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No.35020-2-02-3 

 

User Manual

 

 

 

Small Vacuum Deposition System

 

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Please read the following before using this product. 
Keep this manual in a safe place ready for use. 

 

The content of this manual is liable to change without prior notice due to 
changes in product specifications, product improvements and revisions. 

 

 

 

ULVAC KIKO, Inc. 

Содержание VTR-060M/ERH

Страница 1: ...Please read the following before using this product Keep this manual in a safe place ready for use The content of this manual is liable to change without prior notice due to changes in product specif...

Страница 2: ...cation Individual Component Specifications Standard Accessories Using Switches Handles and Operation Levers Layout of Switches Handles and Operation Levers Exhaust system diagram Electrical system dia...

Страница 3: ...Repairs Hazards During Maintenance and Repairs and Associated Safety Measures Customer Maintenance and Repairs Removing Maintaining and Fitting the Device Sealed Rotary Vacuum Pump Turbomolecular Pum...

Страница 4: ...e section For safe use of the product thoroughly before using the equipment The precautions noted here are provided to ensure that the product is used safely and to avoid danger and injury to users an...

Страница 5: ...it When the capacity of the breaker is insufficient the breakers may trip if there is an overcurrent during operation Connect to ground Connect to a Class D ground This equipment uses a grounded plug...

Страница 6: ...his equipment This will increase the room temperature Installation Warning Check the environment Install the equipment in a location that satisfies the following requirements 1 Flat and level 2 Floor...

Страница 7: ...t removing the top lid the top lid may fall down and become damaged when the chamber is opened Pressurize to atmospheric pressure When pressurizing the vacuum tank to atmospheric pressure stop the tur...

Страница 8: ...ive cover to the glass chamber and the hinges are not loose If loose the glass chamber can fall down and cause an accident Caution Periodic replacement As a general rule replace the oil mist trap elem...

Страница 9: ...n etc d Malfunctions caused by modification or repair that is carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise...

Страница 10: ...rior approval from the manufacturer Prohibited 2 Safety Equipment and its Purpose and Function Item Purpose Function Method of verification Error in internal wiring circuit System protection Circuit p...

Страница 11: ...l use refer to the specifications sheet 4 Individual Component Specifications Component Model and specifications Qty 1 Glass chamber Dimensions Inner diameter 236 mm 250 mm H Material Borosilicate gla...

Страница 12: ...ssure 1 3 Pa Power requirements 370 VA Hydraulic oil SMR 100 180 mL 1 For special use refer to the specifications sheet 5 Standard Accessories 1 Power cable For equipment unit 100 V single phase with...

Страница 13: ...ts When it stops automatically to protect when TMP malfunctions LED lights up Input power has been turned ON LED lights up TMP starts up accelerates LED lights up TMP operates normally running at rate...

Страница 14: ...7 Layout of Switches Handles and Operation Levers Standard specification Exhaust system diagram Electrical system diagram...

Страница 15: ...Option specification Exhaust system diagram Electrical system diagram...

Страница 16: ...a location that satisfies the following requirements 1 Flat and level 2 Floor with sufficient strength 3 Good ventilation 4 Protected from direct sunlight 5 Room temperature 8 30 C 6 No danger of igni...

Страница 17: ...city of the breaker is insufficient the breakers may trip if there is an overcurrent during operation Connect to ground This equipment uses a grounded plug When using a plug adapter connect the ground...

Страница 18: ...Wiring Diagram of Evaporation Power Supply Output Standard specification One point type Option specification Two point type Option specification Three point type...

Страница 19: ...omolecular pump Check top lid When opening the chamber to remove the vapor source or deposition materials etc remove the top lid before opening the chamber If opened without removing the top lid the t...

Страница 20: ...ound becomes weaker or quieter 2 TMP controller START Press TMP starts When accelerating ACCELERATION lights up 3 TMP operates normally after approx 2 5 min NORMAL lights up 2 3 Deposition 1 Evaporati...

Страница 21: ...op lid and remove the substrate Perform the procedure 2 1 again to continue deposition 6 Close the chamber and place the top lid on it to quit deposition 7 Customer breaker when necessary OFF 3 Operat...

Страница 22: ...e time as TMP STOP 10 Customer breaker when necessary OFF 3 4 Open Vacuum Tank 1 Vacuum gauge filament OFF In the case of SH 2 alone mode 2 Main valve CLOSE 3 3 way valve FORE Check 4 Vacuum tank VENT...

Страница 23: ...ption devices 4 Handling Malfunctions 4 1 Instantaneous Power Failure All devices except the TMP are automatically restored to the status prior to the power failure The TMP does not restore automatica...

Страница 24: ...cement As a general rule replace the oil mist trap element every 6 months to a year If the element is clogged the exhaust resistance increases and can cause an oil leak from the axis seal or damage th...

Страница 25: ...wiring connectors for the motor Remove the ground wire Remove the nuts Qty 4 for the anti vibration rubber mounts on the pump base Lift up the motor and front cover and remove the pump unit 3 Change o...

Страница 26: ...ce and repairs After receiving the equipment maintenance and repairs are performed by the TMP manufacturer Protect the equipment from large impacts or vibration during transport There are no specific...

Страница 27: ...he base of the oil mist trap unit clockwise Note Fasten while ensuring that the O ring does not fall off 3 4 Replace Base Plate and Top Lid O ring 1 Tools required Precision flathead screwdriver 2 Rem...

Страница 28: ...ace probe When necessary Ionization gauge Option Replace probe When necessary Oil mist trap Replace element Every 6 to 12 months Periodic Inspection for Equipment Performance Inspect the equipment per...

Страница 29: ...to the Turbomolecular Pump User Manual Problem with the sealed rotary vacuum pump Refer to the Sealed Rotary Vacuum Pump User Manual Problem with measuring equipment Refer to the user manual for each...

Страница 30: ...Consumables Standard specification Location Name Specification Material Qty Replaceable by customer Vacuum tank O ring for top lid O ring for base plate Electrode gasket KV 1020 01 019 O ring for ser...

Страница 31: ...Legris sealing material Ball seal stem seal 0482 0917 2 1 Flat sealing material 24 16 2 Solenoid valve Flat sealing material 24 16 2 Roughing piping Center ring O ring O ring for leak port O ring for...

Страница 32: ...valve Roughing piping By adding the valves and piping to the exhaust system it ensures that the main pump does not stop and makes the system able to pressurize the inside of the vacuum tank to atmosp...

Страница 33: ...assembled Substrate heater Heats the sample Max 650 C Factory assembled Carbon electrode set For fine carbon layer deposition Can be fitted by customer Measuring device rack For storing control device...

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