Varian 969-9057 Скачать руководство пользователя страница 29

INSTRUCTIONS FOR USE 

 

24 

87-900-878-01(C) 

 

 
The turbopump can be installed in any position. 
Fix  the  turbopump  in  a  stable  position  connecting  the  inlet 
flange  of  the  turbopump  to  a  fixed  counter-flange  capable  of 
withstanding a torque of 4000 Nm around its axis. 
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following ta-
ble  shows,  for  each  flange  and  fixing  device,  the  necessary 
number of clamps or claws and the relevant fixing torque. 
 

FLANGE 

FIXING 

DEVICE  

N. 

FIXING TORQUE 

ISO 200 

M10 clamps 

22 Nm 

 

M10 claws 

12 

22 Nm 

 
The  turbopump  with  ConFlat  inlet  flange  must  be  fixed  to  the 
vacuum  chamber  by  means  of  the  appropriate  Varian  hard-
ware.  See  the  appendix  "Technical  Information"  for  a  detailed 
description. 
To  fix  the  pump  by  means  of  its  base,  it  is  necessary  to  use 
three M6 screws fixed to the foreseen holes of the pump base. 
The used screws must have a minimum strength point of 500 
N/mm

2

 and must be fixed with a torque of 3.1 Nm. 

For  installation  of  optional  accessories,  see  "Technical 
Information". 

USE 

All  the  instructions  for  the  correct  use  of  the  turbopump  are 
contained in the control unit manual. 
Read the manual carefully before using the pump. 
In  order  to  achieve  a  better  (lower)  base  pressure,  the  pump 
casing may be heated using the optional heater. While heating 
the  pump,  the  temperature  of  its inlet flange must not exceed 
120 MC. 

Always use the water cooling system during the heating opera-
tions. 
 

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WARNING!

 

Do  not  touch  the  turbopump  or  any  of  its  accessories  during 
the heating process. The high temperatures may cause burns. 

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   CAUTION 

Use  air  or  inert  gas  free  from  dust  or particles for venting the 
pump.  The  pressure  at  the  vent  port  must  be  less  than  2  bar 
(above atmospheric pressure). 

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!

!

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   CAUTION 

Avoid  impacts,  oscillations  or  harsh  movements  of  the  pump 
when in operation. The bearings may become damaged. 

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   CAUTION 

For  pumping  aggressive  gases,  these  pumps  are  fitted with a 
special port to allow a steady flow of inert gas (like N

2

, Ar) for 

pump bearing protection (see the appendix "Technical Informa-
tion"). 
 

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WARNING!

 

When  employing  the  pump  for  pumping  toxic,  flammable,  or 
radioactive  gases,  please  follow  the  required  procedures  for 
each gas disposal. 
Do not use the pump in presence of explosive gases. 

MAINTENANCE 

The Turbo-V 700HT series pump does not require any mainte-
nance.  Any  work  performed  on  the  pump  must  be carried out 
by authorized personnel. 
 

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!

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WARNING!

 

Before  carrying  out  any  work  on  the  turbopump,  disconnect  it 
from  the  supply,  vent  the  pump  by  opening  the  appropriate 
valve, wait until the rotor has stopped turning and wait until the 
surface temperature of the pump falls below 50 MC. 
 
In  the  case  of  breakdown,  contact  your  local  Varian  service 
center  who  can  supply  a  reconditioned  pump  to  replace  that 
broken down. 

NOTE

 

Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"  
sheet attached to this instruction manual must be filled-in and 
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping. 

 
If  a  pump  is  to  be  scrapped,  it  must  be  disposed  of in accor-
dance with the specific national standards. 
 

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WARNING!

 

To  avoid  injury,  never  put  fingers  or  any  objects  whatso-
ever in the inlet port of the turbopump. The use of the pro-
tective  screen  is  strongly  advised  (optional  extra).  If  a 
vibration  damper  or  flexible  metallic  bellows  are  used  on 
the  inlet  port,  make  sure  that  the  pump  is  fixed  to  the 
base. 

NO!

 

Содержание 969-9057

Страница 1: ...UALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA ODHGIES C...

Страница 2: ...Turbo V 700HT...

Страница 3: ......

Страница 4: ......

Страница 5: ...RBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 AIR COOLING KIT INSTALLATION 31 GAS PURGE VALVE INSTALLATION 32 VENT VA...

Страница 6: ...seguenti condizioni ambientali temperatura da 20 QC a 70 QC umidit relativa 0 95 non condensante Se il tempo di immagazzinamento molto lungo avviare la pompa nel modo SOFT START vedere il manuale del...

Страница 7: ...e aria o gas inerte esente da polvere o particelle La pressione di ingresso attra verso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica ATTENZIONE Evitare urti oscillazio...

Страница 8: ...en k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen m ssen folgende klimatische Verh ltni...

Страница 9: ...umpe noch eventuelle hei e Anschlu teile ber hrt werden denn es besteht Verbrennungsgefahr ACHTUNG F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Edelgase verwenden Der Eingang...

Страница 10: ...ller respecter les conditions environnementales suivantes temp rature de 20UC 70UC humidit relative 0 95 non condensante Si le temps d emmagasinage est tr s long mettre la pompe en marche en mode SOFT...

Страница 11: ...sonnes ATTENTION Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf ri...

Страница 12: ...ones ambientales siguientes temperatura de 20TC a 70TC humedad relativa 0 95 no condensadora Si el periodo de almacenamiento es muy largo poner en marcha la bomba en modalidad SOFT START v ase el manu...

Страница 13: ...culas La presi n de entrada a trav s de la puerta apropiada deber ser inferior a 2 bar por encima de la presi n atmosf rica ATENCION Ev tense golpes oscilaciones o bruscos desplazamientos de la turbob...

Страница 14: ...bombas n o devem ser superadas as seguintes condi es ambientais temperatura de 20VC a 70VC humidade relativa 0 95 n o condensante Se o tempo de armazenagem for muito longo accionar a bomba em SOFT STA...

Страница 15: ...acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas ATEN BO Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de e...

Страница 16: ...atie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20RC tot 70RC relatieve vochtigheid 0 95 ni...

Страница 17: ...ijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de a...

Страница 18: ...skade p udstyret BEM7RK Bem rkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumpene skal f lgende omgivelsesbetingelser v re overholdt temperatur fra 20R...

Страница 19: ...nvendes luft eller en inaktiv luftart der er fri for st v og partikler Indgangstrykket gennem den s rlige bning skal v re under 2 bar PAS P Undg sammenst d vibrationer eller bratte bev gelser i forbin...

Страница 20: ...maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F RVARING F ljande krav p omgivningsf rh llanden g ller vid transport och f rvaring av pumpen temperatur fr n 20QC till 70Q...

Страница 21: ...pumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VIKTIGT Anv nd luft eller delgas fri fr n damm och partiklar f r luftning av pumpen Trycket vid inloppet f r vara h gst 2 b...

Страница 22: ...t skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING N r pumpene transporteres eller lagres m f lgende milj messige krav oppfylles temperatur fra 20MC til 70MC rela...

Страница 23: ...til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk FORSIKTIG Unng st t svingnin...

Страница 24: ...mi tekstiss k sitellyt t rke t tiedot VARASTOINTI Pumppujen kuljetuksen ja varastoinnin aikana t ytyy seuraavien ymp rist a koskevien ehtojen olla t ytettyin l mp tila 20PC 70PC suhteellinen kosteus 0...

Страница 25: ...in kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P stett ess pumppuun ilmaa tulee k ytt ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Sis njohtavan...

Страница 26: ...keu SHMEIWSH SHMEIWSH SHMEIWSH SHMEIWSH Oi shmei seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH APOQHKEUSH APOQHKEUSH APOQHKEUSH Kat th di rkeia thj metafor j kai th...

Страница 27: ...a mpore na prokal sei proswpik j bl bej PROSOCH PROSOCH PROSOCH PROSOCH Gia na diocete sete me a ra thn antl a crhsimopoie ste a ra adran j a rio kaqar ap sk nh lla stoice a H p esh eis dou diam sou...

Страница 28: ...ollowing envi ronmental requirements should not be exceeded temperature from 20M to 70 MC relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see...

Страница 29: ...articles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The b...

Страница 30: ...gs The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding ro tor discs These are made of aluminium alloy During n...

Страница 31: ...60 Operating position any Cooling requirements Natural air convection Forced air or water optional Operating ambient temperature 5q C to 35q C Coolant water flow 200 l h 0 89 GPM temperature 10q C to...

Страница 32: ...TION 27 87 900 878 01 C Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanica...

Страница 33: ...e inlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on each pump The inlet scree...

Страница 34: ...tact with the pump wall to ob tain fast and efficient heating Switch on the heater while the turbopump is in op eration In the event of turbopump overheat the heater will be automatically cut out by t...

Страница 35: ...Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be held on the respective noz zles using hose clips to avoid that t...

Страница 36: ...specification air flow 25 l s 51 CFM input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 119 x 119 mm 4 69 x 4 79 inches Position the fan on the pump ensuring that the holes in the plate line...

Страница 37: ...ge port cover as shown in the follow ing figure and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure VENT VALVE INSTALLATION The vent valve mod 969 9833 allows t...

Страница 38: ...INSTALLATION The vent device mod 969 9831 allows to avoid undesired venting of the pump during a temporary power failure adjustable time up to 36 min and enables an automatic vent operation Unscrew an...

Страница 39: ...LANGE To connect the Turbo pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure Then fix the two flanges with the clamps or claws as shown in the f...

Страница 40: ...mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming Connection C ELECTRICAL The turbopump is con...

Страница 41: ...pheric pressure in the system 4 Turn off the Turbopump 5 When the Turbo V pump and the backing pump are stopped and the system is at at mospheric pressure for a better bearing pro tection it is advisa...

Страница 42: ...ime 969 9833 Vent device with adjustable delay time 969 9831 Forepump DS 402 with 1 ph 3 ph universal motor 949 9382 Dry forevaccum pump MD 60 120 V 949 9411 Dry forevacuum pump MD 60 220 V 949 9412 T...

Страница 43: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 44: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 45: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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