![Ulvac RFS-03D Скачать руководство пользователя страница 20](http://html1.mh-extra.com/html/ulvac/rfs-03d/rfs-03d_instruction-manual_3557704020.webp)
RF
POWER
SUPPLY
~
RFS-03D
~
5.MAINTENANCE
12
5.
MAINTENANCE
The section describes necessary maintenance to use the product for years.
If you fail to do maintenance, wear of the product would be accelerated and shutdown
of the product would be led. Read this section carefully and do maintenance
5.1.
MAINTENANCE AND INSPECTION OF RF POWER SUPPLY
For inspection/maintenance of the RF power supply, proceed as follows. Once every six months check
the connector for possible corrosion and clogging.
WARNING
Turn off the main breaker of the power supply
used when operating the product
when you do
maintenance and inspection of the unit. And, wait for three minutes after turning the breaker off
and disconnecting a plug. A voltage may be left in the cable. If you touch by mistake, it may
become an accident resulting in injury or death.
DANGER
Never open a cover of the power supply in power distribution.
Voltage generated from
a power
supply used when operating the product
is danger enough to endanger human lives. If perchance
human touch such voltage, serious accident is led. And Never distribute power with a cover
opened.
5.2.
RECOMMENDED REPLACEMENT PARTS OF RF POWER SUPPLY
We recommend a regular overhaul to use the power supply for a longer span.
Please refer to Table 5.1 recommended replacement parts below.
Table 5.1 Recommended replacement parts of RF power supply
No.
Parts
Service life
Period of regular maintenance or
replacement
1
Cooling fun
30000h/50℃
Per 3 years
2
Operation switch
10000 times
Per 3 years(10 times/day)
3
Switching power supply
8 years/50℃
Per 6 to 8 years
4
Power switch
10000 times
Per 7 to 9 years(3 times/day)
5
Electrolytic condenser
10 years/50℃
Per 7 to 9 years
Note: Neither service life nor recommended exchange period of the parts means the product life guarantee.
The consumptive speed of these parts changes greatly with operating frequency of your device.