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Model 990 dCLD II Component Leak Detector

2-6

2.2.3 Split Flow Dual Mechanical Pump Configuration

Figure 2-3 Split Flow Dual Mechanical Pump Configuration

Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.

Table 2-5 Split Flow Dual Mechanical Pump System Valve Sequence

State

Vent

Valve

Rough

Valve

Test

Valve

Remarks

Pre-Vented

Closed

Closed

Closed

The Pre-Vented state allows time to ensure that all valves
are closed before any open. The time spent in the
pre-vented state depends on valve actuation time.

Vented

Opened

Closed

Closed

The Vented state places the fixture at atmosphere.

Pre-Roughing Closed

Closed

Closed

The Pre-Roughing state allows time to ensure that all
valves are closed before any open. The time spent in the
pre-roughing state depends on valve actuation time.

Roughing

Closed

Opened

Closed

The Roughing state brings the fixture to vacuum.

Test

Closed

Opened

Opened

The Test Valve re-opens at the appropriate foreline
pressure, exposing the fixture to the foreline.

Sp

e

c

Tu

rb

o

Cal Le

ak

Cal

Leak

Foreline

Turbo Spec Tube Assembly

Length is Proportional

Test Valve

Rough Valve

Vent Valve

Fixture

(in box)

Backing

Primary

Pump

Roughing

Primary

Pump

Keep Distance as
Short as Possible

to Sensitivity

Tu

be

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Содержание 990 dCLD II

Страница 1: ...el 990 dCLD II Component Leak Detector Manual No 699909694 Revision F April 2007 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Страница 2: ...Torr TriScroll and VacuSolv are trademarks or registered trademarks of Vacuum Technologies Alconox is a registered trademark of Alconox Inc Apiezon is a registered trademark of M I Materials Ltd Loctite and PST are registered trademarks of Loctite Corporation Scotch Brite is a trademark of 3M Corporation Slo Blo is a registered trademark of Littelfuse Inc ...

Страница 3: ...erson including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty pe...

Страница 4: ...Model 990 dCLD II Component Leak Detector This page intentionally left blank D R A F T 4 2 0 0 7 ...

Страница 5: ... 2 2 2 2 1 Single Mechanical Pump Configuration 2 4 2 2 2 Dual Mechanical Pump Configuration 2 5 2 2 3 Split Flow Dual Mechanical Pump Configuration 2 6 2 3 Size of Mechanical Pumps 2 7 2 4 Electronic Considerations 2 8 2 4 1 Discrete I O J3 Inputs 2 8 2 4 2 Discrete I O J3 Outputs 2 10 2 4 3 BCD J4 Outputs 2 12 2 4 4 Host Serial Port J6 2 14 2 5 Operating Modes Commands Cross Reference 2 15 Secti...

Страница 6: ...Screens 4 5 4 2 3 Selecting Options in Touch Panel Screens 4 5 4 3 Menu Hierarchy 4 6 4 4 Touch Panel Home Screen 4 7 4 5 System Information Screen 4 11 4 5 1 System Software Version 4 12 4 6 Main Menu Selection Screen 4 13 4 6 1 Calibrated Leak Set Up 4 13 4 6 1 1 Selecting Internal or External Calibrated Leak for Calibration 4 14 4 6 1 2 Selecting Normal or Fast Calibration Routine 4 14 4 6 2 Re...

Страница 7: ... does not Light 6 2 6 2 2 HIGH VAC LED does not Light 6 3 6 2 3 SPEC TUBE LED does not Light or Stay Lit 6 4 6 2 3 1 Check the Control Unit SPEC TUBE LED Using Diagnostic Port Interface J12 6 4 6 2 3 2 Check the Control Unit SPEC TUBE LED Using Optional Front Control Panel Interface 6 4 6 2 4 No Helium Response 6 5 6 2 4 1 Check the Helium Response Using Diagnostic Port Interface J12 6 5 6 2 4 2 C...

Страница 8: ...ak Detector C 4 C 5 3 The Nature of Flow in a Vacuum C 4 C 5 4 Facts About Leak Rates C 5 C 6 Leak Detection Methods C 5 C 6 1 Test Piece Evacuated Figure C 1a and Figure C 1b C 6 C 6 2 Test Piece Pressurized Figure C 2 C 6 C 6 3 Test Piece Already Sealed Figure C 3 C 7 C 7 Mass Spectrometer Leak Detector Simplified Description C 8 Index I 1 Sales and Service Offices ...

Страница 9: ...4 1 990 dCLD II Optional Front Control Panel 4 1 4 2 Menu Hierarchy up to Service Menu 4 6 4 3 Service Menu Hierarchy 4 7 4 4 Touch Panel Home Screen 4 7 4 5 Bar Graph Display 0 8 x 10 09 atm cc sec 4 8 4 6 Touch Panel Digital Display 8 0E 10 atm cc sec 4 8 4 7 System Information Screen Typical Display 4 11 4 8 Software Version Screen 4 12 4 9 Main Menu Selection Screen 4 13 4 10 Calibrated Leak S...

Страница 10: ...5 14 5 17 Discolored Ground Slit Plate 5 15 5 18 Discolored Ground Magnet Pole Piece 5 15 5 19 VacuSolv Cleaning Wipe 5 16 5 20 Inspecting the O ring 5 16 5 21 Spectrometer Tube Reassembly 5 17 5 22 Control Unit Front Panel 5 18 C 1a Test Piece Evacuated Tracer Probe Used to Locate Leak C 6 C 1b Test Piece Evacuated and Hooded with Helium Atmosphere to Determine Overall Leak Rate C 6 C 2 Test Piec...

Страница 11: ... Combinations 3 6 3 2 Analog Leak Rate Voltage Outputs 3 21 4 1 990 dCLD II Operating States 4 9 4 2 990 dCLD II Leak Detector Status 4 9 4 3 990 dCLD II Condition States 4 10 4 4 System Information Screen Conditions 4 11 5 1 Scheduled Maintenance 5 3 5 2 As required Maintenance 5 3 5 3 Tools and Parts Required for Spectrometer Tube Overhaul 5 5 5 4 Example Setting REPELLER Parameter Value using J...

Страница 12: ...Model 990 dCLD II Component Leak Detector This page intentionally left blank ...

Страница 13: ...stra sola responsabilidad que el producto verklaren onder onze verantwoordelijkheid dat het product dichiariamo sotto nostra unica responsabilità che il prodotto Model 990 dCLD II Component Leak Detector to which this declaration relates is in conformity with the following standards EN61010 1 1993 Safety requirements for electrical equipment for control and laboratory use incorporating amendments ...

Страница 14: ...nel must be aware of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious This product must only be operated and maintained by trained personnel Every operator or service person must read and thoroughly understa...

Страница 15: ...hecking or replacing O rings keep in mind the following NOTE Varian recommends replacing all O rings during routine maintenance or during any maintenance procedure requiring that O rings be removed CAUTION Remove O rings carefully with your fingers Do not use metal tools for this task Follow these guidelines to prevent scratching of any sealing surfaces Wipe all O rings clean with a lint free clot...

Страница 16: ...rature drying is required following cleaning with VacuSolv Although appropriate precautions are advised VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs chlorofluorocarbons Contacting Varian In the United States you can contact Varian Customer Service at 1 800 8VARIAN Internet users Send email to Customer Service Technical Support at vpl customer support vari...

Страница 17: ...arian Platform leak detector electronics architecture to operate the turbo spec tube assembly and provide leak rate and system status information to the operator interface 1 1 Unpacking the 990 dCLD II The 990 dCLD II is shipped to you in two or three boxes depending on whether or not you ordered the optional front control panel The contents of the boxes include 990 dCLD II Control Unit Cables Mat...

Страница 18: ...l hardware and connections of the 990 dCLD II control unit Figure 1 1 Control Unit Front Panel Connector for Optional Front Control Panel The connector provides signals and power for the 990 dCLD II Optional Front Control Panel only POWER LED Steady ON verifies the presence of 5 VDC from the main power supply HIGH VAC LED Steady ON verifies that the turbo pump is up to speed SPEC TUBE LED Steady O...

Страница 19: ... Tube Connector A keyed locking connector for the turbo spec tube assembly cable Exhaust Fan A fan for cooling the control unit and optional front control panel J6 Host Serial Port A female 7 pin connector for a high speed interrupt driven RS 232 interface for host computer control and monitoring J4 BCD Output A female 37 pin connector for BCD Binary Coded Decimal output J3 Discrete I O A female 3...

Страница 20: ...emblies described below Figure 1 3 Turbomolecular Pump Spectrometer Tube Assembly Turbomolecular pump Provides high vacuum for spectrometer tube operation Spectrometer Assembly Magnetic sector spectrometer optimized for the detection of helium ions Internal calibrated leak A helium leak standard that provides verification of 990 dCLD II operation Cal leak valve block Provides valving for the inter...

Страница 21: ...connectors and pins for building cables for connections J3 J4 and J6 is supplied with your 990 dCLD II Build the cables according to the tables included in Appendix B Customer Accessible Inputs and Outputs 1 6 Optional Front Control Panel The Model 990 dCLD II Optional Front Control Panel provides indication of the leak rate measurement and spectrometer pressure through bar graph displays and cont...

Страница 22: ...etectable Leak 2 x 10 9 atm cc sec Display 10 8 through 10 5 atm cc sec V70D Turbo Configuration Slow Speed Min Detectable Leak 2 x 10 9 atm cc sec Display 10 8 through 10 5 atm cc sec Fast Speed Min Detectable Leak 2 x 10 8 atm cc sec Display 10 7 through 10 4 atm cc sec V70LP Turbo Configuration Slow Speed Min Detectable Leak 2 x 10 8 atm cc sec Display 10 7 through 10 4 atm cc sec Fast Speed Mi...

Страница 23: ...e with UL3101 1 standard Heat Load 350 W Power Requirements Voltage Range 115 230 VAC 47 Hz to 63 Hz Maximum Current 3 A 1 5 A 350 Watts Fuse Rating 5 A 250 VAC slo blo Conformance Standards Meets applicable UL CSA and CE Standards Dimensions Control Unit 19 rack 5 25 high by 16 5 deep 48 26 cm rack 13 33 cm by 41 91 cm including mating connectors Turbo Spec Tube Assembly 19 wide by 9 high by 8 de...

Страница 24: ...r 3 V per decade logarithmic Note 3 V per decade logarithmic has limited use on the highest decade J4 BCD Leak Rate Output Emitter follower with 10 Ohm series resistor 14 mA max drive current 24 VDC max Note This output is valid only when the leak rate output pulse is low The leak rate is updated every 50 ms J6 Host Serial Port 9600 Baud No parity 8 Bits 1 Stop Bit interrupt driven RS 232 port for...

Страница 25: ...motors transformers and magnets Steel structures and steel objects should be should be kept at least 2 inches away from the closest edge of the spectrometer tube Failure to do so will result in damage to the magnet in the spectrometer tube During normal operation the spectrometer tube feels quite warm A continuously running fan at the end of the high vacuum pump directs cooling air toward the end ...

Страница 26: ...he highest sensitivity of the three pumps Has the slowest clean up time of the three pumps Fast 60 10 8 to 10 5 2 x 10 9 0 1 Provides faster clean up than V70 in Slow speed with slight loss in sensitivity Requires low foreline pressure V70D MacroTorr Turbomolecular Pump Slow 30 10 8 to 10 5 2 x 10 9 1 0 Provides higher foreline pressure than V70 in Fast speed Provides less sensitivity than the V70...

Страница 27: ... 2 5 Split flow dual mechanical pump See Figure 2 3 and Table 2 5 on page 2 6 Table 2 2 Configuration Comparison Configuration Advantages Limitations Single Mechanical Pump Higher sensitivity Lower cost Longer cycle time Backing pump doubles as rough pump Dual Mechanical Pump Higher sensitivity Faster pump down Shorter cycle time Separate pumps for rough and backing Higher cost Split Flow Dual Mec...

Страница 28: ...re at atmosphere The Test Valve keeps the turbo backed Pre Roughing Closed Closed Closed The Pre Roughing state allows time to ensure that all valves are closed before any open The time spent in the pre roughing state depends on valve actuation time Roughing Closed Opened Closed The Roughing state brings the fixture to vacuum The turbo is not being pumped The maximum time here is approximately 3 m...

Страница 29: ...The Vented state places the fixture at atmosphere The backing primary pump keeps the turbo backed Pre Roughing Closed Closed Closed The Pre Roughing state allows time to ensure that all valves are closed before any open The time spent in the pre roughing state depends on valve actuation time Roughing Closed Opened Closed The Roughing state brings the fixture to vacuum Test Closed Closed Opened The...

Страница 30: ...tuation time Vented Opened Closed Closed The Vented state places the fixture at atmosphere Pre Roughing Closed Closed Closed The Pre Roughing state allows time to ensure that all valves are closed before any open The time spent in the pre roughing state depends on valve actuation time Roughing Closed Opened Closed The Roughing state brings the fixture to vacuum Test Closed Opened Opened The Test V...

Страница 31: ...nformation contact Varian Customer Ser vice 1 800 8VARIAN Table 2 6 Recommended Mechanical Pumps Type Model Pump Recommended for Maximum Pumping Speed Remarks Varian Part Number Fore Rough Rotary Vane DS 102 l 100 L min 3 6 cfm Do not pair with a Rough Pump size DS 202 9499305 DS 202 l l 200 L min 7 0 cfm 9499320 DS 302 l l 300 L min 10 6 cfm 9499325 DS 402 l 400 L min 14 1 cfm 9499330 Dry Scroll ...

Страница 32: ...Port 2 4 1 Discrete I O J3 Inputs The discrete I O is used to control operations via a PLC Table 2 7 provides the input con nections For detailed information see Table B 1 on page B 1 For a cross reference of the function in other modes of operation see Table 2 11 on page 2 15 J3 Level inputs are opto isolated 5 to 24 VDC 3600 Ohm resistive load J3 Momentary inputs are opto isolated 5 to 24 VDC 36...

Страница 33: ...Leak Detector in Read STD LEAK mode 9 Full Internal Calibrate Momentary Performs a Full Calibration using the internal leak 10 DECREMENT Momentary Decrements the Exponent in Manual Ranging 11 INCREMENT Momentary Increments the Exponent in Manual Ranging 12 AUTO MANUAL Level Puts the system in Auto Ranging if active 23 Full External Cal Momentary Performs a Full Calibration with External Leak 24 Qu...

Страница 34: ...ections For detailed information see Table B 2 on page B 4 For a cross reference of the functions in other modes of operation see Table 2 11 on page 2 15 J3 Level outputs are opto isolated emitter followers with 10 Ohm series resistor 14 mA max drive current 24 VDC max Figure 2 5 shows the J3 output circuit sketch ...

Страница 35: ...Active when selected Ion Source Filament is non functional 18 CAL OK Level Active when last calibration ok It is set inactive at the start of a CALIBRATE routine and at power on 22 Calibrating Level Active when performing a CALIBRATE routine 26 REJECT 2 Level Active when Leak Rate is greater than set point 2 27 V Input N A Customer supplied 5 to 24 VDC for J3 28 V Input N A Customer supplied 5 to ...

Страница 36: ... For detailed information see Table B 2 on page B 4 J4 outputs are opto isolated emitter followers with 10 Ohm series resistor 14 mA max drive current 24 VDC max Note This output is valid only when the leak rate output pulse is low The leak rate is updated every 50 ms Figure 2 6 shows the J4 output circuit sketch ...

Страница 37: ... Level Mantissa BCD Leak Rate the twos place of the most significant digit 9 MSD C MAN Level Mantissa BCD Leak Rate the fours place of the most significant digit 10 MSD D MAN Level Mantissa BCD Leak Rate the eights place of the most significant digit 11 LSD A EXP Level Exponent BCD Leak Rate the ones place of the least significant digit 12 LSD B EXP Level Exponent BCD Leak Rate the twos place of t...

Страница 38: ...ound and are not isolated Electrical charac teristics comply with EIA TIA Standard EIA TIA 232 E Figure 2 7 J6 Circuit Sketch Table 2 10 J6 Summary Table J6 Pin EIA Name Description 2 Received Data Data Into the 990 dCLD II 3 Transmitted Data Data Out of the 990 dCLD II 5 Signal Common Ground 6 Clear To Send Handshaking Signal Out of the 990 dCLD II 7 Request To Send Handshaking Signal Into the 99...

Страница 39: ...O 0 are to be able to set it Active or Inactive and to inquire about its status Those two activities are grouped together and listed alpha betically within the group This table will prove useful as you learn to set up and run the 990 dCLD II Table 2 11 Commands for Operating Modes What you want to do Function Conn Pin RS 232 Command Optional Front Control Panel Menu and Parameter Turn control over...

Страница 40: ...4 6 1 Calibrated Leak Set Up set FAST or NORM Will a Normal or a Fast calibration be performed when asked Calibrate Mode inquiry 0 Normal 1 Fast QUICK CAL CR SET UP CAL LEAK screen Section 4 6 1 Calibrated Leak Set Up USE NORM CAL USE FAST CAL Perform a fast external calibration Calibrate Quick External J3 37 EXTERNAL CR then QUICK CAL CR if returns 1 then CALIBRATE CR else 1 INIT QUICK CAL CR the...

Страница 41: ...nal calibrated leak value Calibrated Leak External Set Value N A X XE XX INIT EXTLEAK CR SET UP CAL LEAK screen Section 4 6 1 Calibrated Leak Set Up set EXTERNAL LEAK VALUE What is the value of the external calibrated leak Calibrated Leak External Value inquiry EXTLEAK CR SET UP CAL LEAK screen Section 4 6 1 Calibrated Leak Set Up EXTERNAL LEAK VALUE Set the Internal calibrated leak value Calibrat...

Страница 42: ...ction 4 7 2 Manual Tuning FIL1ACTV FIL2ACTV What is the Filament Bias Voltage FIL Bias Volt Value inquiry FILAMENTBIAS CR N A Turn the operating filament off FIL OFF when active J3 35 0 INIT0FILAMENT CR N A What is the Fixed Focus Voltage FIXED FOCUS V Value inquiry FIXEDFOCUS CR N A Temporarily Set Gain Gain Set Temp X X PUT GAIN CR MANUAL CALIBRATION Section 4 7 1 Manual Calibration What is the ...

Страница 43: ...n Voltage in Non Volatile RAM ION V Store XXX INIT ION CR N A What is the Ion Voltage ION V Value inquiry IONCHAMBER CR MANUAL TUNING Section 4 5 System Information Screen ION V Obtain the present leak rate value Leak Rate Current Value inquiry J3 or J4 Outp uts LEAK CR HOME screen Section 4 4 Touch Panel Home Screen Bar graph display Read the last Standard Leak value input Leak Rate Standard Valu...

Страница 44: ...3 10 DECREMENT CR Set the MANUAL RANGE parameter and make sure it is ON in LEAK RATE RANGING SET UP Menu Section 4 6 4 Range Stop and Manual Range Set Up and Control Select Manual Ranging or Auto Ranging mode Range MANUAL if inactive AUTO if active Note Auto Ranging is factory default J3 12 MANUAL CR AUTO CR Set MANUAL RANGE to ON in LEAK RATE RANGING SET UP Menu Section 4 6 4 Range Stop and Manua...

Страница 45: ...leak Range Top Set N A XX INIT RANGE CR LEAK RATE RANGE SET UP Menu Section 4 6 4 Range Stop and Manual Range Set Up and Control Set the TOP RANGE What is the least sensitive decade that can be measured in this configuration Range Top Value inquiry RANGE CR LEAK RATE RANGE SET UP Menu Section 4 6 4 Range Stop and Manual Range Set Up and Control TOP RANGE Temporarily Set Repeller Voltage Repeller V...

Страница 46: ...ECT AUDIO SET POINTS SET UP screen Section 4 6 2 Reject and Audio Set Points What is the value of Reject Set Point 1 Set point Reject 1 Value inquiry 1REJECT CR SYSTEM INFORMATION screen Section 4 5 System Information Screen which reject set points are enabled Values are on REJECT AUDIO SET POINTS screen Section 4 6 2 Reject and Audio Set Points Enable Disable Reject 2 Set point Reject 2 Enable EN...

Страница 47: ...screen Section 4 6 2 Reject and Audio Set Points Enable Disable Reject 4 Set point Reject 4 Enable ENABLE 4REJECT CR DISABLE 4REJECT CR REJECT AUDIO SET POINTS screen Section 4 6 2 Reject and Audio Set Points Set the Value of Reject Set Point 4 Set point Reject 4 Set N A X XE XX INIT 4REJECT CR REJECT AUDIO SET POINTS screen Section 4 6 2 Reject and Audio Set Points What is the value of Reject Set...

Страница 48: ...en n a What is the Suppressor Voltage SUPPRESSOR V Value inquiry SUPPRESSOR CR N A What are the System and Test Port pressure values System Pressure Value inquiry PRESSURES CR SPEC TUBE PRESSURE display GAUGE CAL screen Section 4 7 3 Gauge Calibration Obtain the status of the 990 dCLD II System Status inquiry STATUS CR One line that reports in an ASCII string the status of the system as reported b...

Страница 49: ...OCUS CR MANUAL TUNING set VAR FOCUS Section 4 7 2 Manual Tuning Store the Variable Focus Voltage in Non Volatile RAM VAR FOCUS Store XXX INIT FOCUS CR N A What is the Variable Focus Voltage VAR FOCUS Value inquiry VARIABLEFOCUS CR MANUAL TUNING Section 4 7 2 Manual Tuning VAR FOCUS What is the installed software revision VERsion Inquiry VER CR VERsion screen Section 4 5 1 System Software Version Z...

Страница 50: ...Model 990 dCLD II Component Leak Detector This page intentionally left blank ...

Страница 51: ...hrough a fan Locate the control unit in a way that allows easy viewing of the front LEDs and easy access to the rear panel connections 3 1 2 Turbo Spec Tube Assembly The Turbo Spec Tube assembly can be mounted in any orientation The spectrometer tube must be isolated from strong magnetic fields such as motors transformers and magnets Steel structures and steel objects should also be kept at least ...

Страница 52: ...onnector and tighten it firmly 6 Verify that the proper mains voltage is set and connect the power cord to the power entry module To change the input voltage remove the fuse drawer and remove the gray fuse holder Rotate the fuse holder 180 so that the correct voltage appears in the fuse drawer window Replace the fuse drawer 7 Plug the power cord into an appropriate power source 3 1 4 Customer Cont...

Страница 53: ...Model 990 dCLD II Component Leak Detector 3 3 Figure 3 1 System Block Diagram CONTROL UNIT OPTIONAL FRONT CONTROL PANEL ...

Страница 54: ...l front control panel click into place via the quick connect discon nect latch arrangement To disconnect it give it a solid tug and it easily disconnects The optional front control panel can also be mounted remotely from the control unit see discussion in Section 2 1 Physical Considerations on page 2 1 Mount the optional front control unit in a rack and connect the Display I O cable to connector J...

Страница 55: ...to the PLC for operation 3 1 4 3 Host Computer Connection To use a computer for operations build the cable according to Table B 3 on page B 9 and connect to the host serial port J6 For greater security you must also make connection to J3 pin 6 to make PARALLEL ENABLE available Asserting PARALLEL ENABLE prevents operat ing parameters from being changed while it is active See Appendix A Communicatio...

Страница 56: ...iguration and turbo speed setting Note The underlined decade represents the variable set in TOP RANGE parameter The pumping speed of the backing pump and the conductance of the vacuum system also play an important role in the determination of system sensitivity A calibrated helium leak on the as configured system must be used to characterize the leak rate measurements The 990 dCLD II must be set u...

Страница 57: ... to Section 4 Setup and Monitor Operations via the Optional Front Control Panel This section explains each of the parameters and what happens during the related function related functions or parameters are grouped together There is also reference to the area in the document where you can find information on how to set the parameter or perform the function Remember Table 2 11 on page 2 15 cross ref...

Страница 58: ...argest exponent value See Table 3 1 on page 3 6 To set the TOP RANGE issue the INIT RANGE CR command or if the optional front control panel is installed set the parameter via the Leak Rate Ranging Set Up screen see Section 4 6 4 Range Stop and Manual Range Set Up and Control on page 4 15 AUTO RANGE MANUAL RANGE Auto Ranging causes the leak detector to detect leaks within the four decades starting ...

Страница 59: ...more than one decade less stringent than the sensitivity of the leak detection sys tem as it is configured If the configured system is capable of detecting 10 09 atm cc sec but the test specification is only in the 10 07 atm cc sec range then setting the RANGE STOP to 08 reduces the test cycle time by eliminating the need for the leak detector to reach its most sensitive decade 10 09 during each t...

Страница 60: ... mode To perform an automated calibration issue the CALIBRATE CR command or if the optional front control panel is installed press the CALIBRATE button CALIBRATED LEAK VALUE The 990 dCLD II is shipped from the factory with a calibrated leak Cal Leak as part of the turbo spec tube assembly Its value is noted on the tag attached to it and on the Cal Leak Certification During setup enter the value of...

Страница 61: ...FAST CALIBRATION During FAST calibration the leak detector compares the leak rate signal with the calibrated leak value and if the gain adjustment required to bring the system into calibration is within the allowable limits The full tuning operation is omitted The SPEC TUBE LED on the front of the control unit flashes while calibration is taking place the Discrete I O J3 22 is active and the respo...

Страница 62: ...ate is displayed NOTE Performing the ZERO function while introducing helium to the test object can result in the suppression of a real leak Only use the ZERO function after the helium source has been removed To perform a ZERO function assert J3 7 in the discrete I O issue the ZERO CR command or if the optional front control panel is installed press the ZERO button Section 4 1 Control Buttons on pa...

Страница 63: ... point issue the DISABLE AREJECT CR command or if the optional front control panel is installed disable AUDIO by setting the ON OFF button to OFF in the Reject and Audio Set Points screen Section 4 6 2 Reject and Audio Set Points on page 4 14 AUDIO SET POINT The AUDIO SET POINT control is used to activate the audio tone from the optional front control panel when the measured leak rate value exceed...

Страница 64: ...eak rate exponent value This mode offers exceptional resolution within a decade Set the display to LOG or LINEAR on the Output Control Set Up screen Section 4 6 5 Output Control Setup on page 4 16 LINEAR ANALOG OUTPUT 1 V DEC LOG OUTPUT ANALOG options allow you to configure the output voltage to the I O port J3 on the back of the control unit The options for output are LINEAR and 1 2 or 3 volts pe...

Страница 65: ...til the UNDER light is off Occasional flashing of the UNDER light indicates normal minor adjustments to small changes in background This does not impact the leak detec tor s ability to accurately locate and measure leaks To set AUTO ZERO 0 to active issue the 1 INIT AZ 0 CR com mand or if the optional front control panel is installed set the mode via the Zeroing screen Section 4 6 6 Zeroing on pag...

Страница 66: ...o STATUS CR contains RDY indicating that the 990 dCLD II is not ready If IDLE is enabled see IDLE MODE RUN MODE on page 3 10 the control unit is waiting for the RUN command to be issued If IDLE is disabled the unit is waiting for the pressure as read by the ConvecTorr gauge in the spectrometer to be less than 1 Torr The forepump in the system should be able to pump the spectrometer tube through th...

Страница 67: ...front control panel is installed the leak detector is ready for operation when the SYSTEM READY indication appears on the Home Screen the test mode is displayed in the line above SYSTEM READY and the LED lights above the TEST HOLD button which is inoperable on the 990 dCLD II For more information see Section 4 4 Touch Panel Home Screen If the 990 dCLD II is being started after a long period of bei...

Страница 68: ...r than 5 0 A board in the Platform is changed The ion source is changed 3 4 4 Running The 990 dCLD II senses the level of helium in the foreline of the high vacuum pump and converts the signal into a leak rate based upon the latest calibration and zero parameters in memory The leak rate is always available Through the host serial port J6 by entering the LEAK CR command By measuring the voltage at ...

Страница 69: ...Power the 990 dCLD II by turning on the main power switch on the rear panel Check that the POWER LED on the front panel of the control unit is lit after the power on lamp test is completed Make sure that either IDLE mode is disabled and or that the RUN input is active Start the backing pump s Check that the HIGH VAC LED lights after the turbo pump achieves the set speed Check that the SPEC TUBE LE...

Страница 70: ...ia the bar graph display the SPEC TUBE PRESSURE display and view the HOME and SYSTEM INFORMATION screens on the touch panel but again you cannot change parameter values The CALIBRATE READ STANDARD LEAK and ZERO buttons are not functional If you have set AUDIO to ON during setup it remains operational however you cannot change its set point value If you attempt to initiate an action from the option...

Страница 71: ...or each output option These graphs are in Section 3 7 1 Analog Leak Rate Output Voltage Conversion Charts on page 3 22 Section 3 7 2 Conversion of 2 V Dec Log to Leak Rate if 10X Function Not Available on page 3 24 contains an explanation of the recommended output and conversion formula if your PLC does not have a 10x function Table 3 2 Analog Leak Rate Voltage Outputs Output Option Set up Command...

Страница 72: ...t Voltage Leak Rate Mantissa Output Voltage 0 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 10 0 0 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 10 0 Output Voltage V Leak Rate Mantissa Atm cc Sec 1 V Decade Log Analog Output Voltage Leak Rate 10 Output Voltage 10 Top Range Variable 3 Output Voltage LOG Leak Rate X 10 Top Range Variable 3 1 00E 09 1 00E 08 1 00E 07 1 00E 06 1 00E 05 1 00E 04 1 00E 03 1 00E 02 1 0...

Страница 73: ... 00 1 00E 01 0 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 8 0 Output Voltage V Leak Rate Atm cc Sec 0 1 2 3 4 5 6 Top Range Variable 3 V Decade Log Analog Output Voltage Leak Rate 10 Output Voltage 3 10 Top Range Variable 3 Output Voltage 3 X LOG Leak Rate X 10 Top Range Variable 3 1 00E 09 1 00E 08 1 00E 07 1 00E 06 1 00E 05 1 00E 04 1 00E 03 1 00E 02 1 00E 01 1 00E 00 1 00E 01 0 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0...

Страница 74: ...integer part of the expression Vout is the analog leak rate output voltage RANGE variable is the RANGE number from the SETUP CR command or viewed through the touch screen panel menu is the absolute value of the expression inside the bars change the sign to if it is Mantissa 1 Y 1 Y 2 1 Y 3 1 Y 4 1 Y 5 1 Y 6 1 Y 7 Where Y 2 302259 Vout 2 INT Vout 2 INT is the integer part of the expression in paren...

Страница 75: ...990 dCLD II and displays information about the system while it is running Leak Rate Display The bar graph displays the leak rate in one of two forms A mantissa on the bar and a numerical exponent Just the bar as a logarithmic bar graph display The label at the right of the bar graph changes to indicate the cur rent mode of operation LOG or LIN When in LOG the values above the bar graph display the...

Страница 76: ...rs as well as service related functions NOTE These panel items are not operational 4 1 Control Buttons The ZERO button is functional only when the key switch is in the SET UP or SERVICE positions and when PARALLEL ENABLE is off Press the ZERO button to cause the 990 dCLD II to read the background leak rate signal store the reading in memory and then reset the zero reference point While zeroing is ...

Страница 77: ... Set Up screen Section 4 6 1 Calibrated Leak Set Up on page 4 13 The calibrate indicator LED lights while calibration is taking place and CALIBRATING is displayed on the HOME screen operating state line The Audio leak rate indication volume is controlled by the two buttons labeled HI and LOW and with up and down arrows Press the HI arrow button to increase the volume of the tone Press the LOW arro...

Страница 78: ...buttons for zeroing calibrating and reading internal leak are functional but the balance of the functions are the same as in RUN mode Key T009 operates the switch in RUN SET UP or SERVICE positions The T009 key is intended for service personnel and those who are very familiar with the operation of the unit and those who are responsible for setting up and verifying changes of the operating paramete...

Страница 79: ... To change any digit touch the box containing the parameter you want to change and then touch the NXT arrow to scroll to that digit and change it as indicated in step 2 NOTE Touching the ESC box before touching OK or BACK causes the selected parameter to revert to its previously stored value 4 2 3 Selecting Options in Touch Panel Screens Many parameters are set via toggle boxes that you touch to s...

Страница 80: ...NEAR ANALOG OUTPUT toggle 1V DEC 2V DEC 3V DEC LOG LINEAR BAR GRAPH DISPLAY toggle LOG BAR GRAPH DISPLAY AUTO ZERO 0 ACTIVE toggle INACTIVE BACK BACK MENUS SYS INFO See Figure 4 3 4 6 1 4 6 2 4 6 3 4 6 4 4 6 5 4 6 6 4 7 VER SYS INFO 4 5 4 5 1 HOME SCREEN 4 4 Main Menu Screen 4 6 SET UP CAL LEAK LEAK RATE RANGE SET UP REJECT AUDIO SET POINTS TO SERVICE MENU ZEROING SCREEN OUTPUT CONTROL SET UP UNIT...

Страница 81: ...ouch Panel Home Screen Digital Leak Rate Display Reject Status Indicator Operating States Leak Detector Status Condition States SYS INFO touch screen box MENUS touch screen box GAIN X X SPEC TUBE TC ZERO SPEC TUBE TC ATM REPELLER V XXX EMISSION I X XXX ION V XXX VARFOCUS XXX FACTORY PRE SET VALUES press to reset FIL 1 ACTV toggle FIL 2 ACTV BACK GAUGE CAL MANUAL CALIBRATE MANUAL TUNING 4 7 1 4 7 2...

Страница 82: ...s Indicator A REJECT status indicator displays below the Leak Detector Condi tion on the left hand center of the Home screen when any of the four independent set points are enabled and have been activated see Section 4 6 2 Reject and Audio Set Points If all set points are disabled or are not active then this indicator is not present Leak Detector Operating States This line displays the current ope...

Страница 83: ...being roughed before it is introduced to the system for calibration or verification ZEROING Indicates that the leak detector is in the process of Zeroing out a background signal The Zero routine is only initiated automatically during the start up and calibration routines or manually when the operator presses the ZERO button on the optional front control panel Table 4 2 990 dCLD II Leak Detector St...

Страница 84: ...C in the leak rate exponent indicating that a calibration routine is required GAIN TOO HIGH Indicates that the gain value required to calibrate the leak detector during the calibration routine is greater than the allowable value This is generally the result of the system sensitivity being too low GAIN TOO LOW Indicates that the gain value required to calibrate the leak detector during the calibrat...

Страница 85: ...CTIVE Audio Set Point is inactive CALIBRATED LEAK INT CAL LEAK System is set up to calibrate to the internal standard leak EXT CAL LEAK System is set up to calibrate to an external standard leak ION SOURCE FILAMENT FIL 1 OFF Filament 1 is selected and not lit FIL 1 ON Filament 1 is selected and lit FIL 2 OFF Filament 2 is selected and not lit FIL 2 ON Filament 2 is selected and lit REJECT SETPOINT...

Страница 86: ...plays the revision date and checksum of the main CPU and the optional front control panel CPU software Inquiry of the checksum information takes several seconds This screen automatically reverts to the System Information screen approximately 15 seconds after the revision data is displayed in full VERSION AAXX XX AAXX XX XXXXXX XXXXXX 1 800 882 7426 BACK SYSTEM INFORMATION FIL 2 ON TURBO SLOW REJEC...

Страница 87: ...anging Variables in Touch Panel Screens on page 4 5 Figure 4 9 Main Menu Selection Screen 4 6 1 Calibrated Leak Set Up Touch the SET UP CAL LEAK box to display the Calibrated Leak Set Up screen shown in Figure 4 10 It is used to set the values of the Internal and External Calibrated leaks to select whether to use an INTERNAL or EXTERNAL calibrated leak standard for calibration and to select NORMAL...

Страница 88: ...between NORMAL CALIBRATION and FAST CALIBRATION modes 4 6 2 Reject and Audio Set Points Touch the REJECT AUDIO SET POINTS box to display the Reject and Audio Set Points screen Figure 4 11 From this screen set the parameters to enable disable display and or change the value of the four reject set points and the audio set point using the procedure outlined in Changing Variables in Touch Panel Screen...

Страница 89: ...e Stop and Manual Range Set Up and Control Touch the LEAK RATE RANGE SET UP box to display the Leak Rate Ranging Set Up screen Figure 4 13 From this screen set up and enable the RANGE STOP and MANUAL RANGE functions set the TOP RANGE and control the TURBO speed For a discussion of how to determine these values see Section 3 3 1 Parameters and Operating Modes on page 3 7 Figure 4 13 Leak Rate Rangi...

Страница 90: ...GE Set the TOP RANGE to the least sensitive value the configured sys tem will evaluate See Table 3 1 on page 3 6 and TOP RANGE on page 3 8 for a discussion of how to determine this value 4 6 4 1 Leak Rate Range Selection through Turbo Speed Set Up The 990 dCLD II electronics allow for the display of only four full decades of sensitivity at one time The four decades displayed depend on the pump mod...

Страница 91: ...LINEAR ANALOG OUTPUT Touch the box to switch between LINEAR ANALOG OUTPUT or LOG output voltage selections which are 1V DEC LOG 2V DEC LOG and 3V DEC LOG Convert the voltage to the leak rate using the appropriate chart in Section 3 7 Analog Leak Rate Output Voltage on page 3 21 4 6 6 Zeroing Touch the ZEROING SCREEN box to display up the Zeroing screen shown in Figure 4 15 Figure 4 15 Zeroing Scre...

Страница 92: ...ice Menus are calculated when the 990 dCLD II performs functions such as CALIBRATE and ZERO Changing these values can cause unreliable test results 4 7 1 Manual Calibration Touch the MANUAL CALIBRATE box to display the Manual Calibration screen shown in Figure 4 17 Figure 4 17 Manual Calibration Screen You can use the Manual Calibration screen to view or change the calculated Gain Setting the gain...

Страница 93: ... is greater than 5 0 A board in the Platform is changed The ion source is changed Refer to Section 5 6 Manual Tuning on page 5 20 for detailed instructions on Manual Tun ing Touch the FACTORY PRE SET VALUES box to change the values to those set at the factory Note this change is effective immediately upon selection The Manual Tuning screen allows you to change the REPELLER V EMISSION I ION V VAR F...

Страница 94: ...e system running move to this screen and touch SPEC TUBE TC ZERO Verify that Passed appears to the right of TC ZERO 2 Power off the 990 dCLD II 3 Loosen the Turbo Vent screw and repower the system 4 Power on the 990 dCLD II 5 Move to this screen and touch SPEC TUBE TC ATM Verify that Passed appears to the right of TC ATM If Failed appears after either test the ConvecTorr gauge must be replaced BAC...

Страница 95: ...aintenance that may have to be performed on a daily or as required basis or if the item has not required maintenance on an annual preventive basis Customer Supplied Pumps Most pumps require regular maintenance Oil gets contaminated over time and has to be replaced In a system with dry pumps tip seals have to be checked for wear The cus tomer supplied roughing and forepumps of the system must be ma...

Страница 96: ...ol methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum Do not use grease or other substance on O rings that will come in contact with the spectrometer tube Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Apply a small amount of Apiezon L grease and wipe the O ...

Страница 97: ... on page 5 4 Recalibrate the internal calibrated leak X Section 5 2 Recalibrate the Internal Calibrated Leak on page 5 5 Spectrometer tube overhaul X Section 5 3 Spectrometer Tube Overhaul on page 5 5 Dual air intake filter replacement X Section 5 4 Dual Air Intake Filter Replacement on page 5 18 Table 5 2 As required Maintenance Function Most Common Symptom Refer to Spectrometer tube cleaning Los...

Страница 98: ...epeat step 1 If specification is still not met Manual Tuning may be required See Section 5 6 Manual Tuning on page 5 20 5 1 2 Sensitivity Check using the Diagnostic Serial Port J12 1 Send the inquiry STDLEAK CR 2 Compare the value returned in the response to the value of the known internal calibrated leak If necessary adjust the value for temperature 3 If the values do not match perform an automat...

Страница 99: ...82 7426 to arrange for re calibra tion 5 3 Spectrometer Tube Overhaul Spectrometer tube overhaul consists of removing cleaning and re installing the 990 dCLD II Spectrometer Tube Assembly There are four basic sub assemblies in the spec trometer tube Removal instructions follow in the order below Thermocouple Button TC Ion Source Preamplifier Magnetic Poles Table 5 3 lists the tools and parts requi...

Страница 100: ...d to the atmosphere NOTE Rebuilt spectrometer tubes are available from Varian on an exchange basis Contact Varian Customer Service at 1 800 8VARIAN 1 800 882 7426 for details 1 Loosen the hold down screw to remove the spec tube block connector from the spectrometer assembly Figure 5 1 Figure 5 1 Removing the Spec Tube Block Connector 2 Remove the turbo fan power connection and the turbo pump power...

Страница 101: ...mp 4 Lay the spectrometer tube down on a clean non magnetic surface CAUTION If the spectrometer tube magnet comes in contact with a magnetic surface the magnet may lose its gauss causing the spectrometer tube to lose sensitivity CAUTION Do not remove the 6 magnet body bracket screws shown in Figure 5 3 while performing maintenance on the spectrometer tube Figure 5 3 Magnet Body Bracket Screws ...

Страница 102: ... 4 Slotted Screws that Attach the Magnet Assembly to Spectrometer 6 Loosen the tuning magnets by using a hex wrench to back out the set screws located on both sides of the assembly Figure 5 5 Do not remove the set screws and tuning magnets completely Figure 5 5 Set Screws that Secure the Tuning Magnets 7 Carefully slide the magnet assembly off of the spectrometer tube body ...

Страница 103: ...Remove the 4 slotted screws that hold the button TC header Figure 5 6 Figure 5 6 Button TC Assembly 2 Remove the button TC header Figure 5 7 by pressing down on the button TC center post and lifting the header up and off of the button TC Figure 5 7 Removing the Button TC Header ...

Страница 104: ...e NOTE The ion source is typically replaced during the normal maintenance procedure A new and clean ion source provides optimum sensitivity and system performance See Ion Source Replacement Outside of Spectrometer Tube Overhaul on page 19 when replacing the ion source outside of annual maintenance WARNING When handling the Ion Source wear powder free butyl or polycarbonate gloves If you handle the...

Страница 105: ... the ion source cavity indicate that the spectrometer tube has been operated at too high a pressure This can occur from a system pressure leak or transferring into test at too high a pressure 3 To remove the header from the ion source push down on the center post 4 Examine the ion source Figure 5 10 and cavity Figure 5 11 for deposits and discoloration When examination is completed dispose of it p...

Страница 106: ...Figure 5 11 Ion Source Cavity 5 Remove the ground slit plate Figure 5 12 by placing a thin slotted screwdriver snug into the slot and carefully twisting and prying with the screwdriver Figure 5 12 Ground Slit Plate NOTE A locking screwdriver designed to grab onto the slot of a screw works well for this procedure ...

Страница 107: ...ece repeating steps 1 and 2 in Removing the Ion Source 2 Carefully remove the preamplifier from the spectrometer tube body Figure 5 13 and place it carefully on a clean safe non magnetic surface Figure 5 13 Removing the Preamplifier 5 3 5 Removing the Magnetic Poles 1 Remove the 4 slotted screws to free the magnet pole piece Figure 5 14 Figure 5 14 Magnetic Pole Piece 2 Pick up the spectrometer tu...

Страница 108: ...ole piece on a clean surface Figure 5 15 Figure 5 15 Removing the O ring from Magnetic Pole Piece 4 Repeat steps 1 through 3 to remove the second magnetic pole piece Figure 5 16 from the other side of the spectrometer tube body Figure 5 16 Removing the Second Magnetic Pole Piece 5 Remove the O ring from the magnetic pole piece as in step 3 ...

Страница 109: ...e the spectrometer tube cavity 2 Using the Scotch Brite pad polish away any discolored areas of the ground slit plate Figure 5 17 Figure 5 17 Discolored Ground Slit Plate CAUTION The ground slit plate is very thin Take care not to bend or disfigure it during cleaning 3 Using the Scotch Brite pad polish away any discolored areas of the magnetic pole pieces Figure 5 18 Figure 5 18 Discolored Ground ...

Страница 110: ...oak it in liquid VacuSolv or Acetone followed by an isopropyl alcohol rinse Dry the button TC thoroughly before re assembling into spectrometer tube NOTE If you were seeing false system pressure readings prior to overhaul it may be best to replace the Button TC whether or not you detect any physical signs of damage 5 Carefully wipe down and inspect all O rings before reusing Replace all damaged O ...

Страница 111: ... with the alignment pin in the preamplifier cavity of the spectrometer tube body CAUTION The ground slit plate has a hole in it that must be aligned with the hole on the bottom of the spectrometer tube body ion source cavity The ion source must be aligned so that its alignment pin falls in the center of this hole A short could result at power up if the alignment pin touches the sides of the alignm...

Страница 112: ...he dual air intake filters 1 Grasp the fan filter guard at the clips on the sides or top and bottom and pinch together lightly Figure 5 22 Control Unit Front Panel 2 Pull the fan filter guard off toward you 3 Remove the filter element and discard it 4 Place a new filter element into the housing 5 Snap the fan filter guard back into place on the front of the control unit 6 Repeat the procedure for ...

Страница 113: ...mp and tipping the spectrometer tube away from the high vacuum system manifold 5 Remove the 4 slotted screws that secure the ion source header Figure 5 6 on page 5 9 6 Remove the ion source header by pressing down on the center post and lifting the header up and off of the ion source 7 Gently slide the ion source out of the spectrometer tube body Figure 5 9 on page 5 11 NOTE Dark carbon like depos...

Страница 114: ...n page 3 7 Note that the actual value of the calibrated leak is not important for the first part of this exercise only that a maximum value is achieved NOTE Attempting to change calibration requirements when PARALLEL ENABLE is active will either result in the change being rejected and a response of cant being received through the serial port or if the optional front control panel is installed the ...

Страница 115: ...n Table 5 5 Table 5 4 Example Setting REPELLER Parameter Value using J12 Diagnostic Port Observed Leak Rate Type 1 0E 6 LEAK CR 320 PUT REPELLER CR 1 2E 6 LEAK CR 330 PUT REPELLER CR 1 3E 6 LEAK CR 340 PUT REPELLER CR 9 6E 7 LEAK CR 330 PUT REPELLER CR 1 3E 6 LEAK CR 330 INIT REPELLER CR 1 3E 6 LEAK CR Done Table 5 5 Example Setting EMISSION Parameter Value using J12 Diagnostic Port Observed Leak ...

Страница 116: ...stem using the LEAK CR command 13 Isolate the calibrated leak and using LEAK CR observe that the leak rate decreases to near zero 14 If the time for the leak rate decay is more than a few seconds there could be a vacuum leak or the vacuum system might not be fully stabilized It might be necessary to invoke the ZERO function step 9 again to re zero the 990 dCLD II 5 6 2 Manual Tuning via the Option...

Страница 117: ...301 Fan 661300030 Front Panel Fan Filter Comair Rotron 554140 Front Panel Fan Filter Guard 642970942 Fuse 5 0 A 645300044 Fuse Drawer 642971010 Ion Source 82850302 Main Power Supply 659077039 PCB 979 I O R1431301 PCB CPU R2361302 PCB Digital Interface L9536301 PCB Gauges R0395301 PCB Ion Source Controller R2400301 PCB Power Indicator L9605301 PCB Power Supply L9255301 PCB Preamplifier Driver L9524...

Страница 118: ...bo Controller PCB and Transformer 9699840LL Turbo Spectube Cable Assembly 5 ft R0623305 Turbo Spectube Cable Assembly 10 ft R0623310 V70 Turbo Pump Exchange Program Call Varian V70D Turbo Pump Exchange Program Call Varian V70LP Turbo Pump Exchange Program Call Varian Wiring Harness Turbo Spectube R1127301 Table 5 6 Spare Parts List Continued Assembly Part Number ...

Страница 119: ...rometer tube are properly installed All connections between the 990 dCLD II control unit and the testing station are properly installed The POWER LED is on or if the optional front control panel is installed the LED above the HOLD VENT button is lit All controls for calibration and set points are set to the proper values Consult your maintenance log and setup processes for this information For pro...

Страница 120: ...m response Section 6 2 4 No Helium Response on page 6 5 The following events can take place during normal operation Station fails to pump down displaying gross vacuum failures High number of rejects suspected of being false alarms 6 2 1 POWER LED does not Light To check the POWER LED 1 Verify that the power cord is connected 2 Verify that power is available at the receptacle into which the 990 dCL...

Страница 121: ...n the control unit off for a period of at least 10 seconds c Turn the control unit back on If the turbo still does not start 2 Check for a disconnected or damaged turbo pump cable 3 Check for a disconnected or damaged main spec tube block connector cable 4 Was a new pump installed Allow up to 45 minutes for a newly installed pump to reach full speed the HIGH VAC LED is lit 5 If the LED fails to li...

Страница 122: ...light or stay lit call Varian Customer Service at 1 800 8VARIAN 1 800 882 7426 6 2 3 2 Check the Control Unit SPEC TUBE LED Using Optional Front Control Panel Interface To check the SPEC TUBE LED 1 Verify that the system thermocouple pressure is less than 10 mTorr by viewing the system pressure parameter in the GAUGE CAL screen see Section 4 7 3 Gauge Calibration on page 4 20 2 Switch to the other...

Страница 123: ...issue the ZERO command to ZERO the 990 dCLD II 8 Enter 250 PUT ION CR 380 PUT REPELLER 200 PUT FOCUS 400 PUT EMISSION then ALL CR The typical voltage readings should be as follows 9 If all voltages are more than 20 percent lower than the values above or if any two voltages are equal disconnect the spec tube block connector and check the ion source for shorts using an ohm meter If the Ion Source is...

Страница 124: ...ck the helium response 1 Use the LEAK RATE RANGE SET UP screen Section 4 6 4 Range Stop and Manual Range Set Up and Control on page 4 15 to ensure that MANUAL RANGE is not ON If necessary turn it OFF 2 Check that the leak to be read is installed in the system with the valve open 3 Is the calibrated leak broken Has the calibrated leak been dropped If it rattles when shaken it is broken and must be ...

Страница 125: ...n Source is defective Change to the other filament using the MANUAL TUNING screen refer to Section 4 7 2 Manual Tuning on page 4 19 or replace the ion source see Section 5 5 Ion Source Replacement Outside of Spectrometer Tube Overhaul on page 5 19 11 Has the spectrometer tube been serviced lately If so refer to Section 5 3 Spectrometer Tube Overhaul to verify that a The ground slit plate has been ...

Страница 126: ... also often real leaks in the product Before tearing down the test station take steps to ensure that the problem is not a production problem The first step in this process is to use a challenge leak This is a standard leak shaped like the production part that can be inserted into the produc tion line to function like a bad part If the station reads the leak within its stated tolerances and within ...

Страница 127: ...your reject set point is at 3E 5 this high background would lead to false rejection of parts if the process was not designed to tolerate the background If you are experiencing false helium rejections look to the helium background as a possible cause While there are methods for tolerating such high levels of helium such as prolonged pump down cycles it is probably more economical to ventilate the a...

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Страница 129: ... device to set the current state or value of a volatile leak detector parameter Words that begin with INIT are commands for the controlling device to set non volatile leak detector parameters Other commands do not require a parameter do not begin with any special character s and simply do what they say they do Successful inquiries respond with data as specified in the following tables followed by ...

Страница 130: ...meters All inquiries except ver begin with and end with CR Table A 1 Internal Operating Parameters Inquiry Response ALL Nine lines that report a summary of all ion source parameters Each begins with a CR LF The format is as follows FILAMENTBIAS 122 1 IONCHAMBER 269 1 VARIABLEFOCUS 235 4 REPELLER 402 2 FIXEDFOCUS 212 7 SUPPRESSOR 145 0 EMISSIONCURRENT 1 040 OFFSET 59 GAIN 1 5 AZ 0 The response is y...

Страница 131: ...ollowed by a two digit leak rate range exponent e g 7 0E 05 This inquiry reports the value of the requested set point where n is the reject set point 1 through 4 OFFSET A number representing the position of the variable offset as a percent of full scale 50 represents mid scale PRESSURES The response begins with a CR LF The first line consists of the words test port TC followed by a number of mTorr...

Страница 132: ...o the zeroing function CAL refers to the calibration function STDLEAK A seven character number consisting of a two digit calibration standard leak rate mantissa with a decimal point after the first digit followed by E then a two digit calibration standard leak rate range exponent e g 1 3E 07 This inquiry is used for reporting the internal calibration standard leak rate most recently input using IN...

Страница 133: ...ecade See Section 4 6 5 Output Control Setup or Section 3 7 Analog Leak Rate Output Voltage or Table 2 11 on page 2 15 INIT AREJECT A two digit leak rate mantissa with a decimal point after the first digit followed by E followed by a two digit leak rate range exponent the helium leak rate number in atm cc sec Values outside the working range of the leak detector are not stored Use to set the value...

Страница 134: ...gh 4 INIT QUICK CAL Preceded by a 1 or a 0 followed by a space to set the calibration mode to FAST or NORMAL respectively INIT RANGE A three character minus followed by two digits number indicating the exponent of the least sensitive range of detectable leak Acceptable values are 00 through 09 Unacceptable values are not stored INIT RANGESTOP A three character minus followed by two digits number i...

Страница 135: ...o 250 which sets the variable focus voltage of the ion source PUT GAIN Preceded by a two digit number followed by a space with a decimal point after the first digit in the range 1 0 to 9 0 used for adjusting the helium signal to match a calibration standard leak PUT ION Preceded by a three digit number of volts followed by a space in the range 150 to 350 which sets the ion voltage of the ion sourc...

Страница 136: ...ng parameters ENABLE IDLE must be set first INCREMENT Add 1 to the displayed leak rate exponent making it less negative Success is indicated by the ok CR LF response Has no effect if in auto ranging mode Has no effect upon reaching the least sensitive range With PARALLEL ENABLE the response is cant INTERNAL Causes the control unit to use the internal calibrated leak MANUAL Terminates the Auto Rang...

Страница 137: ...n N A Return for J3 inputs with J25 J3 5 RUN IDLE Level Turns ON Spec Tube and Turbo Activation causes the 990 dCLD II to change from idle to run mode RUN mode is normal operation IDLE mode is a state in which the 990 dCLD II is powered but the turbo and spec tube are off This input has no effect on the 990 dCLD II and the 990 dCLD II assumes a running state when the PARALLEL ENABLE input J3 6 is ...

Страница 138: ... Auto Ranging if active Activation causes the 990 dCLD II to change from MANUAL ranging to Auto Ranging This input has no effect on the 990 dCLD II and the 990 dCLD II assumes a manual or auto ranging state based on the last selection made from the front panel when the PARALLEL ENABLE input J3 6 is not powered J3 23 Full External Cal Momentary min 0 2 s Perform a Full Calibration with External Lea...

Страница 139: ...he 990 dCLD II and the 990 dCLD II keeps the filament on assuming favorable conditions in the spec tube J3 37 Quick External Cal Momentary min 0 2 s Perform a Quick Calibration with External Leak Activation causes the 990 dCLD II to perform a fast calibration using the external calibrated leak The calibration does not include zeroing Table B 1 Customer Accessible Inputs Continued Conn Pin Input Na...

Страница 140: ...value of the leak rate exceeds the value set in the 1REJECT variable Inactive when the leak rate falls below the value set in the 1REJECT variable J3 14 Ready Level Active When Fil and Turbo ok Active when the 990 dCLD II has successfully completed starting This includes the turbo pump achieving speed the spec tube pressure being low enough to support the ion source filament and the ion source emi...

Страница 141: ...ate is over set point 2 Active when the value of the leak rate exceeds the value set in the 2REJECT variable Inactive when the leak rate falls below the value set in the 2REJECT variable J3 27 V Input N A Customer supplied 5 to 24 VDC for J3 J3 28 V Input N A Customer supplied 5 to 24 VDC for J3 J3 29 REJECT 3 Level Active when Leak Rate is over set point 3 Active when the value of the leak rate e...

Страница 142: ...eak Rate Active when the BCD representation of the leak rate has a 1 in the ones place in the least significant digit of the mantissa J4 4 LSD B MAN Level Mantissa BCD Leak Rate Active when the BCD representation of the leak rate has a 1 in the twos place in the least significant digit of the mantissa J4 5 LSD C MAN Level Mantissa BCD Leak Rate Active when the BCD representation of the leak rate h...

Страница 143: ...ones place in the least significant digit of the exponent J4 12 LSD B EXP Level Exponent BCD Leak Rate Active when the BCD representation of the leak rate has a 1 in the twos place in the least significant digit of the exponent J4 13 LSD C EXP Level Exponent BCD Leak Rate Active when the BCD representation of the leak rate has a 1 in the fours place in the least significant digit of the exponent J...

Страница 144: ...r B 8 J4 20 V Input N A Customer supplied 5 to 2 VDC for J4 J4 21 V Input N A Customer supplied 5 to 2 VDC for J4 Table B 2 Customer Accessible Outputs Continued Conn Pin Output Name Momentary or Level Contact 5 to 24 VDC Description Behavior ...

Страница 145: ...ection J6 connections are referenced to the chassis ground and are not isolated Electrical charac teristics comply with EIA TIA Standard EIA TIA 232 E Table B 3 J6 Summary Table J6 Pin EIA Name Description 2 Received Data Data Into the 990 dCLD II 3 Transmitted Data Data Out of the 990 dCLD II 5 Signal Common Ground 6 Clear To Send Handshaking Signal Out of the 990 dCLD II 7 Request To Send Handsh...

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Страница 147: ... Classes of Leak Detection There are four general classes of leak detection Hermetic Enclosures or parts thereof These are tested to prevent entrance of contaminants or loss of fluid that would affect performance of the enclosed unit Examples elec tronic devices integrated circuits sealed relays motors ring pull tab can ends and multipin feedthroughs Hermetic Systems These are tested to prevent lo...

Страница 148: ... be expressed in torr liters second Conversions 1 std cc sec 0 76 torr liter sec 1 torr liter sec 1 3 std cc sec 1 std cc sec 9 7 x 104 micron cubic feet per hour or practically 105 micron CFH µCFH 1 µCFH practically 10 5 std cc sec for practical purposes equal Numerical Notation Exponential System Most leak rates of commercial significance are very small fractions of a std cc sec Therefore minus ...

Страница 149: ...c This method tests for ultrasonic sounds coming from a gas leak and is used for testing of high pressure lines Halogen sensitive to halogen elements or compounds especially refrigerant gases This method is good to approximately 10 5 std cc sec in most cur rent applications but extendable to 10 9 std cc sec under some limited situations It is critically dependent on operator judgement if leaks are...

Страница 150: ...ng current is amplified and a leak rate bar graph indicates the presence and amount of helium C 5 2 Application as a Leak Detector A mass spectrometer leak detector consists of a spectrometer tube the electronics to operate and interpret it and a high vacuum system to maintain proper vacuum In addition means are provided for connecting a test object and a rough vacuum pump and a system of rough in...

Страница 151: ...uare centimeter of surface area Variation in Leak Sizes Leaks unintentionally built in at joints during manufacture can vary from hour to hour and day to day Breathing on a 10 6 std cc sec leak provides enough moisture to close it temporarily perhaps for several days Atmospheric particles can close a leak of this size Never depend on an accidentally made leak to remain constant Manufacturing stand...

Страница 152: ... surface of the test object is then probed with a small jet of helium to locate individual leaks or surrounded by helium hooded for an overall leak check Figure C 1a Test Piece Evacuated Tracer Probe Used to Locate Leak Figure C 1b Test Piece Evacuated and Hooded with Helium Atmosphere to Determine Overall Leak Rate C 6 2 Test Piece Pressurized Figure C 2 Figure C 2 Test Piece Pressurized Detector...

Страница 153: ... Gases Bell Jar Used to Determine Overall Leak Rate Sometimes it is necessary to leak check a completely sealed object This is done by placing helium inside the object before sealing either 100 or mixed with other gas used for back filling The object is then placed in a vacuum chamber connected to the leak detector Helium escaping from the object into the vacuum chamber is detected by the spectrom...

Страница 154: ...he collector which neu tralizes the current produced by the collection of helium ions The feedback current is pre sented on the leak rate bar graph Since this current is directly proportional to the number of helium ions striking the collector per unit time the panel leak rate bar graph directly reflects the concentration of helium in the vacuum system at any time Any helium entering the sys tem c...

Страница 155: ... variables 4 5 Circuit sketch J3 Discrete I O input 2 9 J4 BCD output 2 13 J6 host serial port 2 14 Cleaning Spectrometer 5 15 Spectrometer tube assembly 5 5 Commands 2 15 Communications Protocol A 1 Communications protocol A 1 Condition states messages 4 10 Configuration 3 6 Dual pump 2 5 Single pump 2 4 Split flow dual pump 2 6 Configurations 2 2 Connections 3 2 Control unit front panel 1 2 Cont...

Страница 156: ...valve block Control unit rear panel 1 3 J12 diagnostic port Control unit rear panel 1 3 J2 valve logic Control unit rear panel 1 3 J3 Discrete I O 2 9 2 10 Input circuit sketch 2 9 J4 BCD Output circuit sketch 2 13 J4 BCD output Control unit rear panel 1 3 J5 display I O Control unit rear panel 1 3 J6 host serial port 2 14 Circuit sketch 2 14 Connections 2 14 Control unit rear panel 1 3 J6 Summary...

Страница 157: ... Reject status indicator 4 8 Selecting options 4 5 Spec Tube pressure display 4 1 SYS INFO screen 4 9 4 11 System ready indicator 4 2 Zero button 4 1 Output J3 Discrete I O 2 10 J4 BCD 2 11 J4 BCD circuit sketch 2 13 Output Control Set Up screen 4 16 P PARALLEL ENABLE 3 5 3 20 3 24 and Optional front control panel operation 1 5 Parameter Audio reject set points 3 13 Audio reject set points enable ...

Страница 158: ...ice Menus 4 18 Set up via Optional front control panel 4 1 Setup 3 1 Single pump configuration 2 4 Valve sequence 2 4 Software version 4 12 Spare parts 5 23 SPEC TUBE LED 1 2 SPEC TUBE LED does not light or stay lit 6 4 Specifications 1 6 Spectrometer 5 15 Spectrometer Assembly 1 4 Spectrometer Operating Parameters A 7 Spectrometer reassembly 5 17 Spectrometer tube assembly Removing cleaning and r...

Страница 159: ... units set up screen 4 15 Unpacking 1 1 Using the Optional Front Control Panel Interface 6 6 V Vacuum flow C 4 Valve sequence Dual pump 2 5 Single pump 2 4 Split flow 2 6 Version 4 12 Voltage Input changing 3 2 Z ZERO 4 2 Control button 4 1 4 2 Function 4 2 Zero button 4 1 Zeroing screen 4 17 ...

Страница 160: ...Model 990 dCLD II Component Leak Detector This page intentionally left blank ...

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Страница 162: ... gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordination through Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 252 Fax 39 011 997 9 316 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei...

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