Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 26 / 74

RF Power Supply and Matching Box 3. Setup
18
3-5-2. Input power supply wiring
Warning
First connect the supplied input cable's connector to the RF power supply and then connect
the other end.
Turn off your main breaker before wiring the input power supply.
3-5-3. Connecting the earth terminal
For the earth connection, see "Figure 3-5 Grounding the system" and securely connect the system to
ground.
Warning
High voltages (several kilovolts) are generated by resonance in the matching box. You may
get an electric shock if the system is not properly grounded. Always ground the system. Wire
the ground so that the matching box's ground resistance is 10
Ω or less. According to
Japanese standards, Class A grounding in Article 18 of the Electrical Equipment Standards
is applicable. Wire the RF power supply's earth (E) terminal for Class D grounding (Class A
grounding when output is 5.0 kW or higher).
Figure 3-4 Power supply input terminal wiring
RF
Power
Supply
Matching
Box
Wire with 14 sq or higher wire.
Better not to use copper plate.
Class A Equip.
Wire with 14 sq or higher wire.
Better not to use copper plate.
Make this contact surface/
contact well, pass return current.
Figure 3-5 Grounding the system
3-phase
*
Wire the pins for the RF power supply
input connector as shown below
1
RF Power
Supply
R (Red)
S (White)
T (Black)
2
3
4
GND (Green)