TECHNICAL INFORMATION
TECHNICAL SPECIFICATION
Pumping speed (l/s)
With CF 4.5” or
ISO 63:
N
2
: 68 l/s
He: 60 l/s
H
2
: 45 l/s
With CF 2.75” or
KF 40 NW:
N
2
: 45 l/s
He: 50 l/s
H
2
: 41 l/s
Compression ratio
N
2
: 5 x 10
7
He: 4 x 10
3
H
2
: 4 x 10
2
Base pressure*
1 x 10
-9
mbar (8 x 10
-10
Torr)
Inlet flange
CF 4.5" O.D.
ISO63
CF 2.75" O.D.
KF 40 NW
Foreline flange
KF 16 NW
Rotational speed
75000 RPM
Start-up time
< 60 seconds
Recommended fore-
pump
mechanical: Varian SD-40
2 m
3
/h (1.2 CFM)
Operating position
any
Cooling
requirements
Natural air convection
Forced air or water optional
Operating ambient
temperature
+ 5° C to + 35° C
Coolant water
flow: 10 l/h (0.05 GPM)
temperature: + 10° C to + 30° C
pressure: 2 to 4 bar (30 to 60 Psi)
Bakeout
temperature
120° C at inlet flange max. (CF
flange)
80° C at inlet flange max. (ISO
flange)
Vibration level
(displacement)
<
0.01
µ
m at inlet flange
Noise level
45 dB (A) at 1 meter
Input
54 Vac, three phase, 1250 Hz
Lubricant permanent
lubrication
Installation category
II
Pollution degree
2
Storage temperature
- 20° C to + 70° C
Weight kg (lbs)
ISO: 1.6 (6)
CFF: 2.3 (4)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
26
87-900-860-01(E)