Documents are only to be used and distributed completely and unchanged. It is strictly the users´ responsibility to check carefully
the validity of this document with respect to his product. Manual-no.: 999069 / 28/04/2016
Vacuum connection diagram:
P1
Backing pump
P2
Diffusion pump
V1
Fore-vacuum valve
V2
By-pass valve
V3
High vacuum valve
V4
Venting valve
M1
Measuring point 1
M2
Measuring point 2
F0
Oil mist filter
V1
V2
V3
V4
M1
M2
F0
P1
P2
Venting the vacuum vessel
➨
Close high vacuum valve (V3).
➨
Close by-pass valve (V2) (if not closed).
➨
Open venting valve (V4).
Pumping down again
➨
Close venting valve (V4).
➨
Close fore-vacuum valve (V1).
➨
Open by-pass valve (V2).
➨
Close by-pass valve (V2) once the pressure inside the vacuum vessel is below
0.1 mbar.
➨
Open fore-vacuum valve (V1).
➨
Open high vacuum valve (V3).
+
Note:
If the fore-vacuum (M1) rises above 0.1 mbar, close the high vacuum valve
(V3) and pump down with the backing pump to a pressure below 0.1 mbar.
+
If the thermal cutout of the rotary vane pump has tripped, it is imperative
that the high vacuum valve (V3) be closed and the diffusion pump switched
off!
During operation
+
Maximum ambient temperature
: 40 °C
Check the maximum temperatures, if installing the pump in a cabinet or a housing.
Make sure ventilation is adequate, especially if the ambient temperature is el-
evated.
• Check the oil level of the rotary vane pump and the pump fluid level of the diffu-
sion pump every time before starting the pump, however at least once a week.
Check the oil and pump fluid levels more frequently if high amounts of gas or
vapor are pumped.
