6
ULVAC CRYOGENICS INCORPORATED
2. Component Description
Figure 2-1
Front view of EMP-14A
RUN/STOP RESET
AUTO
READY
SUPPLY
AUTO
MANU
START
STOP
eco
MANU
Maintenance
COMP.AL.
GN2 AL.
L
0
80
OR
60
40
20
Temp.
monitor
(option)
Figure 2-2
Operation panel of EMP-14A
Emergency Off Button
Operation Panel
Pressure
Gauge
LN2 Manual Dispense Port
SA115-C Display
Air Entrance
Temperature
Meter
(Optional)