INSTRUCTIONS FOR USE
24
87-900-851-01(A)
The turbopump with ISO inlet flange must be fixed to the
vacuum chamber by means of clamps or claws. The following
table shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE FIXING
DEVICE
N. FIXING
TORQUE
ISO 100
M10 clamps
4
22 Nm
M8 claws
8
11 Nm
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian
hardware. See the appendix "Technical Information" for a
detailed description.
To fix the pump by means of its base, it is necessary to use
three M4 screws fixed to the foreseen holes of the pump base.
The used screws must have a minimum strength point of 500
N/mm
2
and must be fixed with a torque of 0,9 Nm.
For installation of optional accessories, see "Technical
Information".
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperature of its inlet flange must not exceed
120 °C. Always use the water cooling system during the
heating operations.
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WARNING!
Do not touch the turbopump or any of its accessories during
the heating process. The high temperatures may cause burns.
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CAUTION
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar.
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CAUTION
Avoid impacts or harsh movements of the pump when in
operation. The bearings may become damaged.
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CAUTION
For pumping aggressive gases, use the specially desgined
versions of the Turbo - V 250 pump. These pumps are fitted
with a special port through which a flow of inert gas must be
passed between 0,4 and 1 mbar l/s.
MAINTENANCE
The Turbo-V250 series pump does not require any
maintenance. Any work performed on the pump must be
carried out by authorized personnel.
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WARNING!
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
NOTE
Before returning the pump to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be
inserted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in
accordance with the specific national standards.
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WARNING!
To avoid injury, never put fingers or any objects
whatsoever in the inlet port of the turbopump. The use of
the protective screen is strongly advised (optional extra). If
a vibration damper or flexible metallic bellows are used on
the inlet port, make sure that the pump is fixed to the
base.
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