Safety 1
PREFACE
0-1.Before Use
We, ULVAC KIKO, Inc., thank you for purchasing our product, UFO-003.
When receiving the product, please confirm it is the same model as you ordered. And check if there are
any damages on it during the transit.
For the name of each component part for oil filtration system in this manual, please refer to the Outside
View on page #4.
To ensure a long life for this product, read this manual carefully prior to
installation, operation, inspection or maintenance. Also, pay attention to
ascertain the details of safety, specification, operational precautions of this
product.
All rights as well as copyright are reserved by ULVAC KIKO, Inc.
All materials in this manual shall not be copied without permission by ULVAC
KIKO, Inc. Printed in Japan.
0-2.Marks & Symbols for Safety
For your complete understanding of items to be observed in this instruction manual
and the warning labels on this product, marks/symbols are categorized as follows:
DANGER
“DANGER” indicates major hazardous situations, which present an immediate
threat of death or serious injury.
WARNING
“WARNING” indicates hazardous situations, which may present a potential to
death or serious injury.
CAUTION
“CAUTION” indicates hazardous situations, where a potential hazard or
unsafe practice could cause personal injury or equipment damage.
NOTE
“NOTE” indicates undesirable situations, where a potential hazard could cause
equipment damage or abnormal operation.
0-3.Safety Precautions
DANGER
After the pump is operated to evacuate toxic gases, not only the pump and the
filter, but also the pump oil gets contaminated. Please pay attention in the
time of maintenance.
DANGER
For the elements/component parts, using the oil filtration system,
please use specified ones for replacement.
The use of any other products than the specified ones will cause oil leakage,
malfunction of filtration, or explosion.
CAUTION
NOTE
