Vaisala PTB210 SERIES, Руководство пользователя

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The BAROCAP® pressure sensor consists of 2 layers of single crystal silicon having a layer of
glass between them. The thinner silicon layer creates an integrated vacuum reference
chamber, and forms a pressure-sensitive silicon diaphragm. The thicker silicon layer is the rigid
base plate of the sensor, and it is clad with a glass dielectric. Thin film metallization has been
deposited to form a capacitor electrode inside the vacuum reference chamber. The other
electrode is the pressure-sensitive silicon diaphragm.
The coefficients of thermal expansion of silicon and glass materials used in the BAROCAP®
pressure sensor are carefully matched together to minimize the temperature dependence, and
to maximize the long-term stability. The BAROCAP® pressure sensor is designed to achieve
zero temperature dependence at 1000 hPa, and its long-term stability has been maximized by
thermal ageing at an elevated temperature.
2.2 Safety
Only licensed experts may install electrical components. They
must adhere to local and state legislation and regulations.
WARNING!
2.3 Trademarks
Vaisala
â
and BAROCAP
â
are registered trademarks of Vaisala Oyj.
Windows
â
is either a registered trademark or trademark of Microsoft Corporation in the
United States and other countries.
All other product or company names that may be mentioned in this publication are trade
names, trademarks, or registered trademarks of their respective owners.
PTB210 Series User Guide M210669EN-E
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