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05 

 
 

 

 

Operation 

(14) This pump is not designed to be explosion-proof. When using the pump, ensure that 

there are no inflammable materials such as solvents, or explosive gases, in the vicinity. 
Use under such conditions may result in injury or fire. 

(15) Inserting fingers or objects into the motor inlet may result in electric shock, injury, or 

fire. 

(16) Operating the pump with the discharge outlet blocked, or with a device which prevents 

passage of gas to the discharge outlet, may result in rupture of the pump. The internal 
pressure of the pump rises and the pump body may rupture and the motor become 
overloaded. 

 

This pump is not designed to be pressure-resistant. The internal pressure of the pump is 
limited to 0.03 MPa (gauge pressure). 

 

Maintenance and Repair 

(17) The pump should be dismantled or repaired only by a repair technician trained by the 

manufacturer. 

(18) To prevent ingestion of microscopic particles resulting from wear of components, use a 

dust mask and gloves when replacing diaphragms, valves, and O rings. 

 

 

 

 

 

Installation 

(1)  To prevent back injuries, always use at least two people when lifting and moving the 

pump. 

(2)  Microscopic particles resulting from wear of components are discharged from the outlet 

and contaminate the room. If necessary, connect a pipe from the discharge outlet to the 
outside of the building. 

(3)  The fine clearances used in this pump require that the following conditions be satisfied 

during storage, installation, and operation. 

1.  Ambient temperature of 7~40°C and maximum relative humidity of 85% during 

operation. 

2.  Other conditions for storage and operation. 

a)  Level floor of sufficient strength. 
b)  No condensation 
c)  Dust-free environment 
d) Well ventilated 
e)  Environment free of corrosive or explosive gas. 
f)  Not subject to direct sunlight. 
g)  No danger of fire. 
h) Maximum ambient temperature of 40°C during assembly of pump. 

 

 

 

 

!

Warning

 

 

!

Caution

 

Содержание DAL-181D

Страница 1: ...Users Please read this manual thoroughly to ensure safe and effective use of the equipment Keep this manual in a safe place Due to periodic improvements in performance the equipment described in this...

Страница 2: ...Fitting Piping 3 7 Piping 3 8 Storage 4 Cautions for Operation 4 1 Cautions for Operation 4 2 Operation of the Thermal Protection Relay 4 3 Precautions when starting 5 Pump Performance 5 1 Pressure Ac...

Страница 3: ...gion of the voltage and frequency Fig 3 2 Wiring Diagram Fig 3 3 Fitting Piping Fig 3 4 Example of Piping Used When Evacuating a Vessel Table 1 1 Product Specifications Table 6 1 Consumables List Tabl...

Страница 4: ...uipment correctly Read the section on Safe Use particularly closely Keep This Manual in a Safe Place After reading this manual be sure to keep it in a safe place which is readily accessible to others...

Страница 5: ...1 Note Piping is not fitted Fit after opening the package see 3 6 Fitting Piping on P5 3 Is the pump damaged in any way 4 Are any external screws or inlet and outlet pipes loose Are any components mi...

Страница 6: ...be followed Safety icons The meanings of the safety icons are as follows Incorrect handling of the equipment is very likely to result in death or serious injury to the operator Incorrect handling of t...

Страница 7: ...e the power cord from the wall socket before checking or repairing the pump Failure to do so may result in electric shock or the pump suddenly starting and causing injury 5 Ensure that the relevant wi...

Страница 8: ...ed by the manufacturer 18 To prevent ingestion of microscopic particles resulting from wear of components use a dust mask and gloves when replacing diaphragms valves and O rings Installation 1 To prev...

Страница 9: ...ately after having been switched off may result in burns 7 Do not insert fingers or objects into or peer into the inlet or outlet during operation Maintenance and Repair 8 If the pump ceases operation...

Страница 10: ...ng appropriate caution during maintenance 5 Entry of corrosive gases organic solvents fluids or gases able to be condensed eg steam may result in damage to the pump and prevent normal operation 6 Entr...

Страница 11: ...r long periods at near atmospheric pressure 1 2 Specifications Table 1 1 Product Specifications Model DAL 181D DAL 361S Voltage 200 Exhaust rate 50Hz 180 L min 360 L min 60Hz 210 L min 390 L min Opera...

Страница 12: ...View Fig 2 1 DAL 181D and 361S Dimensions 3 Installation and Storage 3 1 Cautions for Installation and Storage See Warning 1 2 3 5 6 7 8 9 10 11 12 13 P04 See Caution 1 2 3 P05 See Note 1 P07 Warning...

Страница 13: ...on and cleaning Particular attention should be paid to ambient temperature when fitting the pump to equipment Use anti vibration rubbers to isolate the pump from vibrations in the equipment See 3 2 En...

Страница 14: ...power cable to the pump terminal block install the switch between the terminal block and the power supply and insert the power cable plug into regulation voltage socket see Fig 3 2 Wiring Diagram Not...

Страница 15: ...se of selecting the inlet pipe and outlet pipe that are not from our products please select the outlet pipe that has same or larger inner diameter length with the inlet pipe 5 When evacuating a vessel...

Страница 16: ...onditions and the pump may be difficult to start Use the following procedure in this case 1 Open the inlet to atmosphere and switch power ON OFF two or three times until the pump starts If the pump st...

Страница 17: ...introduce other gases resulting in increased pressure 5 2 Evacuation Rate The rate of evacuation for the pump varies with the type of gas entering the inlet and its pressure The maximum rate of evacua...

Страница 18: ...e pump 3 Check that gas is discharged normally If a problem is found take the measures described in 6 5 Troubleshooting List 6 3 Regular Inspections After commencement of use inspect consumables after...

Страница 19: ...ng symptoms become apparent Inlet filters Clean if filter is dirty or has rubbish on it Exhaust filters Replace if filter is dirty clogged or hard Diaphragms Replace if worn hard or deformed or if sur...

Страница 20: ...ure Always put on dust mask and gloves before replacing diaphragms and valves Any fine particles produced by mechanical wearing may become airborne causing a health risk if inhaled Prepare the followi...

Страница 21: ...eyebolt M8 flat washer M10 truss head screws M5 10 and remove the pump panels 1 and 2 Photo 1 2 2 The piping black is visible when the panels are removed Remove the pump head as described below and t...

Страница 22: ...agm in a clockwise direction until it stops Tighten a further 5 10 from that position Photo 5 Note Take care not to over tighten 2 3 Fitting Pump Heads 1 Place the pump head on the casing so that the...

Страница 23: ...ump head and diaphragm occurs it will make a noise and cause the pump head to vibrate Switch off the machine and contact the manufacturer s service division 7 Temporarily fix the pump panel 1 in place...

Страница 24: ...lbow T joint T joint Photo 17 Fan side Photo 16 Terminal Block side Straight piping T joint T joint Straight piping Photo 12 Terminal Block side Photo 13 Fan side Photo 14 Piping Photo 15 Top View T j...

Страница 25: ...d the area on the pump head where the valve was fastened 5 Fasten one valve A marking downwards to the inlet slot of side 1 and side 2 and then fasten one valve A marking upwards and one valve clamp A...

Страница 26: ...Tighten diagonally opposite pairs of hexagonal bolts to 6N m with the torque wrench a number of times Note When viewed from side on the O ring should be hidden from view 8 Fix the pump head in place...

Страница 27: ...d fix it in place with the hexagonal bolts M5 16 Photo 24 Note Fasten so that the inlet side of the valve retainer connects to the inlet side slot of the pump head Note Tighten diagonally opposite pai...

Страница 28: ...any vacuum grease on the fastener parts Fix the long hose nipples L 1 L 2 S and the G 1 2 plug with a spanner Note Do not over tighten Over tightening can damage the O rings 5 Remove the Pump Head s O...

Страница 29: ...ng T joints elbows straight pipes synflex tubes and connecting tubes with new parts Note When replacing piping lightly apply vacuum grease to the connecting areas of the piping and then connect the pi...

Страница 30: ...to be Replaced Top View Piping for DAL 360S Unit with pump heads and piping fitted T joint L shaped hose connection Elbow Connecting tube Connecting tube Fan side Terminal Block side Elbow T joint T j...

Страница 31: ...3 Use solvent to clean the fastening area of the exhaust filter Photo 27 4 Fit the new exhaust filter taking care to prevent it from collapsing in Then check to make sure the exhaust filter is not de...

Страница 32: ...her pump 2 Pressure measurement is incorrect 2 Measure the pressure correctly 5 1 3 Vacuum gauge is unsuitable 3 Measure with a calibrated vacuum gauge suitable for the pressure range 5 1 4 The inlet...

Страница 33: ...and inspection etc d Malfunctions caused by modifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused...

Страница 34: ...Industrial Safety and Health Law designates particular substances as the materials to be notified 2 Usage Status Operation Method Approx hours per day years and months Continuous Operation Intermitte...

Страница 35: ...6 6397 2286 ULVAC KIKO Inc https ulvac kiko com en Please contact us for products Service Base or other Inquiries from here ULVAC Inc Components Division 2500 Hagisono Chigasaki Kanagawa 253 8543 Japa...

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