a wide screwdriver remove the cop Position the end fitting in the corresponding lateral orifice toking core to fit the 0 ring Attach the end fittin...
Страница 31: ...epending on the case we recommend to purge the pumping installation with dry nitrogen before interventions wear gloves protective goggles and if necessary a breathing apparatus ventilate the premises well and disassemble the equipment under a suction hood not to dispose of used oils and residues using the standard system and if necessary to have them destroyed by a specialized company After a comp...
Страница 32: ...d reassemble 1 flushing Oil cold Warm pump Insufficient oil in the oil case I Fill up to the level Oil contaminated Drain Rush and refill with clean oil Oil pump inlet partially blocked Drain and clean the oil pump inlet duct Lubrication holes blocked Disassemble and clean Vane or spinner com SD models Replace them damaqed Incorrect onti suckback system Repeal the assembly and the setting assembly...
Страница 33: ...rectly set or damaged V t Incorrect fan assembly Incorrect onti sud back device ossembl Vanes damaged or stuck Ambient temperature too high Pump placed in a poorly ventilated place or vents blocked Operation at high pressure P 22 Torr 30 mbar Excess ressureat ei lioust Motor in over voltage or Motor in short circuit oil contaminated I Pump not prepared for the oil used or oil unsuitable Close Re J...
Страница 34: ...sembly and replace seal the seals if necessary Poor pump tightness when switched Gas ballast open 0 Close off Safety valve damaged me Reolace Incorrect onti suckback assembly Repeat the assembly O ring pinched Replace Seals damaged Replace Oil contaminated aj ZJlf Drain Aush and refill with clean I I oil Oil in base Oil case and frame cleaned Remove the base and clean poorly during reassembly 111 ...
Страница 35: ...il should be changed at intervals of 6 months to a maximum of l year oil may become sticky Note Every pumping operation is different This oil must therefore be changed at intervals adopted lo eoch specific application The use of certain accessories see page 23 con reduce the frequency of these maintenance operotions Draining The draining operation places the contaminated pumping circuit in ffi com...
Страница 36: ...the factory with VARIAN GP type oil Fomblin TM for CP series pumps unless specified otherwise in the order When the pump is delivered a certain quantity of oil remains in the functional block Thus if you wish to use another type of oil proceed as follows Compatible oils Mineral oil can be replaced by another type of mineral oil Simply flush the pump see above using the new oil and fill the pump se...
Страница 37: ...e fan the key and the support washer With a screwdriver remove the shaft sleeve and its 0 ring Unscrew the two seal holder fastening screws and remove the seal holder Remove the seal from the seo holder as described on page 43 and discord it Cleon the metal ports Inspect the wearing side of the shaft sleeve ofter cleaning the sleeve may show a perfectly normal trace of rubbing caused by polishing ...
Страница 38: ... Disassembling the bubbler ICP pump Remove the gas ballast cover 2 screws the adjustment button the spring and the sleeve Remove the tank feed through 2 screws and its seal Remove the sight gloss cover Remove the plate the sight glass and the 0 ring Remove the oil case and its 0 ring after removing the 4 fastening screws Disconnect the nitrogen inlet Remove the nitrogen inlet and disconnect the co...
Страница 39: ...assembled without modifying the setting Remove the spinner com 8 by removing the circlip Do not disassemble the nozzle to clean it During the reassembly check that it is not blocked by sending a jet of compressed air through it Remove the cover from the oil pump 9 Release the cylinder 15 equipped with the washer piston and spring Release the stop valve 10 from its housing ll Unscrew the seal of th...
Страница 40: ...t along the HP stator and the rotor rotor two stage pumps Disassembling the intermediate flange two stage pumps Disassembling the LP stator and the rotor Release the rotor and the vanes Insert two screwdrivers in the notches and release the flange in the axis Remove the LP stator Remove the rotor and the vanes equipped with the springs 41 ...
Страница 41: ...r using o cloth Dry the components in the air or with compressed air After use in non perfluorinate synthetic or mineral oil clean the metal components with o solvent such as alcohol and proceed as follows Cleon when cold by dipping or using o cloth Dry the components in the air Industrial washing solutions con also be used The cleaning operation should be followed by vacuum drying Cleaning the oi...
Страница 42: ... the shaft seal The seal housing ond the seol lip are lubricoted with the lubricant used in the pump The Range is resting on a Rat surface According to the direction of assembly specific to each pump the seol is fitted on the assembly mandrel 55 0 2 Mandrel Direction of assembly of shaft seals Using a press or a hammer the seal is inserted in its housing They ore fitted using the assembly mandrel ...
Страница 43: ...s Fit o new seal on the tube and connect the assembly to the frame Position the tube attachment on the pin and tighten the nut on the rear Range maximum clomping torque 0 8 mdoN 5 8 ft lbs l In the sleeve fit the boll and the spring and fasten the connector Then fasten the assembly on the side of the frame SD series pump Offset the spinner om 1 by pressing on the blades Turn the shaft up to the ma...
Страница 44: ... Equip the adjustment knob with the sleeve and the spring Position the assembly in the cover and secure on the oil case feed through Replace the 0 ring included in the seal kit Fit the sight gloss and assemble with screws clomping torque 0 3 mdoN 2 14 ft lbs Cl series pump The sight glass is mode of glass gradually tighten the ill two attachment screws in alternation to avoid placing the sight gla...
Страница 45: ...m maintenance operations on the pump for a two year period under normal operating conditions Pump models PartNo Pump models _ PartNo CD91 P1167301 SD91 P1149301 CD201 P1168301 SD201 P1150301 CD301 P1169301 SD301 r_ Cf P1151301 CD451 P1170301 SD451 P1152301 CP 201 P1171301 CP 301 P1172301 CP 451 P1173301 front seal replacement kit ports for shaft passage tightness on motor side This kit contains al...
Страница 46: ...der number and date purchased Varian Sales Order No lif available _______ Machine ____ _ ______ Original Purchase Order No __________ Purchase Order Dote _____ _ Company Name Address ________________________________ City__________________ State_____ Zip _____ Telephone _______________________________ _ Failure Report describe in detail suspected cause or nature of malfunction Returned Products All...
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