Ulvac G-Tran ISG1, Инструкция по эксплуатации

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17. CCM Series Ceramic Capacitance Manometer
This section describes the operation of the CCMT-A series, CCMT-D series and CCMH-A
series ceramic capacitance manometers.
Before reading this section, read the standard operating procedure in the preceding sections.
17.1.
Sensor Unit Setting
Turn on the power to this unit and make sure that the following display lights for several
seconds.
For display of others, change the setting as shown below, referring to Section 6.
Display Sensor unit
Cn3 CCMT-1000A CCMT-1000D CCMH-1000A
Cn2 CCMT-100A CCMT-100D CCMH-100A
Cn1 CCMT-10A CCMT-10D CCMH-10A
Cn0 - CCMT-1D CCMH-1A
17.2.
Front Panel Display
17.2.1. Pressure display
State Pressure indicator LED
In normal measurement
0.0
×
10
+N-3
Pa to 1.3
×
10
+N
Pa
Below measurement pressure range Display by blinking
Above measurement pressure range FFF
When zero point adjustment is completed
0.0
×
10
+N-3
Pa
ZERO LED lights.
When zero point adjustment is reset Pressure indication ZERO LED lights.
When sensor unit is not connected - - - Err LED lights.
17.2.2.
Front Panel Operation
Inscription Function Remarks
PROG
Enters into the program mode Refer to Section 5.
ZERO
Makes zero point adjustment
DEG
Not used
FIL Not used
17.3.
Operation setting
For adjustment of the zero point, the following settings are available.
Setting Overview
Front panel operation mode Only operation on front panel is possible.
External I/O operation mode Only external I/O can be operated.
RS485 communication mode Only RS485 communication can be operated.
17.3.1.
RS425 communication operation setting “L1”, “L2”
Selects whether RS485 communication is to be used or not.
Refer to Section 22 for the detailed setting of RS485.
Display Detail Remarks
“L1” Operation on the front panel or external I/O RS485:Pressure reading only
“L2” Only RS485 communication can be operated.
17.3.2.
Front panel and external I/O operation setting “AJ”
Selects whether execution of zero point adjustment is to be made on the front panel or by
external I/O.
Display Detail
“F” Operation on front panel only
“O” Operation of I/O only