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TECHNICAL INFORMATION 

VACION PLUS PUMP REPLACEMENT PARTS AND ACCESSORIES 

 PART 

NUMBER 

STARCELL 

with Sm-Co 

magnets 

 DIODE 

NOBLE 

DIODE 

STARCELL 

Basic 

pump 

919-1115 919-1125 919-1145  919-1146 

Cables and accessories 

HV radiation resistant cable with interlock 

929-0705 

Replacement parts 

HV Feedthrough 

959-5125 

Pump without magnets 

919-1114 

919-1124 

919-1144 

Ferrite 

magnets 

919-0040 919-0039 919-0035 

-- 

Samarium-Cobalt 

magnets 

-- -- -- 

919-0036 

Heaters (120V) 
 (220V) 

919-0044 
919-0043 

Copper gasket for 2 3/4” inlet flange 
(10-pack, individually sealed) 

FG-0275-CI 

Nut and bolt set for 2 3/4" inlet flange, 
1/4 – 28 x 1 1/4 (25-pack) 

FB-0275-C12 

Copper gasket for 1 1/3" CF feedthrough 
flange (10-pack, individually sealed) 

FG-0133-CI 

Nut and bolt set for 1 1/3" CF feedthrough 
flange, 8-32x3/4 (25-pack) 

FB-0133-C 

 

For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Cata-
logue. 

 21 

87-900-106-01(B) 

Содержание 919-1114

Страница 1: ...odel 919 1115 Model 919 1125 Model 919 1145 Model 919 1146 Model 919 1114 Model 919 1124 Model 919 1144 I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL 87 900 106 01 B APRIL 2006 ...

Страница 2: ...VacIon Plus 20 ...

Страница 3: ......

Страница 4: ......

Страница 5: ... Vacuum evaluation 14 Short circuits 14 TYPICAL INSTALLATION 14 INLET FLANGE CONNECTION 15 CONTROL UNIT CONNECTION 16 SAFETY INTERLOCK 16 HEATER INSTALLATION 16 HEATER REPLACEMENT 17 BAKEOUT OPERATION 17 Bakeout of VacIon pump with the integral heaters 17 OPERATING PROCEDURE 17 MAINTENANCE 18 Exchange of the high voltage feedthrough 18 Leakage current check 19 High potting 19 PUMP TROUBLESHOOTING ...

Страница 6: ...engono informazioni importanti estrapolate dal te sto PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati du rante il trasporto contattare l ufficio vendite locale Durante l o perazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o v...

Страница 7: ...ione all aria il deposito del composto di titanio assorbe vapore acqueo in con seguenza di ciò al successivo avvio il riscaldamento della pom pa provoca il rilascio del vapore e di parte dell idrogeno pompato precedentemente con l effetto dell allungamento del tempo di avvio ATTENZIONE Non avvicinare dispositivi elettronici alla pompa Il campo ma gnetico attorno ad essa può provocare dei malfunzio...

Страница 8: ...hr besteht ACHTUNG Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam daß bei Nichteinhaltung Schäden am Gerät entstehen können Während des Betriebes soll die Umgebungstemperatur zwi schen 0 C und 85 C betragen um die angegebenen techni schen Merkmale zu gewährleisten ANMERKUNG ACHTUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben wer...

Страница 9: ...lußstromwert der Steuereinheit annähert weist auf eine Leckstelle an der Pumpe und am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist während der Anlaufphase nor mal 4 Während des Anlaufes der Ionenpumpe soll das Vorvaku umventil geöffnet bleiben bis ein angemessener Anlauf druck erreicht ist Wenn die Spannung der Ionenpumpe nach Schließung des Ventils abfällt ist das Ventil für eine ...

Страница 10: ...fonctionne ment pour respecter les spécifications techniques déclarées la température ambiante doit être comprise entre 0 C et 85 C ATTENTION Les messages d attention apparaissent avant certaines procé dures dont le non respect peut provoquer des dommages irré versibles à l appareillage NOTE ATTENTION Les notes contiennent des renseignements importants extrapo lés du texte La pompe doit être conse...

Страница 11: ...0 V Une valeur de courant proche du courant de court circuit de l unité de contrôle révèle l existence d une fuite dans la pompe et dans le système Au cours de la phase de démarrage un accroissement momentané de la pres sion de pré vide est normal 4 Laisser la soupape de pré vide ouverte pendant le démar rage de la pompe ionique tant qu une pression de démar rage appropriée n a pas été atteinte Si...

Страница 12: ... in explosive environments or those with a high fire risk Dur ing operation to obtain the specified operation the ambient temperature must be between 0 C and 85 C CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment CAUTION NOTE The notes contain important information taken from the text The pump should be kept sealed with its pinch...

Страница 13: ...pumped hydrogen thus the starting time may be lengthened CAUTION Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning MAINTENANCE Operating procedure The VacIon Plus series pump does not require any mainte nance Any work performed on the pump must be carried out by authorized personnel Check that the controller HV polarity is corre...

Страница 14: ...ity high voltage supply is required to operate Diode and Noble Diode pumps A nega tive polarity high voltage supply is required to op erate StarCell pump since the anode is grounded and the cathode is held at negative potential The pump can operate in any position and can be supported on the mounting flange The inlet Con Flat flange is a 2 3 4 NW 35 Fig 1 shows the VacIon Plus 20 pump Fig 2 shows ...

Страница 15: ...rate the VacIon Plus 20 pump it normally requires an amount of gas equal to 0 6 Torr litres mbar litres Consequently pumps can operate for extended periods of time at low pressures in the non saturated state if they are properly conditioned VACION PLUS 20 STARCELL Fig 3 Pumping speed vs pressure for Nitrogen Fig 4 Pumping speed vs pressure for Argon Fig 5 Pressure vs current diagram 10 87 900 106 ...

Страница 16: ...TECHNICAL INFORMATION VACION PLUS 20 NOBLE DIODE Fig 6 Pumping speed vs pressure for Nitrogen Fig 7 Pumping speed vs pressure for Argon Fig 8 Pressure vs current diagram 11 87 900 106 01 B ...

Страница 17: ...20 DIODE Fig 9 Pumping speed vs pressure for Nitrogen Fig 10 Pressure vs current diagram OUTLINE DRAWING The following figure shows the outline drawing for the VacIon Plus pump Fig 11 VacIon Plus pump outline drawing 12 87 900 106 01 B ...

Страница 18: ...ine of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 13 14 and 15 Fig 12 VacIon Plus pump axis identification Fig 13 Stray magnetic field along X axis Fig 14 Stray magnetic field along Y axis Fig 15 Stray magnetic field along Z axis 13 87 900 106 01 B ...

Страница 19: ...for an indication of one of the following conditions If the pump is free of leaks and is at a low pressure the pressure indication shall within 10 minutes fall to or below the 10 8 Torr mbar range as the volume of gas is pumped If the pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a pop ping sound and the pump current will fluc...

Страница 20: ...rnal vacuum using pliers to open the copper tube pinch off CAUTION Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened WARNING The pinch off seal is extremely sharp Be careful when opening Watch your fingers Use appropriate procedures to maintain the clean condition of the pump and vacuum...

Страница 21: ... or blanked off WARNING Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge com pletely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve trav...

Страница 22: ... the pump and system cool down to room temperature a drop in pressure should be ob served Note that the ion pump can be also baked when switched off into an external turbo pump through a bakeable isolation valve This method gives the best vacuum performance Bakeout of VacIon pump with the integral heaters 1 The integral heaters are to be powered with the appropriate voltage Please refer to the ins...

Страница 23: ... it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge com pletely VacIon Plus pumps are maintenance free In case of life time expiry or premature fail...

Страница 24: ...d emis sion current high potting should be performed High potting is the term used to describe the ap plication of higher than normal operating voltage 10 12 KV 20 50 mA for the purpose of burning off whiskers sharp edges on the pump cathode High potting should be done under vacuum and preferably without pump magnets installed to re duce the drawn current The output of an appropriately sized AC tr...

Страница 25: ... and pump Subse quent reduction in pressure de pends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and they are very difficult to re move even by baking Bake the system walls thereby accelerating the desorption proc ess Baking mobilizes the vapours so they can be cracked and pumped by discharge see para BAKEOUT OPERATI...

Страница 26: ... Ferrite magnets 919 0040 919 0039 919 0035 Samarium Cobalt magnets 919 0036 Heaters 120V 220V 919 0044 919 0043 Copper gasket for 2 3 4 inlet flange 10 pack individually sealed FG 0275 CI Nut and bolt set for 2 3 4 inlet flange 1 4 28 x 1 1 4 25 pack FB 0275 C12 Copper gasket for 1 1 3 CF feedthrough flange 10 pack individually sealed FG 0133 CI Nut and bolt set for 1 1 3 CF feedthrough flange 8 ...

Страница 27: ...20 Vac 2 Neg 120 Vac 1 Pos 120 Vac 2 Pos 230 Vac 1 Neg 230 Vac 2 Neg 230 Vac 1 Pos 230 Vac 2 Pos 929 7008 929 7009 929 7010 929 7011 929 7012 929 7013 929 7014 929 7015 MidiVac 120 Vac with single output 120 Vac with double output 230 Vac with single output 230 Vac with double output 929 5001 929 5005 929 5003 929 5007 MiniVac MiniVac 120 Vac 220 Vac 24 Vdc 929 0191 929 0290 929 0196 MiniLink 120 ...

Страница 28: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 29: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 30: ...2 1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chi...

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