Varian 969-9357 Series Скачать руководство пользователя страница 27

ODHGIES CRHSHS 

 22 

87-900-860-01(E)

 

 

 

 
Oi tourmpomoriak

j antl

ej thj seir£j

 Turbo-V70 

pr

pei na 

crhsimopoioÚ ntai mÒ no me 

nan apÒ  touj eidikoÚ j el

gcouj

 

Varian

 (seir£ 

969-9405, 969-9505, 969-9507 

h

 969-9508

) kai pr

pei 

na e

nai sundedem

nej me m

a prwteÚ ousa antl

a (bl

pe sc

ÿ

ma 

stij 

"

Tecnik

j Plhrofor

ej

"

). 

H tourmpoantla mpore na topoqethqe se opoiad

ÿ

pote qsh. 

Stereèste thn tourmpoantl

a se staqer

ÿ

  q

sh enènontaj th 

fl£ntza eisÒ dou me m

a staqer

ÿ

 kÒ ntrofl£ntza  ikan

ÿ

 na 

sugkrat

ÿ

sei 

na zeug£ri 

200 Nm

 gÚ rw apÒ  ton £xon£ thj, 

ÿ

 

crhsimopoiÒ ntaj to kat£llhlo scetikÒ   kit gia na 
staqeropoi

ÿ

sete th b£sh.. 

H tourmpoantl

a me fl£ntza eisÒ dou 

ISO

 pr

pei na sterewqe

 sto 

q£lamo kenoÚ  m

sw diplèn 

ÿ

 monèn m

ggenwn. H akÒ louqh 

tamp

la perigr£fei to apara

thto noÚ mero m

ggenwn kai me poio 

zeÚ goj bidèmatoj na ta sf

xete. 

 

FLANTZA TUPOS 

MEGGENHS 

N. 

ZEUGOS 

BIDWMATOS 

ISO 63

 

Dipl

ÿ

 

m

ggenh me 

el

kwsh M10 

22 Nm

 

 Mon

ÿ

 

m

ggenh me 

el

kwsh M8 

11 Nm

 

 

H tourmpoantl

a me fl£ntza eisÒ dou 

ConFlat

 pr

pei na sterewqe

 

sto q£lamo kenoÚ  m

sw twn kat£llhlwn mhcanikèn exarthm£twn 

Varian.

 Gia perissÒ terej leptom

reiej bl

pe thn epifull

da 

"

Tecnik

j Plhrofor

ej

"

Gia na stereèsete thn antl

a m

sw  thÇ   b£shÇ   thÇ   e

nai 

apara

thto na crhsimopoi

ÿ

sete treiÇ  b

deÇ  M4 stereènete stiÇ  

eidik

Ç   op

Ç  pou up£rcoun sth b£sh thÇ  antl

aÇ . Oi 

crhsimopoioÚ meneÇ  b

deÇ  pr

pei na 

coun antoc

ÿ

 500 N/mm

2

, kai 

pr

pei na sterewqoÚ n me 

na zeug£ri 

0,9 Nm

Gia thn egkat£stash twn proeraitikèn axesou£r, bl

pe 

"

Tecnik

Plhrofor

ej

".

 

CRHSH 

Olej oi odhg

ej gia th swst

ÿ

 leitourg

a thj tourmpoantl

aj 

peri

contai sto egceir

dio el

gcou. 

Diab£ste prosektik£ autÒ  to egceir

dio prin apÒ  th cr

ÿ

sh. 

Gia na epitÚ cete kalÚ terej oriak

j pi

seij mpore

te na qerm£nete 

to per

blhma thj antl

aj crhsimopoièntaj ton 

xtra qermant

ÿ

Kat£ th di£rkeia thj endecÒ menhj q

rmanshj tou qal£mou kenoÚ  

h qermokras

a sth fl£ntza eisÒ dou den pr

pei na xepern£ei touj 

120°C

. Kat£ th q

rmansh na crhsimopoie

te p£nta ugr

ÿ

 yÚ xh. 

 

!

 

KINDUNOS

!

 

Mhn agg

zete thn tourmpoantl

a kai ta di£fora exart

ÿ

mat£ thj 

kat£ tij ergas

ej q

rmanshj. H uyhl

ÿ

 qermokras

a mpore

 na 

prokal

sei proswpik

j bl£bej. 

 

!

 

PROSOCH

!

 

Gia na dioceteÚ sete me a

ra thn antl

a crhsimopoie

ste a

ra 

ÿ

 

adran

j a

rio kaqarÒ  apÒ  skÒ nh 

ÿ

 £lla stoice

a. H p

esh 

eisÒ dou diam

sou thj eidik

ÿ

j pÒ rtaj, pr

pei na e

nai mikrÒ terh 

apÒ  

2 bar

 

!

 

PROSOCH

!

 

Apofuvgete sugkrouvseiÇ , olisqhvseiÇ  hv apovtomeÇ  
metakinhvseiÇ  thÇ  antlivaÇ  touvrmpo ovtan brivsketai se 
leitourgiva. Qa mporouvsan na pavqoun zhmievÇ  ta kouzinevta.

 

!

 

PROSOCH

!

 

 
Gia thn £ntlhsh polemikèn aerwn crhsimopoi

ÿ

ste mÒ no tij 

ekdÒ seij thj antlaj 

Turbo - V70

 Autj oi antlej enai efodiasmnej 

me mia eidik

ÿ

 qurda msw thj opoaj enai anagkaa h diocteush 

adranoÚ j aerou pou na kumanetai metaxÚ   0.4 kai 1mbarl./d.  

 

SUNTHRHSH 

Oi antl

ej thj kathgor

aj 

Turbo - V70

 de crei£zontai kamm

sunt

ÿ

rhsh. Opoiad

ÿ

pote ep

mbash pr

pei na g

netai apÒ  

eidikeum

no proswpikÒ . 

 

!

 

KINDUNOS

!

 

Prin epiceir

ÿ

sete opoiad

ÿ

pote ep

mbash sthn tourmpoantl

a, 

aposund

ste to kalèdio trofodos

aj, k£nte exa

rwsh sthn antl

ano

gontaj thn eidik

ÿ

 balb

da kai perim

nete m

cri na stamat

ÿ

sei 

tele

wj to mot

r. 

 
Se per

ptwsh bl£bhj mpore

te na apeuqunqe

te sto 

service

 thj

 

Varian

 

ÿ

 sto

 “Varian advanced exchange service”

, pou saj d

nei th 

dunatÒ thta na antikatast

ÿ

sete thn calasm

nh antl

a me m

£llh eniscum

nh.  

 

SHMEIWSH 

Prin epistr

yete ston kataskeuast

ÿ

 thn antl

a gia episkeu

ÿ

 

ÿ

 

gia 

advanced exchange service

,

  enai apara

thto na sumplhrèsete 

kai na parousi£sete sto topikÒ  Grafe

o Pwl

ÿ

sewn, to 

ntupo -

Sigouri£ kai uge

a-  sunhmm

no sto parÒ n egceir

dio odhgièn. 

Ant

grafo tou 

diou entÚ pou pr

pei na up£rcei m

sa sth 

suskeuas

a thj antl

aj prin apÒ  thn apostol

ÿ

 
Otan pl

on paÚ sei na leitourge

 h antl

a qa pr

pei na 

katastrafe

 sÚ mfwna me touj eidikoÚ j eqnikoÚ j kanonismoÚ j. 

!

 

KINDUNOS

!

 

 
Gia na apofÚ gcqoÚ n traumatismo

 se £toma mh b£zete pot

gia kan

na lÒ go, ta d£ctula 

ÿ

 £lla antike

mena sto stÒ mio 

eisÒ dou thj tourmpoantl

aj. SumbouleÚ etai h cr

ÿ

sh tou 

dictuoÚ  prostas

aj (proeraitikÒ ). An crhsimopoie

tai 

naj 

aposbest

ÿ

raj don

ÿ

sewn 

ÿ

 

na elastikÒ  metallikÒ  mikrÒ  

fuserÒ  sto stÒ mio eisÒ dou, stereènete p£nta thn 
tourmpoantl

a sth b£sh. 

OCI

 

Содержание 969-9357 Series

Страница 1: ...9360 series MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SI...

Страница 2: ...Turbo V 70...

Страница 3: ......

Страница 4: ......

Страница 5: ...DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 BASE FIXING KIT INSTALLATION 31 AIR COOLING KIT I...

Страница 6: ...omolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione ATTENZIONE Se per q...

Страница 7: ...as inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa...

Страница 8: ...den Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlage rung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feucht...

Страница 9: ...chette Optional ausgeheizt werden Damit die Flanschgrenztemperatur der Turbopumpe 120 C nicht berschreitet sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserk hlung arbeiten GEFAHR eventue...

Страница 10: ...le stockage des pompes doi vent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes...

Страница 11: ...er de toucher la turbopompe ainsi que ses accessoires ven tuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulement de l air de...

Страница 12: ...ales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcion...

Страница 13: ...to La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta a...

Страница 14: ...evem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft St...

Страница 15: ...rbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas ATEN O Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras o...

Страница 16: ...temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de e...

Страница 17: ...tuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan...

Страница 18: ...ingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumpe...

Страница 19: ...P Til pumpens luftafl b anvendes luft eller en inaktiv luftart der er fri for st v og partikler Indgangstrykket gennem den s rlige bning skal v re under 2 bar PAS P Undg sammenst d vibrationer eller b...

Страница 20: ...lytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pu...

Страница 21: ...ttenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VIKTIGT Anv nd luft eller delgas fri fr n damm och partiklar f r luftning a...

Страница 22: ...pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og st...

Страница 23: ...De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar FORSIKTIG Unng st t...

Страница 24: ...an seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan...

Страница 25: ...n tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P stett ess pumppuun ilmaa tulee k ytt ilmaa tai jalokaasua joissa ei ole p ly tai hiukkas...

Страница 26: ...at th metafor th diak nhsh kai thn apoq keush twn antli n den pr pei na uperba nontai oi ex j periballontik j sunq kej qermokras a ap 20 C wj 70 C scetik ugras a ap 0 wj 95 mh sumpukn simh o pel thj p...

Страница 27: ...INDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na diocete sete me a ra thn antl a c...

Страница 28: ...the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started wh...

Страница 29: ...ories during the heating process The high temperatures may cause burns CAUTION Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 b...

Страница 30: ...gher initial voltage frequency ratio Model 969 9360 with ConFlat 2 75 external diameter high vacuum flange The external body of the pump is fitted with fins which allow the pump itself to function wit...

Страница 31: ...tional Operating ambient temperature 5 C to 35 C Coolant water flow 10 l h 0 05 GPM temperature 10 C to 30 C pressure 2 to 4 bar 30 to 60 Psi Bakeout temperature 120 C at inlet flange max CF flange 80...

Страница 32: ...ph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum...

Страница 33: ...the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on either pump series and is supplied with a small tab for easy...

Страница 34: ...at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C The heater ba...

Страница 35: ...the suit able holes of the pump Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system In both cases the water temper...

Страница 36: ...in the three feed from the rear as shown in the diagram and screw them in ensuring that they do not protrude from the other end For the feet to the pump by tightening the previ ously inserted grub scr...

Страница 37: ...w 9 l s 10 CFM input voltage 24 Vdc maximum power 2 16 W dimensions 60x60 mm 2 36x2 36 inches Open the package containing the feet and respec tive screws and install them as indicated in the in stalla...

Страница 38: ...N Screw the adapter 1 into the vent hole 2 of the pump The vent device mod 969 9831 allows to avoid undesired pump aeration of the pump during a temporary power failure adjustable time up to 36 min an...

Страница 39: ...l 969 9340 for ISO 63 inlet flange version pump is available as accesso ries 4 System vent valve optional 5 Vacuum chamber 6 Ionization gauge It typically reduces the vibration transmitted from the Tu...

Страница 40: ...gh temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the 2 75 CF flange has six blind holes Attach the units and tighten each one in turn...

Страница 41: ...otor pins A and F are connected to the temperature sensor NTC type 30 K resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start T...

Страница 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

Отзывы: