TECHNICAL INFORMATION
26
87-900-878-01(C)
TECHNICAL SPECIFICATION
The following figure shows the Turbo-V700HT outline drawing. Dimensions are in inches [mm].
Pumping speed
N
2
: 690 l/s
He: 620 l/s
H
2
: 510 l/s
Compression ratio
N
2
: >1 x 10
9
He: 1 x 10
7
H
2
: 2 x 10
6
Base pressure*
minimum with recommended
mechanical forepump:
< 1 x 10
-10
mbar (< 1 x 10
-10
Torr)
minimum with recommended
diaphragm forepump:
2 x 10
-9
mbar (1.5 x 10
-9
Torr)
Inlet flange
CFF 10" O.D.
ISO 200
Foreline flange
KF 25 NW
Rotational speed
42000 RPM
Start-up time
< 5 minutes
Recommended
forepump
mechanical: Varian SD 450
diaphragm: Varian MD 60
Operating position
any
Cooling
requirements
Natural air convection
Forced air or water optional
Operating ambient
temperature
+ 5q C to + 35q C
Coolant water
flow: 200 l/h (0.89 GPM)
temperature: + 10q C to + 30q C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout temperature 120q C at inlet flange max. (CF flange)
80q C at inlet flange max. (ISO flange)
Vibration level
(displacement)
<
0.01
µ
m at inlet flange
Noise level
≤
45 dB (A) at 1 meter
Input
56 Vac, three phase, 700 Hz
Lubricant
permanent lubrication
Storage temperature
- 20q C to + 70q C
Weight kg (lbs)
ISO: 14 (31)
CFF: 20.1 (42.2)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.