Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 53 / 74

RF Power Supply and Matching Box 5. Operation
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5-2-2. Remote operation method (external control)
1) Operation mode menu
To change the operation mode, press the "ESC" key several times to display the configuration screen,
then select <ANALOG> with the left and right keys and press the "ENT" key.
(Operation mode selection screen)
2) Automatic matching operation
1. Switch between automatic and manual with the automatic matching controller's AMC.EXT
connector.
2. Select automatic mode by opening AMC.EXT pins 1-9 on the automatic matching controller.
3. Automatic matching starts with RF ON.
4. For the AMC.EXT connector's pin assignments, see Figure 4-7.
3) Manual matching operation
1. Switch between automatic and manual with the automatic matching controller's AMC.EXT
connector.
2. Select manual mode by shorting AMC.EXT pins 1-9 on the automatic matching controller.
3. The positions of the variable capacitors are controlled by external command voltage.
4. For example, to move TUNE to 50%, you must input 5.0 V to AMC.EXT connector pins 3-11
(TUNE analog preset).
5. Similarly, to move MATCH to 30%, you must input 3.0 V to to pins 4-12 (MATCH analog preset).
AMC CONTROL SELECT
PANEL PR・RC <ANALOG>
Figure 5-2 Timing chart during external analog recall operation
RF
ON/OFF
ON
OFF
AMC
MANU/AUTO
MANU
AUTO
TUNE/MATCH
ANALOG PRESET
０
９９
TUNE/MATCH
POSITION
０
９９