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D/N.MGMBD02E,2018.12

ULVAC CRYOGENICS INCORPORATED

CRYO-METER MBD-D

Instruction Manual

Export Control Policy

We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.

Содержание MBD-D

Страница 1: ...INCORPORATED CRYO METER MBD D Instruction Manual Export Control Policy We recommend that ALL customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when...

Страница 2: ......

Страница 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Страница 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Страница 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Страница 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Страница 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

Страница 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 9: ...onal and local laws and regulations We provide Safety Data Sheet SDS of our products upon your request Please contact us if necessary WARNING The cryopumps or cryocoolers may contain residue of hazard...

Страница 10: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 11: ...with MBD D 9 5 5 Modbus Protocol 9 6 Troubleshooting 13 Appendix A CRYO METER MBD D External Dimensions 15 FIGURES Figure 1 1 Exterior of MBD D 1 Figure 1 2 MBD D Front Panel 1 Figure 3 1 MBD D Rear...

Страница 12: ...ength of the power cable is 3m 2 Types of cables for connecting to MBS C or MBS are listed on Table 1 2 in MBS C instruction manual Please refer to the table and place a separate order for an appropri...

Страница 13: ...ple and displays the 1st and 2nd stage temperatures digitally The display shows the second stage temperature from 10K to 350K and the first stage from 45K to 350K The power source should be in the ran...

Страница 14: ...ce 2 Voltage 24 VDC 2 5 Current 400mA max Ambient Conditions Indoors below amplitude of 1000m Refrain from direct sunshine or corrosive gasses Temperature while in operation 0 40 C typ 25 C Display ac...

Страница 15: ...or R03 P3M Cables are optional A 24V MBS MBS C 24V Power Output B No Connection C 0V ANALOG IN R03 PB2F or R03 P2F Cables are optional A INPUT Analog signal input from MBS MBS C 5 0V 10 350K B ACOM RS...

Страница 16: ...t panel all the way seated in 2 Attach the fixing bracket on top and bottom or left and right sides of the MBD D 3 Fasten the screws to fix the MBD D 4 Connect the cables included in the package to th...

Страница 17: ...be wired by customers Figure 4 1 Wiring MBD D and MBS C Customer s Control Board Shielded Twisted Cable A B MBS C POWER RELAY ANALOG OUT K CA A B C A B MBD D POWER OUT ANALOG IN Shielded Twisted Cabl...

Страница 18: ...d Twisted Cable DIGITAL IN Customer s Control Board C Cu us st to om me er r s s S Sy ys st te em m 20K 280K 3 3 P Po ow we er r C Ca ab bl le e Signal Cable K thermocouple OUT K Thermo Shielded Twist...

Страница 19: ...or international standard use components that meet such requirements Refer to IEC60127 IEC60947 or others When the power source of 200V is used like as MBD D it is recommended to install a varistor n...

Страница 20: ...Communication Function The MBD D can communicate with the C30S compressor unit Connect the MBD D and C30S at RS485 port with C30S cable optional to display cryopump temperature on the C30S The measur...

Страница 21: ...ation with MBD D The procedure to transmit data directly without C30S is as follows Direct Communication Settings From the rear of the MBD D connect the pin No 4 of RS485 and D or RX and TX of RS485 o...

Страница 22: ...cation and is experiencing entanglement or disconnection such communication is regarded as invalid The MBD D performs Error Check following the CRC 16 method The CRC 16 calculation is as follows The d...

Страница 23: ...ocouple 10K 350K 100 3500 0x4003 1st Stage Temperature x10 Read Only K Thermocouple 45K 350K 450 3500 0x4064 2nd Comparative Temperature x10 Read Write Default 200 20K 0x4065 1st Comparative Temperatu...

Страница 24: ...Stage AuFe C disconnection 1 7 Reserved 6 Reserved 5 1st comparative temperature 4 1st measured temperature 1 4 1st comparative temperature 3 1st measured temperature 1st comparative temperature 4 1 3...

Страница 25: ...roblem is observed check MBD D power terminal connection status cables supplied by UCI is used or proper voltage is supplied through the cable If none of the above problems is detected MBD D might hav...

Страница 26: ...the problem lies in operation not in MBD D If there is no problem in operation follow the instruction in the above column Temperature display is unstable Signal cable DC power cable Power terminal Ca...

Страница 27: ...CRYO METER MBD D Instruction Manual ULVAC CRYOGENICS INCORPORATED 15 Appendix A Cryo Meter MBD D External Dimensions Panel cutout dimensions Connector locations...

Страница 28: ...16 ULVAC CRYOGENICS INCORPORATED This page intentionally left balnk...

Страница 29: ...Chigasaki Kanagawa 253 0085 Japan Sales Tel 81 467 85 8884 Service Engineering Division Tel 81 467 85 9366 Fax 81 467 83 4838 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Che...

Страница 30: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 31: ...CRYO METER MBD series Instruction Manual ULVAC CRYOGENICS INCORPORATED R 1 Revision History Date Revision No Contents 2018 12 11 2018 12 First edition...

Страница 32: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

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